Apparatus and method for controlling temperature uniformity of substrates

• US 6,492,625 B1
• Filed: 09/27/2000
• Issued: 12/10/2002
• Est. Priority Date: 09/27/2000
• Status: Expired due to Term

• Current Assignee: Veeco Instruments Incorporated
• Original Assignee: Emcore Corporation
• Inventors: Ramer, Jeffrey, Patel, Ameesh, Boguslavskiy, Vadim, Gurary, Alexander
• Primary Examiner(s): PASCHALL, MARK H
• Application Number:
  US09/671,527
• Time in Patent Office: 804 Days
• Field of Search: 219/483-486, 219/497, 219/121.43, 219/121.41, 219/121.47, 118/724, 118/725, 156/345, 392/416, 374/121, 374/137
• US Class Current: 219/486
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: G01J 5/0022 for sensing the radiation of moving bodies
• CPC Class Codes: H01L 21/67248 Temperature monitoring
• CPC Class Codes: H01L 21/68764 characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
• CPC Class Codes: H01L 21/68771 characterised by supporting more than one semiconductor substrate

Abstract

An apparatus and method for providing substantially uniform substrate temperature in a chemical vapor deposition reaction chamber is provided. The method and apparatus utilize a carrier for holding at least one substrate in the reaction chamber and a plurality of heating elements arranged to heat the carrier and the at least one substrate. At least one substrate pyrometer measures the temperature of the substrates to provide a signal representing the process temperature. This signal is used in a feedback loop to control one or more of the heating elements. At least two carrier pyrometers focused at different zones of the carrier are provided. The signals from the carrier pyrometers are compared to one another to provide an indication of temperature non-uniformity. This indication is used in a separate feedback loop to adjust other heating elements so as to maintain temperature uniformity across the carrier.

Claims

1. An apparatus for controlled heating of a substrate in a chemical vapor deposition reaction chamber comprising:

a carrier for holding at least one substrate in the reaction chamber, said carrier including a first zone and a second zone;

first and second heating elements arranged to heat the carrier and the at least one substrate, said first heating element being arranged to heat said first zone preferentially;

at least one substrate pyrometer for measuring a process temperature by measuring radiation from at least one of said one or more substrates; and

a first carrier pyrometer operative to provide a first zone signal representing radiation from said first zone of the carrier and a second carrier pyrometer operative to provide a second zone signal representing radiation from said second zone of the carrier.

2. The apparatus of claim 1, further comprising a first comparator connected to said first and second carrier pyrometers, said first comparator being arranged to provide a first difference signal representing a difference between said first and second zone signals, and one or more controllers constructed and arranged to control the operation of said second heating element based at least in part upon said process temperature and to control the operation of said first heating element based at least in part upon said first difference signal.

3. The apparatus of claim 1, wherein said at least one substrate pyrometer comprises an emissivity compensated pyrometer and said carrier pyrometers comprise non-emissivity compensated pyrometers.

4. The apparatus of claim 3, wherein said carrier has a central axis, said first and second zones being disposed at different radial distances from said central axis.

5. The apparatus of claim 4, wherein said first zone is disposed radially inward of said second zone, said carrier also having a third zone disposed radially outward of said second zone, the apparatus further comprising a third carrier pyrometer operative to provide a third zone signal representing radiation from said third zone of the carrier, and a second comparator connected to said second and third carrier pyrometers said second comparator being arranged to provide a second difference signal representing a difference between said second and third zone signals, said one or more controllers being operative to control said third heating element based at least in part on said second difference signal.

6. The apparatus of claim 5, wherein said heating elements are radially spaced apart.

7. The apparatus of claim 5, further comprising a rotational drive for rotating said carrier about said axis.

8. The apparatus of claim 5, further including a first power supply for supplying power to said first heating element, a second power supply for supplying power to said second heating element and a third power supply for supplying power to said third heating element, said one or more controllers being operative to control operation of said power supplies.

9. The apparatus of claim 1, wherein said one or more controllers includes a first controller operative to control operation of said first heating element to said first difference signal but not responsive to said process temperature, and a second controller operative to control said second heating element responsive to said process temperature but not responsive to said first difference signal.

10. An apparatus for controlled heating of a substrate in a chemical vapor deposition reaction chamber comprising:

a carrier for holding at least one substrate in the reaction chamber, said carrier including a first zone and a second zone;

means for heating said carrier;

means for measuring a process temperature by measuring the temperature of at least one of said one or more substrates;

means for providing a first zone signal representing a parameter related to temperature of said first zone of the carrier and a second zone signal representing a parameter related to temperature of said second zone of the carrier; and

means for controlling said heating means so as to maintain said process temperature at a target temperature based at least in part upon comparison of said measured process temperature with a setpoint temperature and maintain temperature uniformity between said zones of said carrier based at least in part upon comparison of said zone signals.

11. A method of controlling the temperature of a substrate in a chemical vapor deposition apparatus comprising:

providing a carrier for supporting said substrate in said chemical vapor deposition apparatus;

heating said carrier and said substrate;

measuring the temperature of said substrate;

obtaining indications of a parameter related to carrier temperature from at least two zones of said carrier;

comparing said parameter indications from said at least two zones to obtain a difference signal; and

adjusting heat transfer to said zones responsive to said measured temperature and said difference signal so as to maintain said measured temperature at a setpoint and so as to maintain said difference signal at a preselected level.

12. The method of claim 11, wherein said preselected level is substantially equal to zero.

13. The method of claim 12, wherein said at least one substrate has a specular surface, and said step of measuring the temperature of said substrate includes using an emissivity compensated pyrometer.

14. The method of claim 13, wherein said step of obtaining said indication of said parameter includes using at least one non-emissivity compensated pyrometer.

15. The method of claim 14, wherein said step of obtaining said indication of said parameter includes using at least two non-emissivity compensated pyrometers.

16. The method of claim 15 wherein said carrier has a diffuse surface.

17. A method of thermally processing one or more semiconductor wafers in a chemical vapor deposition apparatus comprising:

providing a carrier supporting said one or more semiconductor wafers in said chemical vapor deposition apparatus;

heating said one or more semiconductor wafers on said carrier to a target operating temperature;

measuring the temperature of said semiconductor wafer using an emissivity compensated pyrometer;

providing a difference signal related to the temperature difference between at least two zones on said carrier; and

adjusting the temperature in one of the at least two zones of said carrier based at least in part upon said difference signal.

18. The method of claim 17, wherein said step of providing a difference signal includes monitoring radiation from said carrier using one or more non-emissivity compensated pyrometers.