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Defect diagnosis method and defect diagnosis apparatus

  • US 6,498,992 B1
  • Filed: 04/13/1999
  • Issued: 12/24/2002
  • Est. Priority Date: 12/04/1998
  • Status: Expired due to Fees
First Claim
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1. A method for diagnosis of a defect of an object to be inspected, comprising:

  • detecting a measured signal being generated by said object to be inspected;

    expanding orthogonally an amplitude probability density function of a wave-form of the obtained measured signal in a Gram-Charlier series; and

    calculating the Gram-Charlier series so as to make diagnosis of the defect in the object to be inspected.

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