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Image sensor package having sealed cavity over active area

  • US 6,492,699 B1
  • Filed: 05/22/2000
  • Issued: 12/10/2002
  • Est. Priority Date: 05/22/2000
  • Status: Expired due to Term
First Claim
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1. A structure comprising:

  • a window support sheet having a first aperture and a second aperture formed therethrough; and

    a window sheet, a first surface of said window support sheet being in direct contact with a first region of a first surface of said window sheet laterally between said first aperture and said second aperture, a second surface of said window sheet comprising a first groove directly opposite said first region.

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