Substrate support having bonded sections and method

• US 6,503,368 B1
• Filed: 06/29/2000
• Issued: 01/07/2003
• Est. Priority Date: 06/29/2000
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Wang, You, Kholodenko, Arnold, Shamouilian, Shamouil, Cheng, Wing L., Veytser, Alexander M., Parkhe, Vijay
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US09/607,533
• Time in Patent Office: 922 Days
• Field of Search: 118/728, 118/500, 118/723.E, 118/723.I, 118/723.MW, 156/345.41, 156/345.43, 156/345.48, 156/345.51, 156/345.52, 156/345.53, 361/234, 279/128
• US Class Current: 156/345.51
• CPC Class Codes: C23C 16/4581 characterised by material of construction or surface finish of the means for supporting the substrate
• CPC Class Codes: C23C 16/4586 Elements in the interior of the support, e.g. electrodes, heating or cooling devices
• CPC Class Codes: H01J 2237/2001 Maintaining constant desired temperature
• CPC Class Codes: H01L 21/67103 mainly by conduction

Abstract

A substrate support 55 comprises first, second and third sections 88, 90, 92 connected to one another by first and second bonds 106, 108, one of the sections comprises a surface 75 adapted to receive a substrate 25. The first bond 106 comprises a first bonding material and the second bond 108 comprises a second bonding material. In one version, the first bonding material is capable of bonding surfaces when heated to a first temperature and the second bonding material is capable of bonding surfaces when heated to a second temperature.

Claims

1. A support capable of supporting a substrate in a chamber, the support comprising:

a plurality of sections that are joined to one another or to the chamber, at least one of the sections comprising a surface adapted to receive a substrate, and

first and second bonds between the sections or between a section and the chamber, the first bond comprising a first bonding material and the second bond comprising a second bonding material.

2. A support according to claim 1 wherein the first bonding material is capable of forming a bond when heated to a first temperature and the second bonding material is capable of forming a bond when heated to a second temperature.

3. A support according to claim 1 wherein the first or second bond comprises one or more of indium, lead, magnesium, tin, aluminum or their alloys.

4. A support according to claim 1 wherein the first or second bond comprises a polymer.

5. A support according to claim 1 wherein the first or second bond comprises one or more of copper, iron, molybdenum, titanium, tungsten or their alloys.

6. A support according to claim 1 wherein the first or second bond comprises a bonding material capable of forming a bond when heated to at least about 600°

C.

7. A support according to claim 1 wherein the first or second bond comprises a bonding material capable of forming a bond when heated to less than about 500°

C.

8. A support according to claim 1 wherein the first bond comprises a bonding material capable of forming a bond when heated to at least about 600°

C., and the second bond comprises a bonding material capable of forming a bond when heated to less than about 500°

C.

9. A support according to claim 1 wherein the plurality of sections comprise first and second sections and wherein the first bond is between the first section and the second section.

10. A support according to claim 9 wherein the plurality of sections comprise a third section, and wherein the second bond is between the second section and the third section.

11. A support according to claim 9 wherein the second bond is between the second section and the chamber.

12. A support according to claim 1 wherein the first or second sections comprise one or more of aluminum oxide, aluminum nitride, boron nitride, boron carbide, carbon, cordierite, mullite, silicon, silicon carbide, silicon nitride, silicon oxide, titanium oxide, zirconium oxide, or mixtures and compounds thereof.

13. A substrate processing apparatus comprising:

is a chamber having a substrate support comprising a plurality of sections, at least one of the sections comprising a surface adapted to receive a substrate, and these sections being joined to one another or to the chamber by first and second bonds,

wherein the first bond comprises a first bonding material and the second bond comprises a second bonding material;

a gas distributor;

a gas energizer; and

a gas exhaust,

whereby a substrate received on the support may be processed by gas introduced through the gas distributor, energized by the gas energizer, and exhausted by the gas exhaust.

14. An apparatus according to claim 13 wherein the first bonding material is capable of forming a bond when heated to a first temperature and the second bonding material is capable of forming a bond when heated to a second temperature.

15. A substrate support comprising:

a first, second, and third section, the first section comprising a surface adapted to receive a substrate;

a first bond between the first and second sections and a second bond between the second and third sections,

wherein the first bond comprises a first bonding material capable of forming a bond when heated to a first temperature and the second bond comprises a second bonding material capable of forming a bond when heated to a second temperature.

16. A support according to claim 15 wherein the first or second bond comprises one or more of indium, lead, magnesium, tin, aluminum or their alloys.

17. A support according to claim 15 wherein the first or second bond comprises a polymer.

18. A support according to claim 15 wherein the first or second bond comprises one or more of copper, iron, molybdenum, titanium, tungsten or their alloys.

19. A support according to claim 15 wherein the first bond comprises a bonding material capable of forming a bond when heated to a first temperature of at least about 600°

C.

20. A support according to claim 15 wherein the second bond comprises a bonding material capable of bonding the sections to one another when heated to a second temperature of less than about 500°

C.

21. A support according to claim 15 wherein the sections are stacked.

22. A support according to claim 15 wherein the third section is joined to a chamber wall.