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Method and apparatus for differential illumination image-capturing and defect handling

  • US 6,498,867 B1
  • Filed: 10/10/2000
  • Issued: 12/24/2002
  • Est. Priority Date: 10/08/1999
  • Status: Expired due to Term
First Claim
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1. An imaging system comprising:

  • a first light source operable to illuminate an image plane in a first direction;

    a second light source operable to illuminate the image plane from a second direction;

    a third light source operable to illuminate the image plane;

    a sensing device operable to detect light from the first light source, the second light source, and the third light source that interacted with and impinges the image plane; and

    , a processor operable to receive information from the sensing device and determine an image and image defects.

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