Guideless stage

• US 6,486,941 B1
• Filed: 04/24/2000
• Issued: 11/26/2002
• Est. Priority Date: 04/24/2000
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Yuan, Bausan, Hazelton, Andrew J.
• Primary Examiner(s): Adams, Russell
• Assistant Examiner(s): FULLER, RODNEY EVAN
• Application Number:
  US09/557,122
• Time in Patent Office: 946 Days
• Field of Search: 355/53.1, 355/72, 355/53, 318/568.17, 318/687, 744/900.9, 396/500, 33/1.M, 310/12
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages

Abstract

A stage assembly (10) for moving and positioning a device (24) includes a stage base (12), a first stage frame (40), and a second stage frame (66). The stage assembly (10) also includes a pair of X movers (82) (84), and a first stage Y mover (86) that precisely move the first stage frame (40) relative to the stage base (12). Uniquely, the first stage frame (40) is guideless along the X axis, along the Y axis and about the Z axis. With this design, movers (82) (84) (86) can precisely control the position of the first stage frame (40) along the X axis, along the Y axis and about the Z axis. Further, current to the X movers (82) (84) is varied according to the position of the second stage frame (66) relative to the first stage frame (40). These features allow for more accurate positioning of the device (24) by the stage assembly (10) and better performance of the stage assembly (10).

Claims

1. A stage assembly comprising:

a first stage assembly movable along a first axis;

a first mover connected to the first stage assembly, the first mover moving the first stage assembly at least along the first axis;

a second stage assembly coupled to the first stage assembly;

a second mover that is connected to the second stage assembly and moves the second stage assembly relative to the first stage assembly along a second axis, the second axis differing from the first axis; and

a reaction force canceling assembly connected to the second mover, the reaction force canceling assembly including an actuator and being movable relative to the second stage assembly along the second axis and reducing disturbance caused by the second mover.

2. The stage assembly of claim 1, wherein the reaction force canceling assembly includes a reaction stage that is coupled to the second mover, the reaction stage transferring reaction forces from the second mover away from the first stage assembly.

3. The stage assembly of claim 2, further comprising a mounting base, wherein the first stage assembly moves relative to the mounting base;

and the reaction force canceling assembly includes a reaction force transferring assembly connected to the reaction stage, the reaction force transferring assembly being adapted to transfer reaction forces from the reaction stage to the mounting base.

4. The stage assembly of claim 1, wherein the actuator comprises a magnet array and a conductor array, and wherein the actuator transfers reaction forces from the second mover away from the first stage assembly.

5. The stage assembly of claim 4, wherein the magnet array extends longitudinally along the first axis.

6. The stage assembly of claim 4, further comprising a stage base, wherein the magnet array is connected to the stage base.

7. The stage assembly of claim 1, further comprising:

a third stage assembly coupled to the second stage assembly; and

a third mover connected to the third stage assembly, the third mover moving the third stage assembly relative to the second stage assembly along at least a third axis, about the first axis and about the second axis, the third axis differing from the first and second axes.

8. The stage assembly of claim 7, wherein third mover moves the third stage assembly relative to the second stage assembly along the first axis, along the second axis and about the third axis.

9. The stage assembly of claim 1, further comprising a fourth mover connected to the first stage assembly, the fourth mover moving the first stage assembly along the second axis.

10. The stage assembly of claim 1, further comprising a control system, wherein

the first mover includes a plurality of first stage movers adapted to move the first stage assembly along the first axis;

and

the control system is connected to each of the first stage movers and controls each of the first stage movers according to the position of the second stage assembly relative to the first stage assembly.

11. The stage assembly of claim 10, further comprising a sensor connected to the control system, the sensor detecting the position of the second stage assembly relative to the first stage assembly along the second axis.

12. The stage assembly of claim 10, wherein

the first stage assembly and the second stage assembly have a combined center of gravity;

and

the control system controls each first stage mover according to the position of combined center of gravity along the second axis.

13. The stage assembly of claim 10, wherein

the plurality of first stage movers includes a first, first stage mover and a second, first stage mover;

and

the control system directs more current to the first, first stage mover than the second, first stage mover when the second stage assembly is closer to the first, first stage mover than the second, first stage mover.

14. The stage assembly of claim 13, wherein the control system directs more current to the second, first stage mover than the first, first stage mover when the second stage assembly is closer to the second, first stage mover than the first, first stage mover.

15. The stage assembly of claim 1 wherein the second stage assembly moves substantially concurrently with the first stage assembly along the first axis.

16. An exposure apparatus comprising:

the stage assembly of claim 1 and an illumination device that directs a beam of light energy towards the stage assembly.

17. A device comprising a substrate on which an image has been formed by the exposure apparatus of claim 16.

18. A wafer on which an image has been formed by the exposure apparatus of claim 16.

19. A stage assembly comprising:

a first stage assembly movable along a first axis;

a first moving means for moving the first stage assembly at least along the first axis;

a second stage assembly coupled to the first stage assembly;

a second moving means for moving the second stage assembly relative to the first stage assembly along a second axis, the second axis differing from the first axis; and

a reaction force canceling means for reducing disturbance caused by the second moving means, the reaction force canceling means including actuating means and being movable relative to the second stage assembly along the second axis.

20. The stage assembly of claim 19, wherein the reaction force canceling means includes a reaction stage that is coupled to the second moving means, the reaction stage transferring reaction forces from the second moving means away from the first stage assembly.

21. The stage assembly of claim 20, further comprising a mounting base, wherein the first stage assembly moves relative to the mounting base;

and the reaction force canceling means includes a reaction force transferring means connected to the reaction stage, the reaction force transferring means being adapted to transfer reaction forces from the reaction stage to the mounting base.

22. The stage assembly of claim 19, wherein the actuating means comprises a magnet array and a conductor array, and wherein the actuating means transfers reaction forces from the second mover away from the first stage assembly.

23. The stage assembly of claim 22, wherein the magnet array extends longitudinally along the first axis.

24. The stage assembly of claim 22, further comprising a stage base, wherein the magnet array is connected to the stage base.

25. The stage assembly of claim 19, further comprising:

a third stage assembly coupled to the second stage assembly; and

a third moving means for moving the third stage assembly relative to the second stage assembly along at least a third axis, about the first axis and about the second axis, the third axis differing from the first and second axes.

26. The stage assembly of claim 25, wherein the third moving means moves the third stage assembly relative to the second stage assembly along the first axis, along the second axis and about the third axis.

27. The stage assembly of claim 19, further comprising a fourth moving means for moving the first stage assembly along the second axis.

28. The stage assembly of claim 19, further comprising a control means, wherein

the first moving means includes a plurality of first stage movers adapted to move the first stage assembly along the first axis;

and

the control means controls each of the first stage movers according to the position of the second stage assembly relative to the first stage assembly.

29. The stage assembly of claim 28, further comprising a detecting means for detecting the position of the second stage assembly relative to the first stage assembly along the second axis.

30. The stage assembly of claim 28, wherein

the first stage assembly and the second stage assembly have a combined center of gravity;

and

the control means controls each first stage mover according to the position of combined center of gravity along the second axis.

31. The stage assembly of claim 30, wherein

the plurality of first stage movers includes a first, first stage mover and a second, first stage mover;

and

the control means directs more current to the first, first stage mover than the second, first stage mover when the second stage assembly is closer to the first, first stage mover than the second, first stage mover.

32. The stage assembly of claim 31, wherein the control means directs more current to the second, first stage mover than the first, first stage mover when the second stage assembly is closer to the second, first stage mover than the first, first stage mover.

33. An exposure apparatus including the stage assembly of claim 19 and an irradiation means for directing a beam of energy towards the stage assembly.

34. A device comprising a substrate on which an image has been formed by the exposure apparatus of claim 33.

35. A wafer on which an image has been formed by the exposure apparatus of claim 33.

36. A stage assembly comprising:

a first stage assembly movable along a first axis;

a first mover connected to the first stage assembly, the first mover moving the first stage assembly at least along the first axis;

a second stage assembly that moves substantially concurrently with the first stage assembly along the first axis;

a second mover that is connected to the second stage assembly and moves the second stage assembly relative to the first stage assembly along a second axis, the second axis differing from the first axis; and

a reaction assembly including an actuator and being movable relative to the second stage assembly along the second axis and connected to the second mover, the reaction assembly inhibiting disturbances caused by the second mover from being transferred to the first stage assembly.

37. The stage assembly of claim 36, wherein the actuator comprises a magnet array and a conductor array, and wherein the actuator tranfers reaction forces from the second mover away from the first stage assembly.

38. The stage assembly of claim 37, wherein the magnet array extends longitudinally along the first axis.

39. The stage assembly of claim 37, further comprising a stage base, wherein the magnet array is connected to the stage base.

40. The stage assembly of claim 36, further comprising a mounting base, wherein the first stage assembly moves relative to the mounting base;

and wherein the reaction assembly transfers disturbances from the second mover to the mounting base.

41. The stage assembly of claim 36, further comprising:

a third stage assembly coupled to the second stage assembly; and

a third mover connected to the third stage assembly, the third mover moving the third stage assembly relative to the second stage assembly along at least a third axis, about the first axis and about the second axis, the third axis differing from the first and second axes.

42. The stage assembly of claim 41, wherein the third mover moves the third stage assembly relative to the second stage assembly along the first axis, along the second axis and about the third axis.

43. The stage assembly of claim 36, further comprising a fourth mover connected to the first stage assembly, the fourth mover moving the first stage assembly along the second axis.

44. The stage assembly of claim 36, further comprising a control system wherein

the first mover includes a plurality of first stage movers adapted to move the first stage assembly along the first axis;

and

the control system is connected to each of the first stage movers and controls each of the first stage movers according to the position of the second stage assembly relative to the first stage assembly.

45. The stage assembly of claim 44, wherein

the first stage assembly and the second stage assembly have a combined center of gravity;

and

the control system controls each first stage mover according to the position of combined center of gravity along the second axis.

46. The stage assembly of claim 45, wherein

the plurality of first stage movers includes a first, first stage mover and a second, first stage mover;

and

the control system directs more current to the first, first stage mover than the second, first stage mover when the second stage assembly is closer to the first, first stage mover than the second, first stage mover.

47. The stage assembly of claim 46, wherein the control system directs more current to the second, first stage mover than the first, first stage mover when the second stage assembly is closer to the second, first stage mover than the first, first stage mover.

48. An exposure apparatus comprising:

the stage assembly of claim 36 and an illumination device that directs a beam of light energy towards the stage assembly.

49. A device comprising a substrate on which an image has been formed by the exposure apparatus of claim 48.

50. A wafer on which an image has been formed by the exposure apparatus of claim 48.

51. A method for making a stage assembly, the method comprising the steps of:

providing a first stage assembly that is movable along a first axis;

connecting a first mover to the first stage assembly, the first mover moving the first stage assembly at least along the first axis;

coupling a second stage assembly to the first stage assembly;

connecting a second mover to the second stage assembly, the second mover moving the second stage assembly relative to the first stage assembly along a second axis, the second axis differing from the first axis; and

connecting a reaction force canceling assembly to the second mover, the reaction force canceling assembly including an actuator and being movable relative to second stage assembly along the second axis and reducing disturbances caused by the second mover.

52. The method of claim 51, wherein the acuator comprises a magnet array and a conductor array, and wherein the actuator transfers reaction forces from the second mover away from the first stage assembly.

53. The method of claim 52, wherein the magnet array extends longitudinally along the first axis.

54. The method of claim 52, further comprising a stage base, wherein the magnet array is connected to the stage base.

55. The method of claim 51, wherein the step of connecting a reaction force canceling assembly includes the step of coupling a reaction stage of the reaction force canceling assembly to the second mover, the reaction stage transferring reaction forces from the second mover away from the first stage assembly.

56. The method of claim 55 further comprising the step of providing a mounting base, wherein the first stage assembly moves relative to the mounting base;

and the reaction force canceling assembly includes a reaction force transferring assembly connected to the reaction stage, the reaction force transferring assembly being adapted to transfer reaction forces from the reaction stage to the mounting base.

57. The method of claim 51, further comprising the steps of:

coupling a third stage assembly to the second stage assembly; and

connecting a third mover to the third stage assembly, the third mover moving the third stage assembly relative to the second stage assembly along at least a third axis, about the first axis and about the second axis, the third axis differing from the first and second axes.

58. The method of claim 57, wherein the step of connecting the third stage assembly includes moving the third stage assembly relative to the second stage assembly along the first axis, along the second axis and about the third axis.

59. The method of claim 51, further comprising the step of connecting a fourth mover to the first stage assembly, the fourth mover moving the first stage assembly along the second axis.

60. The method of claim 51, wherein the first mover includes a plurality of first stage movers adapted to move the first stage assembly along the first axis;

and further comprising the step of;

connecting a controller to each of the first stage movers, the controller controlling each of the first stage movers according to the position of the second stage assembly relative to the first stage assembly.

61. The method of claim 60, further comprising the step of connecting a sensor to the control system, the sensor detecting the position of the second stage assembly relative to the first stage assembly along the second axis.

62. The method of claim 60, wherein the first stage assembly and the second stage assembly have a combined center of gravity;

and wherein the control system controls each first stage mover according to the position of combined center of gravity along the second axis.

63. The method of claim 60, wherein the plurality of first stage movers includes a first, first stage mover and a second, first stage mover;

and the control system directs more current to the first, first stage mover than the second, first stage mover when the second stage assembly is closer to the first, first stage mover than the second, first stage mover.

64. The method of claim 63 wherein the control system directs more current to the second, first stage mover than the first, first stage mover when the second stage assembly is closer to the second, first stage mover than the first, first stage mover.

65. A method for making an exposure apparatus that forms an image on a substrate, the method comprising the steps of:

providing an irradiation apparatus that irradiates the substrate with radiation to form the image on the substrate; and

providing the stage assembly made by the method of claim 51.

66. A method of making a wafer, the method including the steps of providing a substrate, and forming an image on the substrate utilizing the exposure apparatus made by the method of claim 65.

67. A method for making a device including at least the photolithography process, wherein the photolithography process utilizes the exposure apparatus made by the method of claim 65.

68. A method for making a stage assembly, the method comprising the steps of:

providing a first stage assembly that is movable along a first axis;

connecting a first moving means to the first stage assembly, the first moving means moving the first stage assembly at least along the first axis;

coupling a second stage assembly to the first stage assembly;

connecting a second moving means to the second stage assembly, the second moving means moving the second stage assembly relative to the first stage assembly along a second axis, the second axis differing from the first axis; and

connecting a reaction force canceling means to the second moving means, the reaction force canceling means including actuating means and being movable relative to a second stage assembly along the second axis and reducing disturbance caused by the second moving means.

69. The method of claim 68, wherein the actuating means comprises a magnet array and a conductor array, and wherein the actuating means transfers reaction forces from the second mover away from the first stage assembly.

70. The method of claim 69, wherein the magnet array extends longitundinally along the first axis.

71. The method of claim 69, further comprising a stage base, wherein the magnet array is connected to the stage base.

72. The method of claim 68, wherein the step of connecting a reaction force canceling means includes the step of coupling a reaction stage of the reaction force canceling means to the second moving means, the reaction stage transferring reaction forces from the second moving means away from the first stage assembly.

73. The method of claim 72 further comprising the step of providing a mounting base, wherein the first stage assembly moves relative to the mounting base;

and the reaction force canceling means includes a reaction force transferring assembly connected to the reaction stage, the reaction force transferring assembly being adapted to transfer reaction forces from the reaction stage to the mounting base.

74. The method of claim 68, further comprising the steps of:

coupling a third stage assembly to the second stage assembly; and

connecting a third moving means to the third stage assembly, the third moving means moving the third stage assembly relative to the second stage assembly along at least a third axis, about the first axis and about the second axis, the third axis differing from the first and second axis.

75. The method of claim 68, further comprising the steps of connecting a fourth moving means to the first stage assembly, the fourth moving means moving the first stage assembly along the second axis.

76. The method of claim 68, wherein the first mover includes a plurality of first stage movers adapted to move the first stage assembly along the first axis;

and further comprising the step of;

connecting a controller to each of the first stage movers, the controller controlling each of the first stage movers according to the position of the second stage assembly relative to the first stage assembly.

77. A method for making an exposure apparatus that forms an image on a substrate, the method comprising the steps of:

providing an irradiation means that irradiates the substrate with radiation to form the image on the substrate; and

providing the stage assembly made by the method of claim 68.

78. A method of making a wafer, the method including the steps of providing a substrate and forming an image on the substrate utilizing the exposure apparatus made by the method of claim 77.

79. A method for making a device including at least the photolithography process, wherein the photolithography process utilizes the exposure apparatus made by the method of claim 77.