Image sensor package having sealed cavity over active area

• US 6,492,699 B1
• Filed: 05/22/2000
• Issued: 12/10/2002
• Est. Priority Date: 05/22/2000
• Status: Expired due to Term

• Current Assignee: Amkor Technology Singapore Holding Pte., Ltd. (Amkor Technology Incorporated)
• Original Assignee: Amkor Technology Incorporated
• Inventors: Webster, Steven, Glenn, Thomas P.
• Primary Examiner(s): Flynn, Nathan J.
• Assistant Examiner(s): ANDUJAR, LEONARDO
• Application Number:
  US09/577,692
• Time in Patent Office: 932 Days
• Field of Search: 257/433, 257/434, 438/116
• US Class Current: 257/433
• CPC Class Codes: H01L 2224/32225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48227 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 27/14618 Containers
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/10253 Silicon [Si]
• CPC Class Codes: H01L 2924/15311 being a ball array, e.g. BGA
• CPC Class Codes: H01L 2924/181 Encapsulation
• CPC Class Codes: H01L 2924/1815 Shape
• CPC Class Codes: H01L 31/0203 Containers; Encapsulations , e.g. encapsulation of photodiodesfor photovoltaic devices H01L31/048; for organic photosensitive devices H10K30/80

Abstract

An image sensor package includes an image sensor having an upper surface with an active area and bond pads formed thereon. A noncritical region of the upper surface is between the active area and the bond pads. A window overlies the active area and is supported on the noncritical region by a window support. The window, window support and image sensor define a sealed cavity and the active area is located within the cavity. In particular, the active area is located within the cavity, which is sealed to protect the active area against external moisture, dust and contamination.

Claims

1. A structure comprising:

a window support sheet having a first aperture and a second aperture formed therethrough; and

a window sheet, a first surface of said window support sheet being in direct contact with a first region of a first surface of said window sheet laterally between said first aperture and said second aperture, a second surface of said window sheet comprising a first groove directly opposite said first region.

2. The structure of claim 1 wherein said first groove is rectangular.

3. The structure of claim 1 wherein said first groove scores said window sheet.

4. The structure of claim 3 wherein said first groove extends halfway through said window sheet.

5. The structure of claim 1 wherein said first groove extends through said window sheet.

6. The structure of claim 5 wherein said first groove scores said window support sheet.

7. The structure of claim 1 further comprising a second groove in said first groove, a width of said second groove being less than a width of said first groove.

8. The structure of claim 7 wherein said second groove is made in a center of said first groove.

9. The structure of claim 7 wherein said second groove extends through said window sheet and through said window support sheet.

10. The structure of claim 9 wherein said window support sheet comprises a first window support and a second window support and wherein said window sheet comprises a first window and a second window, said second groove singulating said first window support from said second window support and said first window from said second window.

11. The structure of claim 1 wherein said window support sheet is a first sheet of borosilicate glass and said window sheet is a second sheet of borosilicate glass.

12. A structure comprising:

a window sheet having a first cavity and a second cavity in a first surface of said window sheet and a first groove in a second surface of said window sheet, said first groove being laterally between said first cavity and said second cavity.

13. The structure of claim 12 further comprising a second groove in said first groove, a width of said second groove being less than a width of said first groove.

14. The structure of claim 13 wherein said second groove is made in a center of said first groove.

15. The structure of claim 13 wherein said second groove extends through said window sheet.

16. The structure of claim 13 wherein said window sheet comprises a first window support integral with a first window and a second window support integral with a second window, said second groove singulating said first window support from said second window support and said first window from said second window.