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Integrated coil inductors for IC devices

  • US 6,492,708 B2
  • Filed: 03/14/2001
  • Issued: 12/10/2002
  • Est. Priority Date: 03/14/2001
  • Status: Expired due to Term
First Claim
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1. A semiconductor structure comprising one or more coils integrated with an integrated circuit (IC) chip, each coil comprising a bottom coil element and a top coil element that are in electrical contact with each other through side coil elements, wherein said bottom coil element is located within a cavity formed in a semiconductor substrate, said side coil elements are located on exposed vertical sidewalls of a patterned back-end-of-the-line layer, and said top coil element is located within or atop said patterned back-end-of-the-line layers.

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