Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement

• US 6,507,138 B1
• Filed: 07/11/2000
• Issued: 01/14/2003
• Est. Priority Date: 06/24/1999
• Status: Expired due to Term

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Miller, Samuel L., Rodgers, M. Steven
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): Perez, Guillermo
• Application Number:
  US09/615,008
• Time in Patent Office: 917 Days
• Field of Search: 310/308, 310/309, 310/40.MM, 310/313.B, 324/457, 322/2.A, 257/414, 318/116, 200/181
• US Class Current: 310/309
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.

Claims

1. An electrostatic actuator formed on a substrate and comprising a plurality of capacitively-coupled electrostatic plates including at least one row of fingerless stationary electrostatic plates formed on the substrate and oriented along a direction of movement of the electrostatic actuator;

and a row of moveable electrostatic plates formed on at least one side of each row of the stationary electrostatic plates, with the moveable electrostatic plates being suspended above the substrate by a rigid frame which supports a majority of the moveable electrostatic plates at or near a midpoint thereof, the frame further surrounding and enclosing each row of the stationary electrostatic plates.

2. The electrostatic actuator of claim 1 wherein the frame is suspended above the substrate by a plurality of springs, with each spring being attached at one end thereof to the frame and attached at the other end thereof to the substrate.

3. The electrostatic actuator of claim 1 wherein the frame is moveable over a range of 0-10 microns in response to a voltage applied between the stationary electrostatic plates and the moveable electrostatic plates.

4. The electrostatic actuator of claim 3 wherein the voltage is simultaneously applied between all the stationary electrostatic plates and all the moveable electrostatic plates.

5. The electrostatic actuator of claim 3 wherein the stationary electrodes are digitally addressed to provide the voltage between at least one set of the stationary electrostatic plates and the moveable electrostatic plates.

6. The electrostatic actuator of claim 1 wherein a longitudinal axis of the moveable electrostatic plates is oriented substantially perpendicular to the direction of movement.

7. The electrostatic actuator of claim 1 wherein a spacing between adjacent moveable electrostatic plates in each row of the moveable electrostatic plates is substantially equal to the spacing between adjacent stationary electrostatic plates in each row of the stationary electrostatic plates.

8. The electrostatic actuator of claim 1 wherein a spacing between each moveable electrostatic plate and an adjacent stationary electrostatic plate is substantially the same for all of the stationary and moveable electrostatic plates.

9. The electrostatic actuator of claim 1 wherein the frame comprises a plurality of layers of a deposited and patterned electrically-conductive material.

10. The electrostatic actuator of claim 9 wherein the electrically-conductive material comprises polycrystalline silicon.

11. The electrostatic actuator of claim 10 wherein the substrate comprises silicon.

12. The electrostatic actuator of claim 9 wherein the frame further includes a plurality of links for supporting the majority of the moveable electrostatic plates at the midpoint thereof.

13. The electrostatic actuator of claim 1 further including a ground plane on the substrate below each row of the moveable electrostatic plates.

14. The electrostatic actuator of claim 1 further including an electrostatic shield on the substrate between the frame and an adjacent stationary electrostatic plate.

15. An electrostatic actuator formed on a substrate and comprising:

(a) a plurality of moveable electrodes suspended above the substrate and arranged in at least one row oriented along a direction of movement of the electrostatic actuator;

(b) a rigid frame surrounding and supporting the moveable electrodes; and

(c) a plurality of fingerless stationary electrodes formed on the substrate in a row proximate to the row of moveable electrodes, the rows of stationary and moveable electrodes acting in response to a voltage applied therebetween to urge the frame to move along the direction of movement.

16. The electrostatic actuator of claim 15 wherein the frame is suspended above the substrate by a plurality of springs, with each spring being attached at one end thereof to the frame and attached at the other end thereof to the substrate.

17. The electrostatic actuator of claim 15 wherein all the stationary electrodes are electrically connected together, and all the moveable electrodes are electrically connected together.

18. The electrostatic actuator of claim 15 wherein the stationary electrodes are configured as sets of electrodes to provide for digital addressing of at least one set of the stationary electrodes with the applied voltage.

19. The electrostatic actuator of claim 15 wherein the stationary electrodes are independently addressable.

20. The electrostatic actuator of claim 15 wherein a spacing between each moveable electrode and a nearest stationary electrode is substantially equal for all of the stationary and moveable electrodes.

21. The electrostatic actuator of claim 15 wherein the frame comprises a plurality of layers of a deposited and patterned electrically-conductive material.

22. The electrostatic actuator of claim 21 wherein the electrically-conductive material comprises polycrystalline silicon, and the substrate comprises silicon.

23. The electrostatic actuator of claim 21 wherein the frame further includes a plurality of links for supporting a majority of the moveable electrodes at or near a midpoint thereof.

24. The electrostatic actuator of claim 15 further including a ground plane formed on the substrate below each row of the moveable electrodes.

25. The electrostatic actuator of claim 15 further including an electrostatic shield formed on the substrate between the frame and an adjacent stationary electrode.

26. An electrostatic actuator formed on a substrate and comprising:

(a) a plurality of stationary electrodes formed on the substrate and regularly spaced in at least one row oriented along a direction of movement of the electrostatic actuator;

(b) a rigid frame supported above the substrate by a plurality of springs, with the frame surrounding each row of the stationary electrodes; and

(c) a plurality of moveable electrodes located on the frame on both sides of each row of the stationary electrodes, the moveable electrodes acting in combination with the stationary electrodes to displace the frame in the direction of movement in response to an applied voltage.

27. The electrostatic actuator of claim 26 wherein the moveable electrodes are supported on the frame by a plurality of links connecting the moveable electrodes and forming a plurality of rows of the moveable electrodes.

28. The electrostatic actuator of claim 27 wherein each link has a thickness that is smaller than the thickness of the moveable electrodes.

29. The electrostatic actuator of claim 28 wherein the thickness of each link is less than one-half the thickness of the moveable electrodes.

30. The electrostatic actuator of claim 26 wherein the frame comprises polycrystalline silicon, and the substrate comprises silicon.

31. The electrostatic actuator of claim 26 further including a ground plane formed on the substrate below the moveable electrodes.

32. The electrostatic actuator of claim 26 further including an electrostatic shield formed on the substrate between the frame and an adjacent stationary electrode.

33. The electrostatic actuator of claim 26 wherein the stationary electrodes are configured as sets of electrodes to provide for digital addressing of at least one set of the stationary electrodes with the applied voltage.

34. An electrostatic actuator, comprising:

(a) a substrate;

(b) a plurality of fingerless stationary electrodes formed on the substrate and arranged in at least one row oriented along a direction of movement of the electrostatic actuator;

(c) a plurality of moveable electrodes suspended above the substrate, with the number of moveable electrodes being at least equal to the number of stationary electrodes, and with at least one of the moveable electrodes acting in combination with each stationary electrode to generate an electrostatic force in response to a voltage applied therebetween to urge the moveable electrodes to move in the direction of movement; and

(d) a rigid frame surrounding and supporting the moveable electrodes above the substrate, with the frame being attached to the substrate by a plurality of springs.

35. The electrostatic actuator of claim 34 wherein the frame, the stationary electrodes and the moveable electrodes comprise a plurality of layers of a deposited and patterned electrically-conductive material.

36. The electrostatic actuator of claim 35 wherein the electrically-conductive material comprises polycrystalline silicon.

37. The electrostatic actuator of claim 36 wherein the substrate comprises silicon.

38. The electrostatic actuator of claim 35 wherein the frame further comprises a plurality of links for supporting a majority of the moveable electrodes, with each link being formed from at least one layer of the electrically-conductive material.

39. The electrostatic actuator of claim 34 further including a ground plane formed on the substrate below the moveable electrodes.

40. The electrostatic actuator of claim 34 further including an electrostatic shield formed on the substrate between the frame and an adjacent stationary electrode.

41. The electrostatic actuator of claim 34 wherein the stationary electrodes are configured as sets of electrodes to provide for digital addressing of at least one set of the stationary electrodes with the applied voltage.

42. An electrostatic actuator formed on a substrate and comprising:

(a) a plurality of fingerless stationary electrodes formed on the substrate from a plurality of layers of deposited and patterned electrically-conductive material;

(b) a plurality of moveable electrodes suspended above the substrate proximate to the stationary electrodes, with the moveable electrodes being formed from at least one layer of the plurality of layers of deposited and patterned electrically-conductive material;

(c) a plurality of links connecting the moveable electrodes, with the links being formed from at least one layer of the plurality of layers of the deposited and patterned electrically-conductive material; and

(d) a rigid frame surrounding and supporting the links and moveable electrodes, with the frame being formed from at least one layer of the plurality of layers of deposited and patterned electrically-conductive material and further being moveable in response to a voltage applied between the stationary and moveable electrodes.

43. The electrostatic actuator of claim 42 wherein the electrically-conductive material comprises polycrystalline silicon.

44. The electrostatic actuator of claim 43 wherein the substrate comprises silicon.

45. The electrostatic actuator of claim 43 wherein the links comprise at least one layer of polycrystalline silicon.

46. The electrostatic actuator of claim 42 wherein the voltage is simultaneously applied between all the stationary electrodes and all the moveable electrodes.

47. The electrostatic actuator of claim 42 wherein the stationary electrodes are configured as sets of electrodes to provide for digital addressing of at least one set of the stationary electrodes with the applied voltage.