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Integrated light sensors with back reflectors for increased quantum efficiency

  • US 6,498,336 B1
  • Filed: 11/15/2000
  • Issued: 12/24/2002
  • Est. Priority Date: 11/15/2000
  • Status: Expired due to Term
First Claim
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1. A light sensor comprising:

  • a light-sensing element formed on a substrate, the light-sensing element designed to generate an electrical signal in response to incident light absorbed within the light-sensing element; and

    a light-reflecting element positioned in relation to the light-sensing element to reflect light transmitted through the light-sensing element back towards the light-sensing element to increase an effective quantum efficiency of the light-sensing element, wherein;

    the light-reflecting element is an integrated light-reflecting region formed on or within the substrate; and

    the substrate comprises silicon and the light-reflecting region comprises a silicon oxide, wherein light is reflected from an interface between the silicon and the silicon oxide; and

    wherein an integrated light-reflecting vertical via structure formed between the light-sensing element and the light-reflecting region to help direct the reflected light back towards the light-sensing element, while helping to block stray light corresponding to other light-sensing elements in the sensor.

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