Magnetic force microscope

• US 6,504,365 B2
• Filed: 09/27/2001
• Issued: 01/07/2003
• Est. Priority Date: 09/29/2000
• Status: Expired due to Fees

• Current Assignee: JEOL Limited
• Original Assignee: JEOL Limited
• Inventors: Kitamura, Shinichi
• Primary Examiner(s): PATIDAR, JAY M
• Application Number:
  US09/966,342
• Publication Number:
  US 20020097046A1
• Time in Patent Office: 467 Days
• Field of Search: 324/244, 324/260, 324/228, 324/244.1, 324/259, 250/306, 250/307, 731/05
• US Class Current: 324/244
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 30/16 Vacuum environment
• CPC Class Codes: G01Q 60/08 MFM [Magnetic Force Microscopy] combined with AFM [Atomic Force Microscopy
• CPC Class Codes: G01R 33/0385 in relation with magnetic force measurements magnetic force microscopes G01Q60/50
• CPC Class Codes: Y10S 977/865 Magnetic force probe

Abstract

A magnetic force microscope capable of producing a topographic image containing no magnetic information. In the topographic imaging mode, an error amplifier controls the distance between a cantilever and the sample to cause the oscillation frequency of the cantilever to shift from f₀ to f₁, for causing a probe to tap each observation position (x_i, y_j) on the sample. According to the results of the control, topographic information in the observation position (x_i, y_j) is obtained. In the magnetic force imaging mode, the probe is placed on the observation position (x_i, y_j), and the distance between the cantilever and the sample is held to the distance used in the topographic imaging mode according to information stored in the memory. At this time, the amplitude of the cantilever is so adjusted that the probe does not tap the sample. Magnetic information about the observation position (x_i, y_j) on the sample is obtained based on the oscillation frequency of the cantilever at this time.

Claims

1. A magnetic force microscope comprising:

a magnetized cantilever having a supported end and a free end located on opposite sides;

a probe attached to said free end of said cantilever;

an oscillation means for exciting the cantilever into oscillation such that the cantilever oscillates at a given oscillation frequency of f₀ and with a given amplitude while the cantilever is at such a distance from a sample that no force is exerted between the cantilever and the sample;

a distance control means for controlling the distance between said cantilever and said sample to cause the oscillation frequency of the cantilever to shift from the oscillation frequency f₀ to f₁ wherein f₁ is less than f₀ (f₁<

f₀) so that the probe taps observation positions (x_i, y_j) on the sample;

a means for obtaining topographic information about the sample at the observation positions (x_i, y_j) on the sample, based on results of control provided by said distance control means;

a position-setting means for placing the probe in said observation positions (x_i, y_j) on the sample and maintaining the distance between said cantilever and said probe at a distance occurring when the topographic information is obtained;

an amplitude control means for controlling said oscillation means in such a way that the amplitude of the cantilever excited into oscillation by said oscillation means does not permit the probe to tap the sample when the probe has been placed in position on the sample by said position-setting means; and

a means for obtaining magnetic information about the sample in the observation positions (x_i, y_j) on the sample based on the oscillation frequency of the cantilever when the probe has been placed in position by said position-setting means and the cantilever is oscillating such that the probe does not tap the sample under control of said amplitude control means.

2. The magnetic force microscope of claim 1, wherein collection of said topographic information and collection of magnetic information are alternately performed for each pixel, for each line scan of the probe across the sample, or for each frame of scan of the probe across the sample.

3. The magnetic force microscope of claim 1 or 2, wherein said cantilever and sample are placed in a vacuum.

4. A magnetic force microscope comprising:

a magnetized cantilever having a supported end and a free end on opposite sides;

a probe attached to said free end of said cantilever;

a first oscillation means for exciting said cantilever into oscillation such that said cantilever oscillates at a given oscillation frequency of f₀ and with a given amplitude when said cantilever is spaced from a sample by such a distance that no force is exerted between the cantilever and the sample;

a second oscillation means for exciting said cantilever into oscillation such that the oscillation frequency of said cantilever is held at a given oscillation frequency f₀′

;

a selector means for selecting one of excitation of said first oscillation means and excitation of said second oscillation means applied to the cantilever;

a distance control means for controlling said selector means such that the cantilever is excited into oscillation by said first oscillation means and for controlling the distance between the cantilever and the sample to cause the oscillation frequency of said cantilever to shift from f₀ to f₁ wherein f₁ is less than f₀ (f₁<

f₀) so that said probe taps the observation positions (x_i, y_j) on the sample;

a topographic means for obtaining topographic information about the sample in the observation positions (x_i, y_j) on the sample based on results of control provided by said distance control means;

a position-setting means for placing said probe in the observation positions (x_i, y_j) on the sample and for maintaining the distance between said cantilever and said sample at a distance used on collection of said topographic information;

an amplitude control means for controlling said selector means to cause said second oscillation means to excite the cantilever into oscillation when the probe is placed in position on the sample by said position-setting means and for controlling said second oscillation means such that the amplitude of said cantilever under this condition does not permit said probe to tap the sample; and

a means for obtaining magnetic information about the sample in the observation positions (x_i, y_j) on the sample based on the phase difference between a signal indicating oscillation of the cantilever and the oscillation signal from said second oscillation means when the probe has been placed in position on the sample by said position-setting means and the cantilever is oscillating while said amplitude control means prevents the probe from tapping the sample.

5. The magnetic force microscope of claim 4, wherein collection of said topographic information and collection of magnetic information are alternately performed for each pixel, for each line scan of the probe across the sample, or for each frame of scan of the probe across the sample.

6. The magnetic force microscope of claim 4 or 5, wherein said cantilever and sample are placed in a vacuum.