Method for removing substances from gases

• US 6,506,352 B1
• Filed: 07/20/2000
• Issued: 01/14/2003
• Est. Priority Date: 07/20/1999
• Status: Expired due to Term

• Current Assignee: ASM International NV
• Original Assignee: ASM Microchemistry Oy (ASM International NV)
• Inventors: Lindfors, Sven, Hyvarinen, Jaakko
• Primary Examiner(s): Silverman, Stanley S.
• Assistant Examiner(s): Johnson, Edward M.
• Application Number:
  US09/619,820
• Time in Patent Office: 908 Days
• Field of Search: 423/240.S, 423/240.R
• US Class Current: 423/240.00S
• CPC Class Codes: B01D 53/34 Chemical or biological purification of waste gases

Abstract

The present invention concerns a method and an apparatus for removing substances from gases discharged from gas phase reactors. In particular, the invention provides a method for removing substances contained in gases discharged from an ALD reaction process, comprising contacting the gases with a “sacrificial” material having a high surface area kept at essentially the same conditions as those prevailing during the gas phase reaction process. The sacrificial material is thus subjected to surface reactions with the substances contained in the gases to form a reaction product on the surface of the sacrificial material and to remove the substances from the gases. The present invention diminishes the amount of waste produced in the gas phase process and reduces wear on the equipment.

Claims

1. A method of depleting excess reactant from an exhaust flow, comprising:

reacting a first part of a gaseous reactant with at least one substrate within a primary reaction space, wherein said reacting comprises an atomic layer deposition (ALD) process;

exhausting an excess part of the gaseous reactant that has not reacted with said at least one substrate to a secondary reaction space downstream of the primary reaction space;

further reacting the excess part of the gaseous reactant with a material having a surface area between about 10 m²/g and 2000 m²/g, wherein said further reacting comprises an ALD process; and

exhausting by-product from reacting the first part of a gaseous material and from further reacting the excess part of the gaseous material from the secondary reaction space.

2. The method of claim 1, wherein reacting comprises a first reaction and further reacting comprises the same first reaction.

3. The method of claim 2, wherein the first reaction comprises depositing a layer.

4. The method of claim 3, wherein further reacting includes exposing the excess part of the reactant to the material along a serpentine path.

5. The method of claim 3, wherein reacting and further reacting each comprise alternately and sequentially pulsing at least a first reactant and a different second reactant.

6. The method of claim 5, wherein the first reactant comprises a halide.

7. The method of claim 6, wherein the first reactant comprises a metal chloride.

8. The method of claim 7, wherein the first reactant comprises AlCl₃.

9. The method of claim 5, wherein the second reactant comprises an oxidant.

10. The method of claim 9, wherein the second reactant comprises water.

11. The method of claim 1, wherein the material has a surface area between about 100 m²/g and 1500 m²/g.

12. The method of claim 1, further comprising maintaining the substrate and the material at substantially the same temperature and pressure conditions while reacting and further reacting.

13. The method of claim 1, wherein a temperature of each of the substrate and the material are maintained at between about 50°

C. and 600°

C. while reacting and further reacting.

14. The method of claim 1, wherein a temperature of each of the substrate and the material are maintained at between about 200°

C. and 500°

C. while reacting and further reacting.

15. The method of claim 1, further comprising subjecting each of the substrate and the material to a pressure between about 1 mbar and 100 mbar.

16. The method of claim 1, wherein the material comprises a porous material having an average pore size of about 10 μ

m to 100 μ

m.