Microelectro-mechanical high resolution current sensing apparatus
First Claim
1. A current sensor comprising:
- a magnetic field source for generating a magnetic field;
a current sensing system having a sensing element, the sensing element disposed in the magnetic field, configured to receive a current to be sensed, and being deflectable under the influence of the magnetic field and the current; and
a feedback element coupled to the current sensing system and configured to produce a signal representative of deflection of the sensing element.
0 Assignments
0 Petitions
Accused Products
Abstract
A current sensor includes a deflectable member disposed in a magnetic field. Nulling or compensating members may be mechanically coupled to the deflectable member. Feedback or readout devices coupled to the structure provide signals indicative of deflection of the deflectable member under the influence of applied current and the magnetic field. Nulling current applied to the nulling members tends to oppose deflection of the deflectable member. The nulling current may be modulated to drive the feedback signal to a desired level and is used as a basis for calculating the current to be measured. The current may be measured directly upon calibration of feedback devices coupled to the deflectable member or to the nulling members. Arrays of sensors may be coupled to common busses for applying measured and nulling currents to sensors of the arrays and for detecting feedback signals.
-
Citations
20 Claims
-
1. A current sensor comprising:
-
a magnetic field source for generating a magnetic field;
a current sensing system having a sensing element, the sensing element disposed in the magnetic field, configured to receive a current to be sensed, and being deflectable under the influence of the magnetic field and the current; and
a feedback element coupled to the current sensing system and configured to produce a signal representative of deflection of the sensing element. - View Dependent Claims (2, 3, 4, 5)
-
-
6. A current sensor comprising:
-
a magnetic base for producing a magnetic field;
a micromachined current sensing system disposed within the magnetic field and configured to receive a current to be measured and to deflect a sensing member under the influence of the current and the magnetic field; and
a readout device coupled to the sensing system for determining deflection of the sensing member. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13)
-
-
14. A current sensor comprising:
-
a substrate including a magnetic field source;
a device layer disposed over the substrate and forming a deflectable current sensing structure, a readout device, the device layer including at least a conductive layer forming conductive paths on the sensing structure and conductive regions on the readout device; and
a support layer disposed between the device layer and the substrate, the support layer bounding a cavity between the device layer and the substrate to support the sensing structure and the readout device while allowing deflection of the sensing structure under the influence of a measured current and a magnetic field from the field source. - View Dependent Claims (15, 16, 17, 18, 19, 20)
-
Specification