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Yield prediction and statistical process control using predicted defect related yield loss

  • US 6,496,958 B1
  • Filed: 04/27/1999
  • Issued: 12/17/2002
  • Est. Priority Date: 04/27/1999
  • Status: Expired due to Term
First Claim
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1. A method for determining yield loss for a device comprising the steps of:

  • determining killing probabilities corresponding to values of inspection parameters based on historic inspection information;

    determining defects on the device;

    classifying the defects according to the inspection parameters, the defects adopting the killing probabilities associated with the same values of the inspection parameters; and

    calculating a predicted yield loss for each of a plurality of inspection processes based on the defects and the adopted killing probabilities.

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