Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly

• US 6,487,000 B2
• Filed: 08/08/2001
• Issued: 11/26/2002
• Est. Priority Date: 08/09/2000
• Status: Expired due to Term

• Current Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Inventors: Mastromatteo, Ubaldo, Murari, Bruno
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): SEYRAFI, SAEED HMT
• Application Number:
  US09/925,847
• Publication Number:
  US 20020041729A1
• Time in Patent Office: 475 Days
• Field of Search: 359/223, 359/224, 359/290, 359/291, 359/298, 359/318, 359/320, 385/18
• US Class Current: 359/291
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: F16H 21/02 the movements of two or more independently-moving members being combined into a single movement
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/0866 the reflecting means being moved or deformed by thermal means
• CPC Class Codes: H02N 1/004 in which a body is moved along a path due to interaction with an electric field travelling along the path

Abstract

A microelectromechanical structure, usable in an optical switch for directing a light beam towards one of two light guide elements, including: a mirror element, rotatably movable; an actuator, which can translate; and a motion conversion assembly, arranged between the mirror element and the actuator. The motion conversion assembly includes a projection integral with the mirror element and elastic engagement elements integral with the actuator and elastically loaded towards the projection. The elastic engagement elements are formed by metal plates fixed to the actuator at one of their ends and engaging the projection with an abutting edge countershaped with respect to the projection.

Claims

1. A microelectromechanical structure comprising:

a first part that is rotatably movable;

a second part that is movable with translatory motion;

an assembly for converting motion, arranged between said first and said second part and including a first and a second element, said first element being integral with said first part, and said second element being integral with said second part, one of said first and second elements comprising a projection, and the other one of said first and second element including elastic engagement elements, elastically loaded towards said projection.

2. A microelectromechanical structure according to claim 1, wherein said elastic engagement elements comprise at least one pair of metal plates each having a fixing portion integral with one of said first and second parts and an engagement portion engaging said projection.

3. A microelectromechanical structure according to claim 2, wherein each said metal plate has an elongated shape and comprises a first end forming said fixing portion and a second end defining an abutting edge cooperating with said projection.

4. A microelectromechanical structure according to claim 3, wherein said second end of each said metal plate is countershaped to said projection.

5. A microelectromechanical structure according to claim 4, wherein said projection has frusto-pyramid shape having edges facing towards elastic engagement elements, and said abutting edge has a V-shaped notch which engages a respective edge of said projection.

6. A microelectromechanical structure according to claim 2, wherein each said metal plate comprises at least two metal layers arranged on each other and having different thermal expansion coefficients.

7. A microelectromechanical structure according to claim 6, wherein each said metal plate comprises three metal layers arranged on each other and respectively comprising titanium, aluminium, and titanium.

8. A microelectromechanical structure according to claim 1, wherein said first part forms a mirror element of an optical switching device, and said second part comprises a linear actuator.

9. A microelectromechanical structure according to claim 1, wherein said first element is integral with said first part, and said second element is integral with said second part.

10. A process for manufacturing a microelectromechanical structure, comprising the steps of:

forming a first part which is rotatably movable, said step of forming a first part including the step of forming a first element belonging to a motion conversion assembly (and integral with said first part;

forming a second part that is movable with translatory motion, said step of forming a second part including the step of forming a second element belonging to said motion conversion assembly and integral with said second part;

one of said steps of forming a first and a second element including the step of forming a projection;

another of said steps of forming a first and a second element including the step of forming elastic engagement elements; and

assembling said first part and second part, in so that, during said step of assembling, said elastic engagement elements automatically and elastically engage said projection.

11. A process according to claim 10, wherein said step of forming elastic engagement elements comprises forming elastic engagement elements that are elastically preloaded, and said step of assembling comprises the step of releasing said elastic engagement elements and enabling said elastic engagement elements to engage said projection.

12. A process according to claim 11, wherein said step of forming elastic engagement elements comprises the steps of forming a sacrificial region extending on top of one of said first and second parts, except for fixing areas;

and forming said elastic engagement elements; and

said step of assembling comprises the steps of fixing two semiconductor material wafers (58, 52) respectively carrying said first and said second part, and removing said sacrificial region.

13. A process according to claim 11 wherein said step of forming elastic engagement elements comprises the step of forming at least two metal plates each having a fixing portion integral with one of said first and said second part, and an engagement portion for engagement with said projection.

14. A process according to claim 13, wherein said step of forming metal plates comprises the steps of depositing at least two metal layers having different thermal expansion coefficients, and defining said metal layers.

15. A process according to claim 14, wherein said step of forming metal plates comprises the steps of depositing three metal layers arranged on each other, respectively of titanium, aluminium, and titanium.

16. A device comprising:

a first platform, rotatable about first and second axes, the first and second axes lying in a geometric plane of the first platform;

a projection shaped as a four sided pyramidal frustum, with a broad base affixed to a lower surface of the platform and a narrow base projecting downward from the platform;

a second platform, parallel to and beneath the first platform, translatable along third and fourth axes, the third and fourth axes lying in a geometric plane of the second platform and parallel to the first and second axes, respectively; and

first and second engagement springs, each of the first and second engagement spring having outer and inner ends, the outer ends of the first and second engagement springs being affixed to an upper surface of the second platform, the inner ends of the first and second engagement springs flexing upward and capturing the projection between them.

17. The device of claim 16 wherein the projection has four vertical faces, and wherein the inner ends of the first and second engagement springs are shaped to engage opposing angles between the four vertical faces of the projection.

18. The device of claim 16 wherein a translation of the second platform along the third or fourth axis results in a rotation of the first platform on the second or first axis, respectively.