Integrated platen assembly for a chemical mechanical planarization system

• US 6,503,131 B1
• Filed: 08/16/2001
• Issued: 01/07/2003
• Est. Priority Date: 08/16/2001
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Marohl, Dan A., Franklin, Timothy J.
• Primary Examiner(s): Nguyen, George
• Assistant Examiner(s): NGUYEN, DUNG V
• Application Number:
  US09/931,156
• Time in Patent Office: 509 Days
• Field of Search: 451/296, 451/168, 451/388, 451/41, 451/456, 451/297, 451/301, 451/299, 451/355
• US Class Current: 451/296
• CPC Class Codes: B24B 21/04 for grinding plane surfaces
• CPC Class Codes: B24B 21/20 for controlling or adjusting the tracking or the tension of the grinding belt
• CPC Class Codes: B24B 37/16 characterised by the shape of the lapping plate surface, e.g. grooved
• CPC Class Codes: B24B 9/10 of plate glass

Abstract

Generally, a method and apparatus for supporting a web of polishing material. In one embodiment, the apparatus includes a platen and a blocker valve. The platen includes a support surface adapted to support the polishing material and a port fluidly coupled to the support surface. A housing that includes a supply port and an exit port has a venturi body disposed therein. The blocker valve has a first state whereby a flow through the housing and blocker valve causes vacuum to be drawn through the port disposed in the platen by the venturi body. In another embodiment, the flow through the venturi may be reversed by changing the state of the blocker valve to blow air through the port disposed in the platen, thereby placing the polishing material and the support surface of the platen in a spaced-apart relation.

Claims

1. Apparatus for supporting a polishing material:

a platen having a support surface adapted to support the polishing material;

a port disposed in the platen and fluidly coupled to the support surface;

a housing having a supply port, a second port and an exit port, the second port fluidly coupled to the port disposed in the platen;

a venturi body disposed in the housing, the venturi body having first aperture fluidly coupled to the second port and a second aperture disposed proximate the exit port; and

a blocker valve fluidly coupled between the exit port and an exhaust port, the blocker valve having a first state whereby flow through the housing and blocker valve causes vacuum to be drawn through the port disposed in the platen by the venturi body.

2. The apparatus of claim 1, wherein the blocker valve has a second state that directs flow from the supply port through the venturi body.

3. The apparatus of claim 1 further comprising:

a water trap disposed between the second port of the housing and the port disposed in the platen.

4. The apparatus of claim 3, wherein the water trap further comprises a drain port fluidly coupled to the exhaust port.

5. The apparatus of claim 4 further comprising a shut off valve disposed between the drain port and the exhaust port.

6. The apparatus of claim 5, wherein the blocker valve has a second state that directs flow from the supply port through the venturi body, the redirected flow exiting the port disposed in the platen;

and

wherein the shut off valve is selectively set to divert a portion of the redirected flow out the drain port to the exhaust port.

7. The apparatus of claim 1, wherein the housing is coupled to the platen.

8. The apparatus of claim 1, wherein the polishing material is a web.

9. The apparatus of claim 8, wherein the platen further comprises:

a first motor coupled to a first side of the platen and adapted to drive a supply roll having a first portion of the web disposed thereon;

a second motor coupled to a second side of the platen and adapted to drive a take-up roll having a second portion of the web disposed thereon; and

a torque sensor coupled to the first and/or second motor.

10. The apparatus of claim 9, wherein the platen further comprises:

a sensor coupled thereto and adapted to determine a diameter of the supply or take-up roll having the torque sensor coupled thereto.

11. The apparatus of claim 10, wherein the platen further comprises:

a brake adapted to control rotation of the second motor.

12. Apparatus for supporting a polishing material:

a platen having a support surface adapted to support the polishing material;

a port disposed in the platen and fluidly coupled to the support surface;

a housing having a supply port, second port and an exit port, the second port fluidly coupled to the port disposed in the platen;

a venturi body disposed in the housing, the venturi body having first aperture fluidly coupled to the second port of the housing and a second aperture disposed proximate the exit port;

a water trap disposed between the first port of the housing and the port disposed in the platen; and

a blocker valve fluidly coupled between the exit port and an exhaust port, the blocker valve having a first state whereby flow through the housing and blocker valve causes vacuum to be drawn through the port disposed in the platen by the venturi body and a second state that directs flow from the supply port through the venturi body.

13. The apparatus of claim 12, wherein the water trap further comprises a drain port fluidly coupled to the exhaust port.

14. The apparatus of claim 13 further comprising a shut off valve disposed between the drain port and the exhaust port.

15. The apparatus of claim 14, wherein the shut off valve is selectively set to divert a portion of the redirected flow out the drain port to the exhaust port.

16. The apparatus of claim 12, wherein the housing is coupled to the platen.

17. The apparatus of claim 12, wherein the polishing material is a web.

18. The apparatus of claim 17, wherein the platen further comprises:

a first motor coupled to a first side of the platen and adapted to drive a supply roll having a first portion of the web disposed thereon;

a second motor coupled to a second side of the platen and adapted to drive a take-up roll having a second portion of the web disposed thereon; and

a torque sensor coupled to the first and/or second motor.

19. The apparatus of claim 18, wherein the platen further comprises:

a sensor coupled thereto and adapted to determine a diameter of the supply or take-up roll having the torque sensor coupled thereto.

20. Apparatus for supporting a polishing material:

a platen having a support surface adapted to support the polishing material;

a port disposed in the platen and fluidly coupled to the support surface;

a housing coupled to the platen, the housing having a supply port, a second port and an exit port, the second port coupled to the port disposed in the platen;

a venturi body disposed in the housing, the venturi body having first aperture fluidly coupled to the second port and a second aperture disposed proximate the exit port;

a water trap disposed between the first aperture of the venturi body and the port disposed in the platen, the water trap having a drain port;

a blocker valve fluidly coupled between the exit port and an exhaust port, the blocker valve having a first state whereby flow through the housing and blocker valve causes vacuum to be drawn through the port disposed in the platen by the venturi body and a second state that directs flow from the supply port through the venturi body; and

a shut off valve disposed between the drain port and the exhaust port.

21. The apparatus of claim 20, wherein the shut off valve is selectively set to divert a portion of the redirected flow out the drain port to the exhaust port.

22. The apparatus of claim 20, wherein the polishing material is a web.

23. The apparatus of claim 22, wherein the platen further comprises:

a first motor coupled to a first side of the platen and adapted to drive a supply roll having a first portion of the web disposed thereon;

a second motor coupled to a second side of the platen and adapted to drive a take-up roll having a second portion of the web disposed thereon; and

a torque sensor coupled to the first and/or second motor.

24. The apparatus of claim 23, wherein the platen further comprises:

a sensor coupled thereto and adapted to determine a diameter of the supply or take-up roll having the torque sensor coupled thereto.

25. The apparatus of claim 24, wherein the platen further comprises:

a brake adapted to control rotation of the second motor.

26. A method for supporting a polishing material, comprising:

providing a polishing material disposed on a platen;

generating a vacuum between the polishing material and the platen by flowing a fluid through a venturi in a first direction; and

removing the vacuum between the polishing material and the platen by flowing the fluid through the venturi in a second direction.

27. The method of claim 26, wherein the step of generating the vacuum further comprises:

separating contaminants drawn through a port disposed in the platen by the vacuum.

28. The method of claim 27, wherein the step of separating contaminants further comprises:

collecting the separated contaminants in a water trap.

29. The method of claim 28, wherein the step of removing the vacuum further comprises:

moving the collected contaminants while preventing the contaminants from passing through the port disposed in the platen.

30. The method of claim 29, wherein the step of removing the vacuum further comprises:

moving the separated contaminants from the water trap to an exhaust port.

31. The method of claim 26, wherein the step of removing the vacuum further comprises:

blocking an exhaust port of the venuri.

32. The method of claim 31, wherein the step of blocking the exhaust port further comprises:

diverting fluid from flowing an inlet port through the venturi in the second direction;

blowing the diverted fluid from the venturi through a port disposed in the platen; and

lifting the polishing material from the platen with the blown fluid.

33. The method of claim 32, further comprising:

opening a fluid path between the vacuum port and an exhaust port, whereby a portion of the blown fluid passes through the fluid path to the exhaust port.

34. The method of claim 33, wherein the step of opening the fluid path further comprise:

driving contaminants collected in between the port disposed in the platen and the vacuum port out the exhaust port.

35. A method for supporting a polishing material, comprising:

providing a polishing material disposed on a platen;

generating a vacuum between a polishing material and a platen by flowing a fluid through a venturi in a first direction through an exit port;

actuating a valve closing the exit port and reversing the flow direction of the fluid through the venturi; and

blowing the reversed flowing fluid between the polishing material and the platen.

36. The method of claim 35, wherein the step of generating the vacuum further comprises:

collecting contaminants drawn through a port disposed in the platen by the vacuum in a water trap.

37. The method of claim 36, wherein the step of removing the vacuum further comprises:

moving the separated contaminants from the water trap to an exhaust port.

38. The method of claim 37, wherein the step of moving further comprises:

opening a fluid path between the water trap and an exhaust port, whereby a portion of the blown fluid passes through the fluid path to the exhaust port.

39. A method for supporting a polishing material, comprising:

providing a polishing material disposed on a platen;

generating a vacuum between the polishing material and the platen by flowing a fluid through a venturi in a first direction through an exit port;

actuating a valve closing the exit port and reversing the flow direction of the fluid through the venturi; and

blowing the reversed flow fluid between the polishing material and the platen.

40. A method for supporting a polished material, comprising:

providing a polishing material disposed on a platen;

generating a vacuum between the polishing material and the platen by flowing a fluid through a venturi in a first direction through an exit port;

actuating a valve closing the exit port and reversing the flow direction of the fluid through the venturi;

blowing the reverse flow fluid between the polishing material and the platen;

separating contaminants drawn through a port disposed in the platen by the vacuum in a water trap; and

opening a fluid path between the water trap and the exit port, whereby a portion of the blown fluid passes through the fluid path to the exit port.