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Structure for an optical switch on a substrate

  • US 6,504,643 B1
  • Filed: 09/28/2000
  • Issued: 01/07/2003
  • Est. Priority Date: 09/28/2000
  • Status: Expired due to Term
First Claim
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1. An actuatable mirror structure comprising:

  • a substrate;

    a plurality of suspension arms each comprising an internal stress gradient layer, each said plurality of suspension arms having a first end and a second end, said first end being attached to said substrate;

    a polysilicon area having a reflective surface layer, said polysilicon area being attached to said second end of said plurality of suspension arms;

    and a plurality of electrodes arranged on said substrate adjacent to said plurality of suspension arms to create an electric field for producing deflective movement of said polysilicon area having said reflective surface layer.

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