Angle implant process for cellular deep trench sidewall doping
First Claim
1. A process of manufacture of a superjunction device comprising the steps of forming spaced parallel trenches into a silicon wafer of one conductivity type;
- each of said trenches having an axis along a depth dimension with said axes being perpendicular to a top surface of said silicon wafer;
each of said trenches having approximately a same depth and cross section;
directing an implant beam of a species which defines a second conductivity type toward said top surface of said silicon wafer and at an angle to said axes of each of said trenches;
said angle being sufficiently small that a full length of an interior surface of each of said trenches receives implanted ions from said implant beam;
rotating said wafer to expose a full surface area of an interior of each of said trenches to said implant beam; and
maintaining said implant beam directing and said wafer rotating until a sufficient depth and concentration of said second conductivity type is achieved to match that of said silicon wafer when activated, such that regions near said trenches of opposite conductivity type both deplete during reverse bias.
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Accused Products
Abstract
A process is described for making a superjunction semiconductor device, a large number of symmetrically spaced trenches penetrate the N− epitaxial layer of silicon atop an N+ body to a depth of 35 to 40 microns. The wells have a circular cross-section and a diameter of about 9 microns. The trench walls are implanted by an ion implant beam of boron which is at a slight angle to the axis of the trenches. The wafer is intermittently or continuously rotated about an axis less than 90° to its surface to cause skewing of the implant beam and more uniform distribution of boron ions over the interior surfaces of the trenches.
103 Citations
10 Claims
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1. A process of manufacture of a superjunction device comprising the steps of forming spaced parallel trenches into a silicon wafer of one conductivity type;
- each of said trenches having an axis along a depth dimension with said axes being perpendicular to a top surface of said silicon wafer;
each of said trenches having approximately a same depth and cross section;
directing an implant beam of a species which defines a second conductivity type toward said top surface of said silicon wafer and at an angle to said axes of each of said trenches;
said angle being sufficiently small that a full length of an interior surface of each of said trenches receives implanted ions from said implant beam;
rotating said wafer to expose a full surface area of an interior of each of said trenches to said implant beam; and
maintaining said implant beam directing and said wafer rotating until a sufficient depth and concentration of said second conductivity type is achieved to match that of said silicon wafer when activated, such that regions near said trenches of opposite conductivity type both deplete during reverse bias. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- each of said trenches having an axis along a depth dimension with said axes being perpendicular to a top surface of said silicon wafer;
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10. A process of manufacture of a superjunction device comprising the steps of forming spaced parallel trenches into a silicon wafer of one conductivity type;
- each of said trenches having an axis along a depth dimension with said axes being perpendicular to a top surface of said silicon wafer;
each of said trenches having a depth of greater than about 25 microns and a width of less than about 9 microns;
directing an implant beam of a species which defines a second conductivity type toward said top surface of said silicon wafer and at an angle to said axes of each of said trenches;
said angle being sufficiently small that a full length of an interior surface of each of said trenches receives implanted ions from said implant beam; and
rotating said wafer to expose a full surface area of an interior or each of said trenches to said implant beam.
- each of said trenches having an axis along a depth dimension with said axes being perpendicular to a top surface of said silicon wafer;
Specification