Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor
First Claim
1. An apparatus, comprising:
- a microelectronic substrate; and
a tiltable body including a plate configured to tilt about an axis and a tilt stop engaging portion axially displaced along the axis with respect to the plate, wherein a range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate.
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0 Petitions
Accused Products
Abstract
A micromechanical apparatus includes a microelectronic substrate and a tiltable body thereon. The tiltable body includes a plate configured to tilt about an axis parallel to the microelectronic substrate and a tilt stop engaging portion disposed axially adjacent the plate. A range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate. The microelectronic substrate may have an opening therein configured to receive the plate, and the tilt stop may include a surface of the microelectronic substrate adjacent the opening. An actuator, such as an electrostatic actuator, may tilt the tiltable body about the axis. Related operation and fabrication methods are also described.
39 Citations
22 Claims
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1. An apparatus, comprising:
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a microelectronic substrate; and
a tiltable body including a plate configured to tilt about an axis and a tilt stop engaging portion axially displaced along the axis with respect to the plate, wherein a range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate. - View Dependent Claims (2, 3)
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4. An apparatus, comprising:
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a microelectronic substrate; and
a tiltable body including a plate configured to tilt about an axis and a tilt stop engaging portion axially displaced with respect to the plate, wherein a range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate, wherein the plate extends a first radial distance from the axis; and
wherein the tilt stop engaging portion extends a second radial distance from the axis that is different from the first distance. - View Dependent Claims (7, 8, 9, 10, 11)
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5. An apparatus, comprising:
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a microelectronic substrate; and
a tiltable body including a plate configured to tilt about an axis and a tilt stop engaging portion axially displaced with respect to the plate, wherein a range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate, wherein the microelectronic substrate has an opening therein configured to receive the plate; and
wherein the tilt stop comprises a surface of the microelectronic substrate adjacent the opening. - View Dependent Claims (6)
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12. An apparatus, comprising:
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a microelectronic substrate; and
a first tiltable body including a first plate configured to tilt about a first axis and a first tilt stop engaging portion axially displaced with respect to the first plate, wherein a first range of rotation of the first plate about the first axis is defined by contact of the first tilt stop engaging portion with a first tilt stop on the substrate; and
a second tiltable body including a second plate configured to tilt about a second axis and a second tilt stop engaging portion axially displaced with respect to the second plate, wherein a second range of rotation of the second plate about the second axis is defined by contact of the second tilt stop engaging portion with a second tilt stop on the substrate.- View Dependent Claims (13, 14)
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15. A micromechanical device, comprising:
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a microelectronic substrate; and
a tiltable body on the microelectronic substrate, the tiltable body including an optical device region configured to tilt about an axis over an angular range defined by contact of an axially displaced tilt stop engaging portion of the tiltable body with a tilt stop on the substrate, wherein the tilt stop engaging portion is displaced from the optical device region along the axis. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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Specification