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Vacuum processing apparatus

  • US 6,490,810 B2
  • Filed: 02/14/2001
  • Issued: 12/10/2002
  • Est. Priority Date: 08/29/1990
  • Status: Expired due to Fees
First Claim
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1. A vacuum processing system, comprising:

  • a first conveyor structure for transferring a cassette;

    a cassette mount unit for holding the cassette;

    a second conveyor structure for transferring a wafer held in the cassette on the cassette mount unit;

    a vacuum loader provided with a third conveyor structure and at least one vacuum processing chamber, and at least one lock chamber disposed between the second conveyor structure and the third conveyor structure, wherein;

    the second conveyor structure includes a track installed along the at least one lock chamber, the second conveyor structure is provided with a robot which travels on the track, the robot is adapted to transfer a wafer from the cassette mount unit to a lock chamber, of the at least one lock chamber, the second conveyor structure is disposed between the cassette mount unit and a set of lock chambers, as the at least one lock chamber, which comprises a chamber to take in and to take out a wafer one by one and another chamber to take in and to take out a processed wafer, and the second conveyor structure is provided with a robot arm extendable to the cassette and facing to the at least one lock chamber.

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