Highly conductive composite polysilicon gate for CMOS integrated circuits
First Claim
1. An integrated-circuit assembly for making an electrode for a transistor, the assembly comprising:
- a semiconductive layer;
a metal-substitutable layer adjacent the semiconductive layer;
a first metal layer contacting the metal-substitutable layer, wherein the metal-substitutable layer and the first metal layer comprise materials susceptible to cross-diffusion at certain temperatures;
a doped polysilicon layer contacting the semiconductive layer;
a diffusion barrier layer between the doped polysilicon layer and the metal-substitutable layer; and
a second metal layer contacting the first metal layer, the second metal layer including at least one of hafnium, zirconium, and titanium.
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Accused Products
Abstract
Many integrated circuits include a type of transistor known as a metal-oxide-semiconductor, field-effect transistor, or “mosfet,” which has an insulated gate member that controls its operation. Early mosfets had aluminum gates. But because the aluminum made the mosfets unreliable and difficult to manufacture, aluminum was abandoned in favor of polysilicon. Unfortunately, polysilicon has ten-times more electrical resistance than aluminum, which not only wastes power but also slows operation of the integrated circuits. Several efforts have been made to use materials less-resistive than polysilicon, but these have failed to yield a practical solution, since some of the materials have high electrical resistance and prevent low-voltage operation. Accordingly, one embodiment of the invention provides a gate structure that includes a doped polysilicon layer to facilitate low-voltage operation, a diffusion barrier to improve reliability, and a low-resistance aluminum, gold, or silver member to reduce gate resistance. Moreover, to overcome previous manufacturing difficulties, the inventors employ a metal-substitution fabrication technique, which entails formation of a polysilicon gate, and then substitution of metal for the polysilicon.
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Citations
41 Claims
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1. An integrated-circuit assembly for making an electrode for a transistor, the assembly comprising:
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a semiconductive layer;
a metal-substitutable layer adjacent the semiconductive layer;
a first metal layer contacting the metal-substitutable layer, wherein the metal-substitutable layer and the first metal layer comprise materials susceptible to cross-diffusion at certain temperatures;
a doped polysilicon layer contacting the semiconductive layer;
a diffusion barrier layer between the doped polysilicon layer and the metal-substitutable layer; and
a second metal layer contacting the first metal layer, the second metal layer including at least one of hafnium, zirconium, and titanium. - View Dependent Claims (2, 4, 5, 6, 7, 8, 9, 10)
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3. The integrated-circuit assembly of claim, wherein the first metal layer consists essentially of gold, silver, or aluminum.
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11. A gate structure for a field-effect transistor, comprising:
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a gate insulation structure contacting a channel region of the transistor, a doped polysilicon layer contacting the gate insulation structure, the polysilicon layer doped to define a threshold voltage for the transistor;
a diffusion barrier layer adjacent the doped polysilicon layer and comprising at least oneof a silicon carbide, a silicon oxycarbide, and an amorphous silicon; and
a metal layer contacting the diffusion barrier layer.- View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. An integrated memory circuit comprising:
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a memory array having a plurality of memory cells;
an address decoder coupled to the memory cells;
a plurality of bit lines coupled to the memory cells;
a voltage-sense-amplifier circuit coupled to the bit lines; and
wherein at least one of the memory cells and the voltage-sense amplifier circuit includes a field effect transistor comprising;
a gate insulation structure contacting a channel region of the transistor;
a doped polysilicon layer contacting the gate insulation structure, the polysilicon layer doped to define a threshold voltage for the transistor;
a diffusion barrier layer adjacent the doped polysilicon layer; and
a metal layer contacting the diffusion barrier layer adn comprising at least one of gold and silver. - View Dependent Claims (20, 21, 22, 23, 24)
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25. An integrated-circuit assembly, comprising:
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a plurality of field-effect transistors formed on a silicon substrate, with at least two transistors sharing a common source or drain region; and
wherein at least one transistor includes;
a gate insulation structure contacting a channel region of the one transistor;
a doped polysilicon layer contacting the gate insulation structure, the polysilicon layer doped to define a threshold voltage for the one transistor; and
a diffusion barrier layer adjacent the doped polysilicon layer; and
a metal layer contacting the diffusion barrier layer and comprising at least one of gold and silver. - View Dependent Claims (26, 27, 28, 29, 30)
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31. An integrated-circuit assembly for making an electrode for a transistor, the assembly comprising:
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a semiconductive layer;
a metal-substitutable layer adjacent the semiconductive layer and comprising at least one of polysilicon and germanium oxide;
a first metal layer contacting the metal-substitutable layer and comprising materials susceptible to cross-diffusion at certain temperatures with one or more portions of the metal-substitutable layer;
a doped polysilicon layer contacting the semiconductive layer;
a diffusion barrier layer between the doped polysilicon layer and the metal-substitutable layer; and
a second metal layer contacting the first metal layer, the second metal layer including at least one of hafnium, zirconium, and titanium. - View Dependent Claims (32, 33, 34, 35, 36)
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37. A gate structure for a field-effect transistor, comprising:
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a gate insulation structure contacting a channel region of the transistor;
a doped polysilicon layer contacting the gate insulation structure, the polysilicon layer doped to define a threshold voltage for the transistor;
a diffusion barrier layer adjacent the doped polysilicon layer and consisting essentially of at least one of a silicon carbide, a silicon oxycarbide, and an amorphous silicon; and
a gold layer contacting the diffusion barrier layer. - View Dependent Claims (38, 40)
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39. A gate structure for a field-effect transistor, comprising:
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a gate insulation structure contacting a channel region of the transistor;
a doped polysilicon layer contacting the gate insulation structure, the polysilicon layer doped to define a threshold voltage for the transistor;
a diffusion barrier layer adjacent the doped polysilicon layer and comprising at least one of a silicon carbide, a silicon oxycarbide, and an amorphous silicon; and
a silver layer contacting the diffusion barrier layer.
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41. A gate structure for a field-effect transistor, comprising:
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a gate insulation structure contacting a channel region of the transistor;
a doped polysilicon layer contacting the gate insulation structure, the polysilicon layer doped to define a threshold voltage for the transistor;
a diffusion barrier layer adjacent the doped polysilicon layer and consisting essentially of a silicon carbide; and
a silver or gold layer contacting the diffusion barrier layer.
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Specification