Method of manufacture of a dual chamber single vertical actuator ink jet printer
First Claim
1. A method of manufacturing an ink jet printhead which includes a plurality of nozzle arrangements positioned on a substrate, each nozzle arrangement having a nozzle chamber defined in the substrate, a roof wall that covers the nozzle chamber, a pair of ink ejection nozzles defined in the roof wall and an ink ejecting mechanism positioned in the nozzle chamber to eject ink from each of the ink ejection nozzles, the ink ejecting mechanism and the nozzle chamber being configured so that, on displacement of the ink ejecting mechanism in one direction ink is ejected from one of the ink ejection nozzles and on displacement of the ink ejecting mechanism in another direction, ink is ejected from the other ink ejection nozzle, the method comprising the steps of:
- etching said substrate to form the plurality of nozzle chambers;
depositing a sacrificial layer on the substrate so that the nozzle chambers are filled with sacrificial material, forming each ink ejecting mechanism on said sacrificial layer using masks together with a suitable deposition and etching technique;
forming the roof wall with each said pair of ink ejection nozzles above each respective ink ejecting mechanism, and etching the sacrificial layer to free each ink ejecting mechanism and to clear each said nozzle chamber.
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Abstract
This patent a method of manufacturing a Dual Chamber Single Vertical Actuator Ink Jet Printer print head wherein an array of nozzles are formed on a substrate utilising planar monolithic deposition, lithographic and etching processes. Preferably, multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer. The print heads can be formed utilising standard vlsi/ulsi processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably being of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate.
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Citations
4 Claims
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1. A method of manufacturing an ink jet printhead which includes a plurality of nozzle arrangements positioned on a substrate, each nozzle arrangement having a nozzle chamber defined in the substrate, a roof wall that covers the nozzle chamber, a pair of ink ejection nozzles defined in the roof wall and an ink ejecting mechanism positioned in the nozzle chamber to eject ink from each of the ink ejection nozzles, the ink ejecting mechanism and the nozzle chamber being configured so that, on displacement of the ink ejecting mechanism in one direction ink is ejected from one of the ink ejection nozzles and on displacement of the ink ejecting mechanism in another direction, ink is ejected from the other ink ejection nozzle, the method comprising the steps of:
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etching said substrate to form the plurality of nozzle chambers;
depositing a sacrificial layer on the substrate so that the nozzle chambers are filled with sacrificial material, forming each ink ejecting mechanism on said sacrificial layer using masks together with a suitable deposition and etching technique;
forming the roof wall with each said pair of ink ejection nozzles above each respective ink ejecting mechanism, and etching the sacrificial layer to free each ink ejecting mechanism and to clear each said nozzle chamber. - View Dependent Claims (2, 3, 4)
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Specification