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Reference bolometer and associated fabrication methods

  • US 6,507,021 B1
  • Filed: 11/15/2000
  • Issued: 01/14/2003
  • Est. Priority Date: 11/15/2000
  • Status: Expired due to Term
First Claim
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1. A reference bolometer disposed upon a substrate, the reference bolometer comprising:

  • a thermally conductive layer disposed over a portion of the substrate, said thermally conductive layer comprising a first surface opposite the substrate and a side surface extending between the first surface and the substrate;

    a protective coating over at least the side surface of said thermally conductive layer; and

    a detector element disposed over the first surface of said thermally conductive layer and at least a portion of said protective coating that is over the side surface of said thermally conductive layer such that said detector element is in thermal communication with the substrate via said thermally conductive layer.

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