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Increased bandwidth thin film resonator having a columnar structure

  • US 6,486,751 B1
  • Filed: 09/26/2000
  • Issued: 11/26/2002
  • Est. Priority Date: 09/26/2000
  • Status: Expired due to Term
First Claim
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1. A thin film resonator comprising a plurality of distinct elemental resonators separated by spaces and connected in parallel, each of said resonators having a length, a width and a height, wherein said height is at least equal to one of said width and said length, wherein said spaces separating said elemental resonators are filled with a low dielectric constant filler material and electrical connection means for connecting said parallel connected elemental resonators to other circuitry.

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