Image sensor package having sealed cavity over active area
First Claim
Patent Images
1. A structure comprising:
- a window support sheet having a first aperture and a second aperture formed therethrough; and
a window sheet, a first surface of said window support sheet being in direct contact with a first region of a first surface of said window sheet laterally between said first aperture and said second aperture, a second surface of said window sheet comprising a first groove directly opposite said first region.
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Abstract
An image sensor package includes an image sensor having an upper surface with an active area and bond pads formed thereon. A noncritical region of the upper surface is between the active area and the bond pads. A window overlies the active area and is supported on the noncritical region by a window support. The window, window support and image sensor define a sealed cavity and the active area is located within the cavity. In particular, the active area is located within the cavity, which is sealed to protect the active area against external moisture, dust and contamination.
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Citations
16 Claims
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1. A structure comprising:
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a window support sheet having a first aperture and a second aperture formed therethrough; and
a window sheet, a first surface of said window support sheet being in direct contact with a first region of a first surface of said window sheet laterally between said first aperture and said second aperture, a second surface of said window sheet comprising a first groove directly opposite said first region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A structure comprising:
a window sheet having a first cavity and a second cavity in a first surface of said window sheet and a first groove in a second surface of said window sheet, said first groove being laterally between said first cavity and said second cavity. - View Dependent Claims (13, 14, 15, 16)
Specification