Double-pulsed optical interferometer for waveform probing of integrated circuits

• US 6,496,261 B1
• Filed: 02/08/2000
• Issued: 12/17/2002
• Est. Priority Date: 09/24/1999
• Status: Expired due to Fees

• Current Assignee: DCG Systems Incorporated (Thermo Fisher Scientific Incorporated)
• Original Assignee: Schlumberger Technologies Incorporated (SLB)
• Inventors: Lo, William K., Wilsher, Kenneth R.
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): CONNOLLY, PATRICK J
• Application Number:
  US09/500,757
• Time in Patent Office: 1,043 Days
• Field of Search: 356/450, 356/491
• US Class Current: 356/450
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence

Abstract

Optical interferometery is used to probe an integrated circuit device under test (DUT). During each cycle of a repetitive electrical test pattern applied to the DUT a reference pulse is provided at a fixed time relative to the test pattern, and a probe pulse is provided at a time scanned through the test pattern in the manner of equivalent time sampling. The probe and reference light pulses are each split to provide at least a second probe pulse and a second reference pulse. One probe pulse and one reference pulse interact with the DUT at the same physical location, but at displaced times with respect to each other. The second probe pulse and the second reference pulse travel an optical delay path with length controlled to compensate for motions of the DUT. The probe pulses are recombined and detected to provide a probe interference signal. The reference pulses are recombined and detected to provide a reference interference signal. For each cycle, electrical activity in the DUT is detected by preparing a ratio of the probe interference signal and the reference interference signal.

Claims

1. A method of detecting activity in a semiconductor device as a repetitive electrical test pattern is applied to the device, comprising the acts of:

providing a first probe light pulse at a selected time during each repetition of the test pattern and dividing the first probe light pulse to provide at least a second probe light pulse;

providing a first reference light pulse at a time during each repetition of the test pattern displaced relative to the selected time at which the first probe light pulse is provided and dividing the first reference light pulse to provide at least a second reference light pulse;

directing the first probe light pulse and the first reference light pulse onto the semiconductor device;

combining the first probe light pulse with the second probe light pulse and the first reference light pulse with the second reference light pulse, after the first probe light pulse and the first reference light pulse interact with the semiconductor device, such that the first probe light pulse and the second probe light pulse overlap in space and time and the first reference light pulse and the second reference light pulse overlap in space and time;

detecting the overlapped probe light pulses thereby to provide a probe interference signal;

detecting the overlapped reference light pulses thereby to provide a reference interference signal; and

determining a function of the probe interference signal and the reference interference signal.

2. The method of claim 1 further comprising varying the selected time with the repetition of the test pattern such that the function of the probe interference signal and the reference interference signal is determined at a plurality of the selected times within the test pattern.

3. The method of claim 1 wherein the first probe light pulse is a laser light pulse.

4. The method of claim 3 further comprising selecting the laser light pulse from a train of mode-locked laser light pulses.

5. The method of claim 4 further comprising phase locking the train of mode-locked laser light pulses and the repetitive test pattern.

6. The method of claim 1 wherein the first reference light pulse is a laser light pulse.

7. The method of claim 6 further comprising modulating a laser beam to provide the laser light pulse.

8. The method of claim 1 wherein the probe light pulses and the reference light pulses are of about the same wavelength.

9. The method of claim 1 further comprising fixing the time during each repetition of the electrical test pattern at which the first reference light pulse is provided with respect to the test pattern.

10. The method of claim 1 further comprising directing the first probe light pulse and the first reference light pulse along a same path onto the semiconductor device.

11. The method of claim 1 further comprising directing the second probe light pulse and the second reference light pulse along a delay path before the second probe light pulse is combined with the first probe light pulse and the second reference light pulse is combined with the first reference light pulse.

12. The method of claim 11 further comprising feedback controlling a length of said delay path to compensate for a motion of the semiconductor device.

13. The method of claim 12 wherein the feedback controlling stabilizes the reference interference signal.

14. The method of claim 1 further comprising amplifying the probe interference signal, integrating the probe interference signal, and digitizing the probe interference signal.

15. The method of claim 1 further comprising amplifying the reference interference signal, integrating the reference interference signal, and digitizing the reference interference signal.

16. The method of claim 1 wherein the acts of detecting the overlapped probe light pulses and detecting the overlapped reference light pulses comprise detecting the overlapped probe light pulses and the overlapped reference light pulses to provide a detector signal, integrating and digitizing a portion of the detector signal to provide a probe interference signal, and integrating and digitizing a portion of the detector signal to provide a reference interference signal.

17. The method of claim 1 further comprising canceling an amplitude noise in the probe interference signal and the reference interference signal.

18. The method of claim 17 wherein the act of canceling an amplitude noise comprises detecting a portion of a probe light pulse energy, detecting a portion of a reference light pulse energy, normalizing the probe interference signal by the portion of the probe light pulse energy, and normalizing the reference interference signal by the portion of the reference light pulse energy.

19. An apparatus for detecting activity in a semiconductor device as a repetitive electrical test pattern is applied to the device, comprising:

a source of a first probe light pulse, thereby outputting a first probe light pulse at a selected time during each repetition of the electrical test pattern;

a source of a first reference light pulse, thereby outputting a first reference light pulse at a time displaced relative to the selected time at which the first probe light pulse is provided;

a splitter onto which the first probe light pulse and first reference light pulse are incident, whereby at least a second probe light pulse and a second reference light pulse are provided;

a support for the semiconductor device onto which the first probe light pulse and first reference light pulse are incident;

a beam combiner, located to combine the first probe light pulse and the second probe light pulse, and to combine the first reference light pulse and the second reference light pulse, after the first probe light pulse and the first reference light pulse interact with the semiconductor device;

a detector located to detect the first probe light pulse and the second probe light pulse, thereby to output a probe interference signal and to detect the first reference light pulse and the second reference light pulse, thereby to output a reference interference signal; and

a processor coupled to the detector, thereby to determine a function of the probe interference signal and the reference interference signal.

20. The apparatus of claim 19 wherein the selected time is varied with the repetition of the electrical test pattern such that the function of the probe interference signal and the reference interference signal is determined at a plurality of the selected times within the test pattern.

21. The apparatus of claim 19 wherein the source of the first probe light pulse comprises a first laser, and the source of the first reference light pulse comprises a second laser.

22. The apparatus of claim 19 wherein the source of the first probe light pulse and the source of the first reference light pulse comprise a same laser.

23. The apparatus of claim 19 wherein the source of the first probe light pulse is a laser.

24. The apparatus of claim 23 wherein the laser is a mode-locked laser, and further comprising an optical modulator located to select the first probe light pulse from a train of mode-locked laser light pulses.

25. The apparatus of claim 24 wherein the train of mode-locked laser light pulses and the repetitive test pattern are phase locked.

26. The apparatus of claim 19 wherein the source of the first reference light pulse is a laser.

27. The apparatus of claim 26 further comprising an optical modulator and wherein an output beam of the laser is modulated by the optical modulator to provide the first reference light pulse.

28. The apparatus of claim 19 wherein the probe light pulses and the reference light pulses are of about the same wavelength.

29. The apparatus of claim 19 wherein the time during each repetition of the test pattern at which the first reference light pulse is provided is fixed with respect to the test pattern.

30. The apparatus of claim 19 wherein the first probe light pulse and the first reference light pulse are directed along a same path onto the semiconductor device.

31. The apparatus of claim 19 further comprising a delay path along which the second probe light pulse and second reference light pulse are directed.

32. The apparatus of claim 31 further comprising a feedback loop coupled to the delay path whereby a length of the delay path is controlled to compensate for motion of the semiconductor device.

33. The apparatus of claim 32 wherein the feedback loop stabilizes the reference interference signal.

34. The apparatus of claim 19 wherein the detector comprises a photodetector located to detect the first probe light pulse and the second probe light pulse and to output a probe interference signal, an amplifier coupled to receive the probe interference signal, an integrator coupled to receive the amplified probe interference signal, and a digitizer coupled to receive the integrated probe interference signal.

35. The apparatus of claim 19 wherein the detector comprises a photodetector located to detect the first reference light pulse and the second reference light pulse and to output a reference interference signal, an amplifier coupled to receive the reference interference signal, an integrator coupled to receive the amplified reference interference signal, and a digitizer coupled to receive the integrated reference interference signal.

36. The apparatus of claim 19 further comprising a splitter located to divert a portion of a probe light pulse, a photodetector located to detect the portion of the probe light pulse and to output a photodetector signal, an amplifier coupled to receive the photodetector signal, an integrator coupled to receive the amplified photodetector signal, and a digitizer coupled to receive the integrated photodetector signal.

37. The apparatus of claim 19 further comprising a splitter located to divert a portion of a reference light pulse, a photodetector located to detect the portion of the reference light pulse and to output a photodetector signal, an amplifier coupled to receive the photodetector signal, an integrator coupled to receive the amplified photodetector signal, and a digitizer coupled to receive the integrated photodetector signal.