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Parametric resonance in microelectromechanical structures

  • US 6,497,141 B1
  • Filed: 06/05/2000
  • Issued: 12/24/2002
  • Est. Priority Date: 06/07/1999
  • Status: Expired due to Fees
First Claim
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1. A parametric resonance oscillator comprising:

  • a parallel plate micromechanical actuator mounted for in-plane motion with respect to a substrate and incorporating a linear force comb drive actuator, said structure having a natural resonant frequency of oscillation;

    an electrode on said structure; and

    a drive circuit connected to said electrode to supply a drive signal at a frequency selected to produce parametric oscillation of said structure.

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