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Apparatus and method of producing pressure sensors and diaphragms for said pressure sensors

  • US 6,490,932 B1
  • Filed: 07/02/1999
  • Issued: 12/10/2002
  • Est. Priority Date: 01/13/1997
  • Status: Expired due to Fees
First Claim
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1. A method of producing a number of pressure sensors (1), said method comprising the steps of:

  • a) joining a plurality of support bodies (4) to a metal component, said metal component forming a diaphragm (3);

    b) applying a thin-film coating to the metal component to produce sensor elements; and

    c) finally dividing the metal component provided with the thin-film coating in step b) and the support bodies (4) in step a) into a plurality of pressure sensors (1), each having a single one of said support bodies so that the number of pressure sensors formed corresponds to said plurality of said support bodies.

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