Polarization independent grating modulator

• US 6,501,600 B1
• Filed: 04/13/2000
• Issued: 12/31/2002
• Est. Priority Date: 08/11/1999
• Status: Expired due to Term

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: Lightconnect, Inc. (Lumentum Holdings Inc.)
• Inventors: Bloom, David M., Godil, Asif A., Honer, Kenneth A., Chui, Benjamin Wai-ho
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): THOMPSON, TIMOTHY J
• Application Number:
  US09/548,788
• Time in Patent Office: 992 Days
• Field of Search: 385/140, 359/558, 359/569, 359/566, 359/573, 359/572, 359/290, 359/291
• US Class Current: 359/569
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements
• CPC Class Codes: G02B 5/1828 having means for producing variable diffraction controlling the direction of light by means of one or more diffracting elements G02B26/0808; acousto-optical elements G02F1/11, G02F1/33; electro- or magneto-optical diffraction G02F1/292, G02F1/2955
• CPC Class Codes: G02B 6/266 the optical element being an attenuator
• CPC Class Codes: G02B 6/2793 Controlling polarisation dependent loss, e.g. polarisation insensitivity, reducing the change in polarisation degree of the output light even if the input polarisation state fluctuates
• CPC Class Codes: G02B 6/3516 the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3594 Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
• CPC Class Codes: H01S 5/005 Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping H01S5/026, H01S5/18388 take precedence

Abstract

A fiber-optic modulator based on a micromachined grating device which is both polarization independent and achromatic in behavior is described. The device is a two dimensional grating or periodic structure which is symmetric in the X and Y axes. It is comprised of a membrane with holes cut in it that moves downward with the application of a voltage which starts diffracting light. The hole region may have a raised island to provide achromatic behavior.

Claims

1. A controllable diffractive element, comprising:

a substrate with at least a portion being substantially reflective;

a membrane with with a front surface, a back surface, the membrane including a plurality of first apertures extending from the front to the back surface, at least a portion of the front surface being substantially reflective, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned sufficiently symmetrically along the X and Y axes to provide diffraction of the light incident on the membrane and substrate that is selectably independent of a polarization state of the light incident on the membrane and substrate; and

at least one anchor coupling the membrane and the substrate at a first distance in a passive state, wherein in an active state an application of a force to the membrane modifies the first distance and provides a controllable diffraction of light that is incident on the substrate and the membrane.

2. The diffractive element of claim 1, wherein the positioning of the plurality of first apertures is symmetric along the X and Y axes.

3. A two-dimensional controllable diffractive element, comprising:

a substrate with at least a portion being substantially reflective;

a plurality of islands coupled to the substrate, at least a portion of the plurality of islands being substantially reflective;

a membrane with a front surface, a back surface, the membrane including a plurality of first apertures extending from the front to the back surface, each of an island corresponding to a first aperture, at least a portion of the front surface being substantially reflective;

at least one anchor coupling the membrane and the substrate at a first distance in a passive state, wherein in an active state an application of a force to the membrane modifies the first distance and provides a controllable diffraction of light that is incident on the substrate and the membrane.

4. The diffractive element of claim 3, wherein the force is an electrostatic force.

5. The diffractive element of claim 4, wherein the electrostatic force is generated by an applied voltage.

6. The diffractive element of claim 5, wherein the voltage includes an alternating current component.

7. The diffractive element of claim 3, wherein at least a portion of the plurality of islands are integrally formed with at least a portion of the substrate.

8. The diffractive element of claim 3, wherein all of the plurality of islands are integrally formed with the substrate.

9. The diffractive element of claim 3, wherein at least a portion of the plurality of islands are applied to at least a portion of the substrate.

10. The diffractive element of claim 3, wherein all of the plurality of islands are applied to the substrate.

11. The diffractive element of claim 3, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned to provide diffraction of the light incident on the membrane and substrate that is selectably independent of a polarization state of the light incident on the membrane and substrate.

12. The diffractive element of claim 3, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned sufficiently symmetrically along the X and Y axes to provide diffraction of the light incident on the membrane and substrate that is selectably independent of a polarization state of the light incident on the membrane and substrate.

13. The diffractive element of claim 12, wherein the positioning of the plurality of first apertures is symmetric along the X and Y axes.

14. The diffractive element of claim 3, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned sufficiently periodically along the X and Y axes to provide a controllable diffraction of the light incident on the membrane and substrate with a desired magnitude.

15. The diffractive element of claim 12, wherein positioning of the plurality of first apertures is periodic along the X and Y axes.

16. A two-dimensional controllable diffractive element, comprising:

a substrate with at least a portion being substantially reflective;

a plurality of islands coupled to the substrate, the plurality of islands having a total illuminated surface area of A_i, at least a portion of the plurality of islands being substantially reflective;

a membrane with a front surface, a back surface, the membrane including a plurality of first apertures extending from the front to the back surface, each of an island corresponding to a first aperture, the plurality of first apertures having a total illuminated surface area of A_a, and the membrane having a total illuminated surface area A_m, with A_m not including A_a, and an illuminated surface area A_d defined as A_a minus A_i, at least a portion of the first surface being substantially reflective; and

at least one anchor coupling the membrane and the substrate at a first distance in a passive state, wherein in an active state an application of a force to the membrane modifies the first distance and provides a controllable diffraction of light that is incident on the substrate and the membrane; and

wherein the magnitudes of the illuminated surface areas Am, A_i, and A_d and the ratios of the areas A_m, A_i, and A_d are selected to provide a substantially achromatic diffraction of the diffractive element over a wavelength range of light that illuminates the diffractive element.

17. The diffractive element of claim 16, wherein the membrane includes a plurality of second apertures utilized for the processing of the diffractive element, and the illuminated surface area of the plurality of second apertures is defined as A2_a.

18. The diffractive element of claim 17, wherein the illuminated surface area A_d is defined as A2_a plus A_a minus A_i.

19. The diffractive element of claim 16 wherein the force is an electrostatic force.

20. The diffractive element of claim 19 wherein the electrostatic force is generated by an applied voltage.

21. The diffractive element of claim 20 wherein the voltage includes an alternating current component.

22. The diffractive element of claim 16, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned to provide diffraction of the light incident on the membrane and substrate that is selectably independent of a polarization state of the light incident on the membrane and substrate.

23. The diffractive element of claim 16, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned sufficiently symmetrically along the X and Y axes to provide diffraction of the light incident on the membrane and substrate that is selectably independent of a polarization state of the light incident on the membrane and substrate.

24. The diffractive element of claim 23 wherein the positioning of the plurality of first apertures is symmetric along the X and Y axes.

25. The diffractive element of claim 16, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned sufficiently periodically along the X and Y axes to provide a controllable diffraction of the light incident on the membrane and substrate with a desired magnitude.

26. The diffractive element of claim 24, wherein positioning of the plurality of first apertures is periodic along the X and Y axes.

27. The diffractive element of claim 16, wherein at least a portion of the plurality of islands are integrally formed with at least a portion of the substrate.

28. The diffractive element of claim 16, wherein all of the plurality of islands are integrally formed with the substrate.

29. The diffractive element of claim 16, wherein at least a portion of the plurality of islands are applied to at least a portion of the substrate.

30. The diffractive element of claim 16, wherein all of the plurality of islands are applied to the substrate.

31. The diffractive element of claim 16, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned to provide diffraction of the light incident on the membrane and substrate that is selectably independent of a polarization state of the light incident on the membrane and substrate.

32. The diffractive element of claim 16, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned sufficiently symmetrically along the X and Y axes to provide diffraction of the light incident on the membrane and substrate that is selectably independent of a polarization state of the light incident on the membrane and substrate.

33. The diffractive element of claim 32, wherein the positioning of the plurality of first apertures is symmetric along the X and Y axes.

34. The diffractive element of claim 16, wherein the membrane has an X axis and a Y axis defining a membrane plane, the plurality of first apertures being positioned sufficiently periodically along the X and Y axes to provide a controllable diffraction of the light incident on the membrane and substrate with a desired magnitude.

35. The diffractive element of claim 33, wherein positioning of the plurality of first apertures is periodic along the X and Y axes.

36. The diffractive element of claim 16, wherein the first distance is mλ

/2 beneath the membrane, wherein m is an integer and λ

is a center wavelength of the light that illuminates the diffractive element.

37. The element of claim 16, wherein illuminated surface area A_d is 1/(2N) times the area of the illuminated surface area A_m, where N is an integer.

38. A fiber optic component, comprising:

an input optical fiber capable of carrying an optical beam, the input optical fiber having an input optical fiber longitudinal axis and an input optical fiber endface;

a lens optically coupled to the input optical fiber, the lens capable of collimating the optical beam from the input optical fiber, the lens having an optical axis and an input focal plane and an output focal plane;

an output optical fiber optically coupled to the lens, the output optical fiber having an output optical fiber longitudinal axis and an output optical fiber endface; and

a controllable diffractive element optically coupled to the lens, the controllable diffractive element capable of controllably reflecting substantially none to substantially all of the optical beam from the input optical fiber through the lens, back through the lens and into the output optical fiber, the controllable diffractive element capable of modifying at least one characteristic of the optical beam, the controllable diffractive element having an at least one reflective surface, wherein the controllable diffractive element comprises

a substrate

a plurality of islands coupled to the substrate, the plurality of islands having a total illuminated surface area of A₁;

a membrane with a front surface, a back surface, the membrane including a plurality of first apertures extending from the front to the back surface, each of an island corresponding to a first aperture, the plurality of first apertures having a total illuminated surface are of A₁, and the membrane having a total illuminated surface are A_m, with A_m not including A_a, and an illuminated surface area A_d defined as A_a minus A_i, and

at least one anchor coupling the membrane and the substrate at a first distance in a passive state, wherein in an active state an application of a force to the membrane modifies the first distance and provides a controllable diffraction of light that is incident on the substrate and the membrane, and wherein the magnitudes of the illuminated surface areas A_m, A_i, and A_d and the ratios of the areas A_m, A_i, and A_d are selected to provide a substantially achromatic diffraction element over a wavelength range of light that illuminates the diffractive element.