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Substrate sensor

  • US 6,498,043 B1
  • Filed: 11/22/2000
  • Issued: 12/24/2002
  • Est. Priority Date: 09/12/1997
  • Status: Expired due to Term
First Claim
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1. A method of making an implantable sensor, said implantable sensor including a substrate, electrodes formed on one side of the substrate, and electrical circuitry formed on the other side of the substrate, said method comprising:

  • forming the electrical circuitry on an active surface of a semiconductor substrate;

    forming electrodes on a non-active surface of the semiconductor substrate;

    electrically interconnecting the electrodes with the electrical circuitry through the use of stair-stepped conductive vias that pass through the body of the semiconductor substrate; and

    depositing a protective layer of a biocompatible material over the entire surface area of the substrate except for an exposed area of the electrodes.

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