Process chamber

• US 6,485,531 B1
• Filed: 08/27/1999
• Issued: 11/26/2002
• Est. Priority Date: 09/15/1998
• Status: Expired due to Term

• Current Assignee: Levitronix Technologies, LLC
• Original Assignee: Levitronix LLC (George N. Hatsopoulos, PhD)
• Inventors: Schöb, Reto
• Primary Examiner(s): Graybill, David E.
• Application Number:
  US09/384,818
• Time in Patent Office: 1,187 Days
• Field of Search: 29/250.1, 118/500, 118/730, 118/52
• US Class Current: 29/25.01
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: H01L 21/68721 characterised by edge clamping, e.g. clamping ring
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft

Abstract

In a process chamber (1), in which various processing steps in the manufacture of semiconductors can be carried out, there is arranged a rotationally drivable rotary head (3) which serves as a holder for a substantially disc-shaped object to be processed (W), e.g. for a wafer. Furthermore, at least one applicator (50, 51, 52, 53) is provided in the process chamber (1) for the provision of a medium which acts on the object to be processed (W). Means (4) are arranged radially around the rotary head (3) for the journalling and for the driving of the rotary head (3).

Claims

1. A process chamber in which various processing steps in the manufacture of semiconductors can be carried out for a wafer comprising:

a process chamber (1) having an interior for the processing of a disc-shaped object and an exterior for isolating the disc-shaped object during processing;

a rotationally driven rotary head (3) in the process chamber (1), the rotationally driven rotary head (3) serving as a holder to expose a substantially disc-shaped object to be processed (W) from either side of the disc-shaped object within the interior of the process chamber (1);

at least one applicator (50, 51, 52, 53) being provided in the process chamber for the provision of a medium which acts on the disc-shaped object to be processed (W) from either side of the disc-shaped object; and

,

means (4) to suspend and drive the rotary head (3) without contact, the means (4) to suspend and drive the rotary head (3) being arranged radially around the rotary head (3) on the exterior of the process chamber (1).

2. The process chamber in accordance with claim 1 wherein:

the means (4) to suspend and drive the rotary head (3) arranged radially around the rotary head (3) comprises a magnetic bearing/drive unit.

3. The process chamber in accordance with claim 2 wherein:

the magnetic bearing/drive unit comprises a stator (4) which is arranged outside a housing (2) of the process chamber and the rotary head (3) is arranged inside the housing (2), with the housing wall forming a tubular gap which seals off the inner space of the housing (2).

4. The process chamber in accordance with claim 1 wherein:

the means to suspend and drive the rotary head (3) includes;

means to actively control the two degrees of freedom of displacement in the bearing plane;

means to actively control the axial displacement;

means to actively control the two degrees of freedom of tilting; and

means to actively control the rotation.

5. The process chamber in accordance with claim 1 characterized in that two degrees of freedom of the rotary head (3) can be actively controlled, namely the two degrees of freedom of displacement in the bearing plane, whereas the other four degrees of freedom are passively stabilized.

6. The process chamber in accordance with claim 1 characterized in that three degrees of freedom of the rotary head (3) can be actively controlled namely the two degrees of freedom of displacement in the bearing plane and the rotation, whereas the other three degrees of freedom are passively stabilized.

7. The process chamber in accordance with claim 1 wherein:

the rotary head (3) is designed to connect the object to be processed (W) outside the inner space of the process chamber; and

,

the rotary head (3) with the object to be processed (W) can then be brought into the inner space of the process chamber.

8. The process chamber in accordance with claim 1 wherein:

the rotary head (3, 3a, 3b, 3c, 3d) is designed to permit the object (W) held by the rotary head to be charged from both sides with a medium which is provided by applicators (50, 51, 52, 53;

54a, 55a).

9. The process chamber in accordance with claim 8 wherein:

the rotary head (3, 3a, 3b, 3c, 3d) is designed to be substantially in the shape of a ring.

10. The process chamber in accordance with claim 9 wherein:

the interior of the ring-shaped rotary head (3d) has a disc (35d) with passage channels (36d) fitted in, with the object to be processed (W) being held at a distance from the disc (35d) by the rotary head.

11. The process chamber in accordance with claim 1 wherein:

the rotary head (3e) is designed substantially in the shape of a disc and the object to be processed is held in the central region of the rotary head (3e); and

,

the rotary head (3e) defines a declination in the peripheral region around this central region in order that a liquid (F) applied to the object to be processed flows outwardly over the object to be processed (W) when the rotary head (3e) is rotationally driven to run off over the peripheral region of the rotary head (3e).

12. The process chamber in accordance with claim 11 wherein:

the rotary head (3e) has a tub (38e) around the peripheral region with the declination; and

, the tub (38e) defines passage openings (39e) at its base for the liquid (F) which is caught in the tub (38e).

13. The process chamber in accordance with claim 1 wherein:

the rotary head (3c, 3e) at a means (32c, 32e) has a depression communicated to the object to be processed (W) to enable the object to be processed (W) to be held fast at the rotary head (3c, 3e) by a vacuum.

14. The process chamber in accordance with claim 13 wherein:

a vacuum pump is provided for the production of the depression at the rotary head (3c, 3e).

15. The process chamber in accordance with claim 14 wherein:

the vacuum pump comprises inductive energy supply.