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Nanomechanical switches and circuits

  • US 6,495,905 B2
  • Filed: 06/07/2002
  • Issued: 12/17/2002
  • Est. Priority Date: 11/09/2000
  • Status: Active Grant
First Claim
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1. A nanomechanical switch comprising:

  • a substrate;

    formed on the substrate, an emitter electrode including a cantilever element extending from the emitter electrode, the emitter being formed of a material having a magnetic permeability greater than one;

    a base electrode formed on the substrate, at least a portion of the base electrode being beneath the cantilever element;

    a collector electrode formed on the substrate adjacent the base electrode, at least a portion of the collector electrode being beneath the cantilever element and being formed of a material having a magnetic permeability greater than one; and

    a current source coupled to the base electrode.

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