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Method of increasing the conductivity of a transparent conductive layer

  • US 6,498,087 B2
  • Filed: 11/29/2001
  • Issued: 12/24/2002
  • Est. Priority Date: 12/01/2000
  • Status: Expired due to Fees
First Claim
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1. A method of increasing the conductivity of a transparent conductive layer, comprising:

  • depositing and patterning a photoresist layer into a configuration corresponding to the desired pattern of the transparent conductive layer; and

    patterning the transparent conductor layer using the photoresist layer, wherein the edge regions of the photoresist layer are provided with a taper, the method further comprising the steps of;

    partially etching the photoresist layer such that at least part of the edge regions are completely removed thereby exposing the underlying transparent conductor layer;

    selectively plating the exposed parts of the transparent conductor layer with a metallic layer.

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