×

Pressure sensor capsule with improved isolation

  • US 6,508,129 B1
  • Filed: 01/06/2000
  • Issued: 01/21/2003
  • Est. Priority Date: 01/06/2000
  • Status: Expired due to Term
First Claim
Patent Images

1. A pressure sensor capsule with improved isolation, comprising:

  • a pressure sensing body formed as a beam made of direct bonded layers of single crystal sapphire, the beam forming a beam wall around a central channel defined therein, the beam having a first end having a diaphragm adapted for fluid pressurization, and an opposite second end, the beam wall having an outer beam mounting surface between the ends;

    the central channel having a first width near the first end and having a second width, near the mounting surface, that is narrower than the first width;

    an isolation plate having a mounting hole therethrough and the beam mounting through the mounting hole;

    a braze joint sealingly joining the outer beam mounting surface to the mounting hole, sealingly isolating the second end from the fluid pressurization; and

    conductive film disposed in the central channel, including a pressure sensing film portion on the diaphragm, and a sensor lead portion extending from the pressure sensing portion, the beam having a notch at the second end, the notch forming an isolated lead surface on the central channel; and

    electrical contact pads disposed on the isolated lead surface.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×