Microgyroscope with integrated vibratory element
First Claim
Patent Images
1. A microgyroscope comprising:
- a first portion of a vertical post and a clover leaf structure formed from a first silicon wafer; and
a second portion of the vertical post and a baseplate formed from a second silicon wafer;
wherein the first portion of the vertical post and the clover leaf structure are bonded to the second portion of the vertical post and the baseplate.
2 Assignments
0 Petitions
Accused Products
Abstract
A microgyroscope having a suspended vertical post uses the Coriolis force to detect the rotation rate. The microgyroscope consists of a single vertical post which is the rotation rate sensing element. The vertical post is formed from the same silicon wafers as the rest of the microgyroscope. A first portion of the vertical post and the clover-leaf structure are made from a first silicon wafer. A second portion of the vertical post and the baseplate are made from a second silicon wafer. The two portions are then bonded together to from the clover-leaf gyroscope with an integrated post structure.
-
Citations
18 Claims
-
1. A microgyroscope comprising:
-
a first portion of a vertical post and a clover leaf structure formed from a first silicon wafer; and
a second portion of the vertical post and a baseplate formed from a second silicon wafer;
wherein the first portion of the vertical post and the clover leaf structure are bonded to the second portion of the vertical post and the baseplate.- View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A method of constructing a microgyroscope comprising:
-
forming a first section of the microgyroscope having a first portion of a vertical post and a clover-leaf structure on a first substrate;
forming a second section of the microgyroscope having a second portion of the vertical post and a baseplate on a second substrate; and
bonding the first section of the microgyroscope to the second section of the microgyroscope. - View Dependent Claims (8, 9, 10, 11, 12)
-
-
13. A method of constructing a microgyroscope comprising:
-
forming a first portion of a post and a first plurality of capacitors on a first substrate;
forming a second portion of the post and a baseplate on a second substrate; and
bonding the first portion of the post and the first plurality of capacitors to the second portion of the post and the baseplate. - View Dependent Claims (14, 15, 16, 17, 18)
-
Specification