Pixel cross talk suppression in digital microprinters

• US 6,489,984 B1
• Filed: 09/26/2000
• Issued: 12/03/2002
• Est. Priority Date: 12/29/1998
• Status: Expired due to Fees

• Current Assignee: Johnson, Kenneth C.
• Original Assignee: Johnson, Kenneth C.
• Inventors: Johnson, Kenneth C.
• Primary Examiner(s): PHAM, HAI CHI
• Application Number:
  US09/670,507
• Time in Patent Office: 798 Days
• Field of Search: 347/239, 347/241, 347/244, 347/255, 347/256, 347/258, 349/41, 349/74, 349/95, 359/289, 359/279, 359/285, 359/323, 385/116
• US Class Current: 347/239
• CPC Class Codes: B41J 2/465 using masks, e.g. light-switching masks
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

Digital microprinters such as maskless projection lithography systems can be adversely affected by pixel cross talk resulting from coherent interactions between adjacent pixels. Such effects are significantly mitigated by inducing a π/2 optical phase shift between adjacent pixels. In one implementation, the printing surface is exposed twice, with the phase shift sign-inverted between exposures so that coherent interaction effects cancel out between the two exposures.

Claims

1. A printing system comprising:

a spatial light modulator (SLM) for image generation, the SLM comprising an array of source pixel elements, wherein each source pixel modulates illumination intercepting that pixel;

an illumination source disposed to illuminate the SLM, whereupon modulated illumination leaves the SLM; and

an optical projection system disposed to convey the modulated illumination from the SLM to a printing surface, wherein each source pixel generates a corresponding modulated exposure field that exposes the printing surface;

the SLM being configured to induce a phase difference of approximately π

/2 between adjacent exposure fields.

2. The printing system of claim 1, and further comprising a planar array of microlenses proximate the printing surface wherein the exposure field corresponding to each source pixel comprises a primary radiation component that has intercepted and been focused by a microlens corresponding to the source pixel, but which may also comprise a secondary radiation component that has intercepted and been focused by adjacent microlenses.

3. The printing system of claim 1 wherein the SLM pixel array is a two-dimensional array.

4. The printing system of claim 1 wherein the SLM pixel array is a one-dimensional, linear array.

5. The printing system of claim 1 wherein the illumination transmits through the SLM.

6. The printing system of claim 1 wherein the illumination reflects off of the SLM.

7. The printing system of claim 6, wherein the SLM is configured with alternate source pixels recessed relative to their adjacent pixels, with the recess depth selected to induce a phase difference of approximately π

/2 between adjacent pixels.

8. The printing system of claim 1, wherein:

the SLM is configured with a phase-shifting mechanism that comprises two optical media proximate the source pixels;

the two media have different refractive indices;

portions of the illumination that intercept any two adjacent source pixels traverse different optical path lengths through the two media; and

the optical path length difference between adjacent pixels is selected to induce a phase difference of approximately π

/2 between adjacent pixels.

9. The printing system of claim 1, wherein the projection system comprises an Offner catoptric system.

19. The printing system of claim 9, wherein the projection system comprises an Offner catoptric system.

10. A printing system comprising a Spatial Light Modulator (SLM), an illumination source, an optical projection system, a printing surface, and a positioning mechanism, wherein:

the illumination source illuminates the SLM;

the SLM comprises an array of source pixel elements, wherein each source pixel modulates the illumination intercepting that pixel;

the projection system conveys the modulated illumination from the SLM to the printing surface, wherein each source pixel generates a corresponding modulated exposure field that exposes the printing surface;

the SLM further comprises a phase-shifting mechanism that induces a phase difference of approximately π

/2 between adjacent exposure fields;

the positioning mechanism controls the positional relationship between the printing surface and the SLM; and

at least two exposures are applied to the printing surface, wherein the two exposures are substantially identical except that the positional relationship is altered between the two exposures so as to invert the sign of the phase difference, and whereby the sign inversion causes coherent interaction between adjacent exposure fields to substantially cancel out between the two exposures.

11. The printing system of claim 10 wherein the SLM pixel array is a two-dimensional array.

12. The printing system of claim 10 wherein the SLM pixel array is a one-dimensional, linear array.

13. The printing system of claim 10 wherein the illumination transmits through the SLM.

14. The printing system of claim 10 wherein the illumination reflects off of the SLM.

15. The printing system of claim 14, wherein:

alternate source pixels are recessed relative to their adjacent pixels;

the phase-shifting mechanism comprises the pixel recesses; and

the recess depth is selected to induce a phase difference of approximately π

/2 between adjacent pixels.

16. The printing system of claim 10, wherein:

the phase-shifting mechanism comprises two optical media proximate the source pixels;

the two media have different refractive indices;

portions of the illumination that intercept any two adjacent source pixels traverse different optical path lengths through the two media; and

the optical path length difference between adjacent pixels is selected to induce a phase difference of approximately or π

/2 between adjacent pixels.

17. The printing system of claim 10 wherein the projection system images the source pixels onto the printing surface.

18. The printing system of claim 10 wherein

the printing system further comprises a planar array of microlenses proximate the printing surface,

the exposure field corresponding to each source pixel comprises a primary radiation component that has intercepted and been focused by a microlens corresponding to the source pixel, but which may also comprise a secondary radiation component that has intercepted and been focused by adjacent microlenses,

the two exposures cause the coherent interactions between the primary radiation component from each source pixel and the secondary radiation component from other adjacent source pixels to substantially cancel out.

20. A method of operating a printing system that includes a spatial light modulator (SLM) for image generation, the SLM comprising an array of light-modulating pixels, the method comprising:

illuminating the SLM;

controlling the SLM in accordance with a desired information pattern so that each pixel modulates the illumination intercepting that pixel;

projecting the modulated illumination from the SLM to a printing surface so that each pixel generates a corresponding modulated exposure field that exposes the printing surface; and

inducing a phase difference of approximately π

/2 between adjacent exposure fields.

21. The method of claim 20 wherein inducing a phase difference comprises configuring the SLM with a phase-shifting mechanism that comprises two optical media proximate the source pixels wherein the two media have different refractive indices and the optical path length difference between adjacent pixels is selected to induce a phase difference of approximately π

/2 between adjacent pixels.

22. The method of claim 20 wherein the illumination is reflected by the SLM, and wherein inducing a phase difference comprises configuring the SLM with alternate source pixels recessed relative to their adjacent pixels, with the recess depth selected to induce a phase difference of approximately π

/2 between adjacent pixels.

23. The method of claim 20 wherein said projecting the modulated illumination from the SLM to a printing surface includes projecting the modulated illumination on a planar array of microlenses proximate the printing surface wherein the exposure field corresponding to each source pixel comprises a primary radiation component that has intercepted and been focused by a microlens corresponding to the source pixel, but which may also comprise a secondary radiation component that has intercepted and been focused by adjacent microlenses.

24. A method of operating a printing system that includes a spatial light modulator (SLM) that comprises an array of light-modulating pixels, the method comprising:

illuminating the SLM;

controlling the SLM in accordance with a desired information pattern so that each pixel modulates the illumination intercepting that pixel;

projecting the modulated illumination from the SLM to a printing surface so that each pixel generates a corresponding modulated exposure field that exposes the printing surface;

inducing a phase difference of approximately π

/2 between adjacent exposure fields;

applying a first exposure to the printing surface;

altering the positional relationship between the printing surface and the SLM in a manner that inverts the sign of the phase difference; and

applying a second exposure to the printing surface, whereby the sign inversion causes coherent interaction between adjacent exposure fields to substantially cancel out between the two exposures.

25. The method of claim 24 wherein inducing a phase difference comprises configuring the SLM with a phase-shifting mechanism that comprises two optical media proximate the source pixels wherein the two media have different refractive indices and the optical path length difference between adjacent pixels is selected to induce a phase difference of approximately π

/2 between adjacent pixels.

26. The method of claim 24 wherein the illumination is reflected by the SLM, and wherein inducing a phase difference comprises configuring the SLM with alternate source pixels recessed relative to their adjacent pixels, with the recess depth selected to induce a phase difference of approximately π

/2 between adjacent pixels.

27. The method of claim 24 wherein the illumination is reflected by the SLM, and wherein the printing system includes a planar array of microlenses proximate the printing surface wherein the exposure field corresponding to each source pixel comprises a primary radiation component that has intercepted and been focused by a microlens corresponding to the source pixel, but which may also comprise a secondary radiation component that has intercepted and been focused by adjacent microlenses.