Vertical-cavity surface-emitting laser comprised of single laser elements arranged on a common substrate
First Claim
1. A vertical-cavity surface-emitting laser (VCSEL) device comprising a plurality of VCSEL elements arranged on a common substrate, each VCSEL element comprising first minor means and second mirror means, each having a predefined reflectivity at a predetermined wavelength, for forming an optical resonator for said wavelength, a laser active region disposed between said first and said second mirror means, and a grid layer arranged over said first mirror means, said grid layer having a plurality of openings corresponding to the respective VCSEL elements,wherein said VCSEL device further comprises a contact layer having a predetermined thickness, said contact layer being interposed between each of said first mirror means and said grid layer, wherein an optical thickness of said contact layer in combination with a reflectivity and an absorption of said grid layer is selected so as to provide an effective reflectivity of each of said first mirror means depending on said grid layer and being different for areas covered by the grid and areas corresponding to said grid openings.
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Accused Products
Abstract
A vertical-cavity surface-emitting laser device (VCSEL) comprises a plurality of VCSEL elements arranged on a common substrate, each VCSEL element comprising first mirror means and second mirror means, each having a predefined reflectivity at a predetermined wavelength, for forming an optical resonator for said wavelength, and a laser active region disposed between said first and second mirror means. In addition, the VCSEL device comprises a grid layer having a plurality of openings corresponding to the respective VCSEL elements and a contact layer having a predetermined thickness, said contact layer being interposed between each of said first mirror means and said grid layer, wherein an optical thickness of said contact layer and a reflectivity and an absorption of said grid layer is selected so as to provide an effective reflectivity of each of said first mirror means depending on said grid layer and being different for areas covered by the grid and areas corresponding to said grid openings.
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Citations
19 Claims
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1. A vertical-cavity surface-emitting laser (VCSEL) device comprising a plurality of VCSEL elements arranged on a common substrate, each VCSEL element comprising first minor means and second mirror means, each having a predefined reflectivity at a predetermined wavelength, for forming an optical resonator for said wavelength, a laser active region disposed between said first and said second mirror means, and a grid layer arranged over said first mirror means, said grid layer having a plurality of openings corresponding to the respective VCSEL elements,
wherein said VCSEL device further comprises a contact layer having a predetermined thickness, said contact layer being interposed between each of said first mirror means and said grid layer, wherein an optical thickness of said contact layer in combination with a reflectivity and an absorption of said grid layer is selected so as to provide an effective reflectivity of each of said first mirror means depending on said grid layer and being different for areas covered by the grid and areas corresponding to said grid openings.
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17. The VCSEL device of claim wherein a resistance layer is provided in which at least one region corresponding to an opening of said honeycomb raster has a high electrical resistance and said at least one high resistance region has six nearest-neighbor-regions.
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18. The VCSEL device of claim awherein said high resistance region comprises an exposed portion where at least the overlying layers of said active region and of the Bragg mirror have a vertical opening.
Specification