Method of reducing substrate coupling for chip inductors by creation of dielectric islands by selective EPI deposition

• US 6,486,017 B1
• Filed: 06/04/2002
• Issued: 11/26/2002
• Est. Priority Date: 06/04/2002
• Status: Expired due to Term

• Current Assignee: Chartered Semiconductor Manufacturing Incorporated (GlobalFoundries, Inc.)
• Original Assignee: Chartered Semiconductor Manufacturing Incorporated (GlobalFoundries, Inc.)
• Inventors: Chu, Sanford, Verma, Purakh Raj, Chew, Johnny, Beng, Sia Choon
• Primary Examiner(s): TSAI, H JEY
• Application Number:
  US10/161,772
• Time in Patent Office: 175 Days
• Field of Search: 438/238, 438/381, 438/41-44, 438/269
• US Class Current: 438/238
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind
• CPC Class Codes: H01L 28/10 Inductors

Abstract

A new method is provided for the creation of a horizontal spiral inductor over the surface of a silicon substrate. A first layer of dielectric is deposited over the surface of the substrate, this first layer of dielectric is patterned and etched creation islands of first dielectric material overlying the surface of the substrate, the islands of first dielectric material align with coils of a thereover to be created spiral inductor. The openings created in the layer of dielectric by the patterning and etching of the first layer of dielectric are filled by selective deposition of epitaxial silicon therein. Second and third layers of dielectric are successively deposited over the surface of the first layer of dielectric. A spiral horizontal inductor is then created over the surface of the third layer of dielectric.

Claims

1. A method of reducing substrate coupling for an inductor created over the surface of a high resistivity substrate, comprising the steps of:

providing a substrate;

depositing a first layer of dielectric over the surface of said substrate;

patterning and etching said first layer of dielectric, creating openings through said first layer of dielectric, further creating a pattern of first dielectric overlying said substrate and being aligned with coils of a thereover to be created inductor;

filling said openings created through said first layer of dielectric with epitaxial silicon;

depositing a second layer of dielectric over the surface of said pattern of first dielectric, thereby including the surface of said filling of epitaxial silicon;

depositing a third layer of dielectric over the surface of said second layer of dielectric; and

creating a horizontal spiral inductor over the surface of said third layer of dielectric.

2. The method of claim 1, said pattern of first dielectric overlying said substrate being in alignment with coils of said inductor created in a Cartesian X-direction, said pattern of first dielectric in addition being in alignment with coils of said inductor created in a Cartesian Y-direction, said Cartesian X-direction intersecting said Cartesian Y-direction under an angle of about 90 degrees.

3. The method of claim 1, said second layer of dielectric comprising an Intra Level Dielectric.

4. The method of claim 1, said third layer of dielectric comprising an Inter Metal Dielectric.

5. The method of claim 1, said first layer of dielectric comprising silicon dioxide.

6. The method of claim 5, said silicon dioxide being deposited to a thickness between about 3 and 4 μ

m.

7. The method of claim 1, said epitaxial silicon being deposited to a thickness of about 3 μ

m.

30. The method of claim 1, where a high resistivity of the substrate is selectively maintained underneath an inductor surface area by preventing all impurity implantations from penetrating into the surface of the substrate, whereby said first layer of dielectric serves as a hardmask, thereby reducing substrate coupling.

8. A method of reducing substrate coupling for an inductor created over the surface of a substrate, comprising the steps of:

providing a substrate;

depositing a layer of silicon dioxide over the surface of said substrate;

patterning and etching said layer of silicon dioxide, creating openings through said layer of silicon dioxide, further creating a pattern of silicon dioxide overlying said substrate and being aligned with coils of a thereover to be created inductor;

filling said openings created through said layer of silicon dioxide with epitaxial silicon;

depositing a second layer of dielectric over the surface of said pattern of silicon dioxide, thereby including the surface of said filling of epitaxial silicon;

depositing a third layer of dielectric over the surface of said second layer of dielectric; and

creating a horizontal spiral inductor over the surface of said third layer of dielectric.

9. The method of claim 8, said pattern of silicon dioxide overlying said substrate being in alignment with coils of said inductor created in a Cartesian X-direction, said pattern of silicon dioxide in addition being in alignment with coils of said inductor created in a Cartesian Y-direction, said Cartesian X-direction intersecting said Cartesian Y-direction under an angle of about 90 degrees.

10. The method of claim 8, said second layer of dielectric comprising an Intra Level Dielectric.

11. The method of claim 8, said third layer of dielectric comprising an Inter Metal Dielectric.

12. The method of claim 8, said layer of silicon dioxide being deposited to a thickness between about 3 and 4 μ

m.

13. The method of claim 8, said epitaxial silicon being deposited to a thickness of about 3 μ

m.

14. A method of reducing substrate coupling for an inductor created over the surface of a substrate, comprising the steps of:

providing a substrate;

depositing a layer of silicon dioxide over the surface of said substrate;

patterning and etching said layer of silicon dioxide, creating openings through said layer of silicon dioxide, further creating a pattern of silicon dioxide overlying said substrate and being aligned with coils of a thereover to be created inductor;

filling said openings created through said layer of silicon dioxide with epitaxial silicon;

depositing a layer of Intra Level Dielectric over the surface of said pattern of silicon dioxide, thereby including the surface of said filling of epitaxial silicon;

depositing a third layer of dielectric over the surface of said second layer of dielectric; and

creating a horizontal spiral inductor over the surface of said third layer of dielectric.

15. The method of claim 14, said pattern of silicon dioxide overlying said substrate being in alignment with coils of said inductor created in a Cartesian X-direction, said pattern of silicon dioxide in addition being in alignment with coils of said inductor created in a Cartesian Y-direction, said Cartesian X-direction intersecting said Cartesian Y-direction under an angle of about 90 degrees.

16. The method of claim 14, said third layer of dielectric comprising an Inter Metal Dielectric.

17. The method of claim 14, said layer of silicon dioxide being deposited to a thickness between about 3 and 4 μ

m.

18. The method of claim 14, said epitaxial silicon being deposited to a thickness of about 3 μ

m.

19. A method of reducing substrate coupling for an inductor created over the surface of a substrate, comprising the steps of:

providing a substrate;

depositing a layer of silicon dioxide over the surface of said substrate;

patterning and etching said layer of silicon dioxide, creating openings through said layer of silicon dioxide, further creating a pattern of silicon dioxide overlying said substrate and being aligned with coils of a thereover to be created inductor;

filling said openings created through said layer of silicon dioxide with epitaxial silicon;

depositing a layer of Intra Level Dielectric over the surface of said pattern of silicon dioxide, thereby including the surface of said filling of epitaxial silicon;

depositing a layer of Inter Metal Dielectric over the surface of said layer of Intra Level Dielectric; and

creating a horizontal spiral inductor over the surface of said third layer of dielectric.

20. The method of claim 19, said pattern of silicon dioxide overlying said substrate being in alignment with coils of said inductor created in a Cartesian X-direction, said pattern of silicon dioxide in addition being in alignment with coils of said inductor created in a Cartesian Y-direction, said Cartesian X-direction intersecting said Cartesian Y-direction under an angle of about 90 degrees.

21. The method of claim 19, said layer of silicon dioxide being deposited to a thickness between about 3 and 4 μ

m.

22. The method of claim 19, said epitaxial silicon being deposited to a thickness of about 3 μ

m.

23. A method of reducing substrate coupling for an inductor created over the surface of a substrate, comprising the steps of:

providing a substrate;

depositing a layer of silicon dioxide over the surface of said substrate, said layer of silicon dioxide being deposited to a thickness between about 3 and 4 μ

m;

patterning and etching said layer of silicon dioxide, creating openings through said layer of silicon dioxide, further creating a pattern of silicon dioxide overlying said substrate and being aligned with coils of a thereover to be created inductor;

filling said openings created through said layer of silicon dioxide with epitaxial silicon;

depositing a layer of Intra Level Dielectric over the surface of said pattern of silicon dioxide, thereby including the surface of said filling of epitaxial silicon;

depositing a layer of Inter Metal Dielectric over the surface of said layer of Intra Level Dielectric; and

creating a horizontal spiral inductor over the surface of said third layer of dielectric.

24. The method of claim 23, said pattern of silicon dioxide overlying said substrate being in alignment with coils of said inductor created in a Cartesian X-direction, said pattern of silicon dioxide in addition being in alignment with coils of said inductor created in a Cartesian Y-direction, said Cartesian X-direction intersecting said Cartesian Y-direction under an angle of about 90 degrees.

25. The method of claim 23, said epitaxial silicon being deposited to a thickness of about 3 μ

m.

26. A method of reducing substrate coupling for an inductor created over the surface of a substrate, comprising the steps of:

providing a substrate;

depositing a layer of silicon dioxide over the surface of said substrate, said layer of silicon dioxide being deposited to a thickness between about 3 and 4 μ

m;

patterning and etching said layer of silicon dioxide, creating openings through said layer of silicon dioxide, further creating a pattern of silicon dioxide overlying said substrate and being aligned with coils of a thereover to be created inductor;

filling said openings created through said layer of silicon dioxide with epitaxial silicon, said epitaxial silicon being deposited to a thickness of about 3 μ

m;

depositing a layer of Intra Level Dielectric over the surface of said pattern of silicon dioxide, thereby including the surface of said filling of epitaxial silicon;

depositing a layer of Inter Metal Dielectric over the surface of said layer of Intra Level Dielectric; and

creating a horizontal spiral inductor over the surface of said third layer of dielectric.

27. The method of claim 26, said pattern of silicon dioxide overlying said substrate being in alignment with coils of said inductor created in a Cartesian X-direction, said pattern of silicon dioxide in addition being in alignment with coils of said inductor created in a Cartesian Y-direction, said Cartesian X-direction intersecting said Cartesian Y-direction under an angle of about 90 degrees.

28. A method of reducing substrate coupling for an inductor created over the surface of a substrate, comprising the steps of:

providing a substrate;

depositing a layer of silicon dioxide over the surface of said substrate, said layer of silicon dioxide being deposited to a thickness between about 3 and 4 μ

m;

patterning and etching said layer of silicon dioxide, creating openings through said layer of silicon dioxide, further creating a pattern of silicon dioxide overlying said substrate and being aligned with coils of a thereover to be created inductor, said pattern of silicon dioxide overlying said substrate being in alignment with coils of said inductor created in a Cartesian X-direction, said pattern of silicon dioxide in addition being in alignment with coils of said inductor created in a Cartesian Y-direction, said Cartesian X-direction intersecting said Cartesian Y-direction under an angle of about 90 degrees;

filling said openings created through said layer of silicon dioxide with epitaxial silicon, said epitaxial silicon being deposited to a thickness of about 3 μ

m;

depositing a layer of Intra Level Dielectric over the surface of said pattern of silicon dioxide, thereby including the surface of said filling of epitaxial silicon;

depositing a layer of Inter Metal Dielectric over the surface of said layer of Intra Level Dielectric; and

creating a horizontal spiral inductor over the surface of said third layer of dielectric.

29. A method of reducing substrate coupling for an inductor created over the surface of a substrate, comprising the steps of:

providing a substrate;

depositing a first layer of dielectric over the surface of said substrate;

patterning and etching said first layer of dielectric, creating at least one opening through said first layer of dielectric, further creating a pattern of said first layer of dielectric overlying said substrate and being aligned with and underlying coils of a thereover to be created inductor;

filling said at least one opening created through said first layer of dielectric with epitaxial silicon;

depositing at least one second layer of dielectric over the surface of said pattern of said first layer of dielectric, thereby including the surface of said filling of epitaxial silicon; and

creating an inductor over the surface of said at least one second layer of dielectric.