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Microelectro-mechanical high resolution current sensing apparatus

  • US 6,504,356 B2
  • Filed: 09/18/2001
  • Issued: 01/07/2003
  • Est. Priority Date: 09/28/1999
  • Status: Expired due to Term
First Claim
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1. A current sensor comprising:

  • a magnetic field source for generating a magnetic field;

    a current sensing system having a sensing element, the sensing element disposed in the magnetic field, configured to receive a current to be sensed, and being deflectable under the influence of the magnetic field and the current; and

    a feedback element coupled to the current sensing system and configured to produce a signal representative of deflection of the sensing element.

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