Sensor for eddy current testing and method of use thereof

• US 6,504,363 B1
• Filed: 03/07/2000
• Issued: 01/07/2003
• Est. Priority Date: 03/07/2000
• Status: Active Grant

• Current Assignee: Stuart T. Smith, Teodor Dogaru
• Original Assignee: Stuart T. Smith, Teodor Dogaru
• Inventors: Smith, Stuart T., Dogaru, Teodor
• Primary Examiner(s): Snow, Walter E.
• Application Number:
  US09/521,540
• Time in Patent Office: 1,036 Days
• Field of Search: 324/235, 324/238, 324/240, 324/242, 324/252, 338/32.R
• US Class Current: 324/235
• CPC Class Codes: G01N 27/9006 Details, e.g. in the structure or functioning of sensors

Abstract

A giant magnetoresistive (GMR) based eddy current sensor including a giant magnetoresistive sensor integrated on a silicon chip with a signal conditioning circuit and a circular coil.

Claims

1. An eddy current sensor, comprising:

a) a giant magnetoresistive sensor having a sensing plane and a sensing direction within said sensing plane; and

b) a rotationally symmetric flat pancake-type coil having an axis of symmetry, wherein said giant magnetoresistive sensor is centered at the axis of symmetry of the coil, with the sensing plane and sensing direction being perpendicular to the axis of symmetry of the coil, and wherein said coil is placed between the giant magnetoresistive sensor and a specimen.

2. The eddy current sensor according to claim 1, having a number of layers that is a multiple of two.

3. The eddy current sensor according to claim 1, wherein the pancake type coil and the giant magnetoresistive sensor are deposited on the same substrate.

4. The eddy current sensor according to claim 3, wherein the substrate is silicon.

5. The eddy current sensor according to claim 1, wherein the eddy current sensor further comprises a signal conditioning circuit comprising a differential amplifier and a low pass filter.

6. The eddy current sensor according to claim 1, wherein the giant magnetoresistive sensor is self-rectifying, to simplify signal conditioning circuitry.

7. The eddy current sensor according to claim 1, wherein the sensor has a broad bandwidth enabling a large range of excitation frequencies, in turn enabling variation of skin depth on the surface for measurement of defects of varying depth or of sub-surface defects.

8. The eddy current sensor according to claim 1, wherein the eddy current sensor is produced in a configuration so that the component of the magnetic field in the direction of the sensitive plane, parallel to the surface of the specimen, can be measured.

15. An apparatus comprising the eddy current sensor according to claim 4, a signal conditioning circuit comprising a differential amplifier and a low pass filter, wherein at least some of the apparatus is integrated on the silicon substrate.

17. A method for detecting anomalies and features such as cracks in a specimen surface, comprising:

a) providing an eddy current sensor according to claim 1;

b) orienting the sensitive plane of the giant magnetoresistive sensor parallel to the specimen surface;

c) passing an alternating current through the coil placed adjacent to the specimen surface, said coil placed with its axis of symmetry perpendicular to the surface, to induce circulating currents in the specimen surface plane; and

d) utilizing said probe to scan the surface to produce an output signal that enables detection of said anomalies and features.

18. A method according to claim 17, further comprising determining the location and length of a detected crack by orienting the sensitive direction of the sensor perpendicular to the crack.

19. The method according to claim 17, wherein the coil and the giant magnetoresistive sensor are deposited on the same substrate.

9. A method for detecting anomalies such as cracks at the edge of a specimen, comprising:

a) providing an eddy current probe comprising a giant magnetoresistive sensor having a sensing plane and a sensing direction within said sensing plane, and a rotationally symmetric coil having an axis of symmetry, wherein said giant magnetoresistive sensor is centered at the axis of symmetry of the coil, with the sensing plane and sensing direction perpendicular to the axis of symmetry of the coil;

b) orienting the sensitive plane of the giant magnetoresistive sensor parallel to the specimen surface;

c) orienting the sensing direction of the sensor parallel to said edge of the specimen, so that the output signal is insensistive to said edge, but so that perturbations of eddy currents due to the presence of cracks at said edge are monitored by the probe;

d) passing an alternating current through the coil placed adjacent to the specimen surface, said coil placed with its axis of symmetry perpendicular to the specimen surface, to induce circulating currents in the specimen surface plane; and

e) utilizing said probe to scan the surface in a region including said edge to produce an output signal that enables detection of said anomalies.

10. The method according to claim 9, wherein the coil is a flat pancake type coil located between the giant magnetoresistive sensor and the specimen surface.

11. The method according to claim 10, wherein the pancake type coil and the giant magnetoresistive sensor are deposited on the same substrate.

12. The method according to claim 9, wherein the eddy current sensor comprises a signal conditioning circuit comprising a differential amplifier and a low pass filter.

13. The method according to claim 9, wherein the sensor has a broad bandwidth enabling a large range of excitation frequencies, in turn enabling variation of skin depth on the surface for measurement of defects of varying depth or of sub-surface defects.

14. The method according to claim 9, wherein the eddy current sensor is produced in a configuration so that the component of the magnetic field in the direction of the sensitive axis, parallel to the surface of the specimen, can be measured.

16. The method according to claim 9, wherein the coil is a circular cylinder surrounding the giant magnetoresistive sensor, and wherein the giant magnetoresistive sensor is placed as near to the specimen surface as is practical.