Multi-beam apparatus for measuring surface quality

• US 6,509,964 B2
• Filed: 05/15/2001
• Issued: 01/21/2003
• Est. Priority Date: 05/15/2001
• Status: Expired due to Fees

• Current Assignee: AMT Pte Ltd
• Original Assignee: AMT Pte Ltd
• Inventors: Wiles, Gregory R., Prain, Charles C. III
• Primary Examiner(s): Lee, Michael G.
• Assistant Examiner(s): Kim, Ahshik
• Application Number:
  US09/858,205
• Publication Number:
  US 20020171826A1
• Time in Patent Office: 616 Days
• Field of Search: 356/600, 356/446, 356/445, 356/237.2
• US Class Current: 356/237.2
• CPC Class Codes: G01N 21/57 Measuring gloss

Abstract

An apparatus for measuring the visual characteristics of a surface of a workpiece includes two separate light sources. The first source provides one or more focused beams of light which strike the workpiece at a first angle and are reflected therefrom. The second source provides one or more unfocused beams of light which strike the workpiece at a second angle, different from the first angle, and are reflected therefrom. All of the reflected beams converge onto a single photo detector. The beams are time multiplexed so that the photo detector only reads one beam at a time. The output of the photo detector is processed to provide surface quality measurements of the workpiece such as gloss, distinctness of image and orange peel.

Claims

1. An apparatus for measuring the visual characteristics of a surface of a workpiece, said apparatus comprising:

a first light source operative to direct at least one focused beam of light onto a surface of a workpiece for reflection therefrom so as to produce a first set of reflected beams, each beam of said first set corresponding to one of said at least one focused beams;

a second light source operative to direct at least one unfocused beam of light onto said surface of said workpiece for reflection therefrom, at a location separate from a location at which each of said at least one focused beams are directed onto said workpiece, so as to produce a second set of reflected beams, each beam of said second set corresponding to one of said at least one unfocused beams;

a photo detector operative to produce a signal in response to illumination thereof;

means for directing said first and second sets of reflected beams of light onto said photo detector; and

multiplexing means for causing said photo detector to sequentially detect each member of said first and second sets of reflected beams, whereby said photo detector produces a separate signal in response to each of said reflected beams.

2. The apparatus of claim 1, wherein said first light source is operative to direct a plurality of focused beams of light onto said surface of said workpiece.

3. The apparatus as in claim 2, wherein said first light source includes a plurality of diode lasers, each diode laser being operative to provide one of said plurality of beams of light.

4. The apparatus of claim 2, wherein said first light source is operative to direct each member of said plurality of beams onto the surface of the workpiece at a different location thereon.

5. The apparatus of claim 1, wherein said first light source is operative to direct said at least one focused beam of light onto said surface of said workpiece at an angle of incidence which is the Brewster angle for said light and for said workpiece.

6. The apparatus of claim 1, wherein said first light source is operative to direct said at least one focused beam of light onto the surface of said workpiece at an angle of incidence which is in the range of 50-60°

from normal.

7. The apparatus of claim 1, wherein said angle of incidence is 56.4°

.

8. The apparatus of claim 1, wherein said at least one unfocused beam of light comprises at least one collimated, unfocused beam of light.

9. The apparatus of claim 1, wherein said second light source is operative to direct one beam of collimated, unfocused light onto said surface of said workpiece.

10. The apparatus of claim 9, wherein said beam of collimated, unfocused light has a diameter in the range of 1-3 millimeters.

11. The apparatus of claim 1, wherein said second light source is operative to direct said at least one unfocused beam of light onto said surface at an angle of incidence which is in the range of 0-25°

from normal.

12. The apparatus of claim 11, wherein said angle of incidence is 20°

from normal.

13. The apparatus of claim 1, wherein said means for directing said first and second sets of reflected beams includes a set of mirrors for directing said first set of reflected beams.

14. The apparatus of claim 1, wherein said second light source is operative to direct only one beam of unfocused light onto said surface of said workpiece, whereby said second set of reflected beams includes only one beam;

and wherein, said means for directing said first and second sets of reflected beams includes a support for said second light source which positions said second light source so that said one beam of unfocused light is reflected from said workpiece directly onto said photo detector.

15. The apparatus of claim 1, wherein said multiplexing means is a controller operable to sequentially activate said first and second light sources so that each of said at least one focused beam and said at least one unfocused beam are separated in time.

16. The apparatus of claim 1, wherein said first light source is operative to direct a plurality of focused beams of light onto said surface, said first light source including a plurality of diode lasers, each laser being operable to emit one of said focused beams, and wherein said second light source is operative to direct one collimated unfocused beam of light onto said surface, said second light source including one diode laser which is operable to emit said collimated unfocused beam;

and wherein said multiplexing means comprises a controller operable to sequentially activate said diode lasers so that said plurality of focused beams and said collimated, unfocused beam are separated in time.

17. The apparatus of claim 1, wherein said photo detector comprises an array of photo diodes.

18. The apparatus of claim 1, wherein said array is a one-dimensional array.

19. The apparatus of claim 1, further including a signal processor in communication with said photo detector, said signal processor operative to receive the signals generated by the photo detector and to process said signals so as to determine a visual characteristic of said surface.

20. The apparatus of claim 1, further including a scanner for scanning said at least one focused beam of light across said surface of said workpiece.

21. The apparatus of claim 20, wherein said scanner is further operative to scan said at least one unfocused beam of light across said surface of said workpiece.

22. In an apparatus for measuring the visual characteristics of a surface of a workpiece, wherein said apparatus includes a plurality of light emitters, each being operative to direct a single beam of light onto a different portion of the surface of the workpiece at a common angle of incidence for reflection therefrom, the improvement comprising in combination:

said light emitters being disposed in an angled relationship to one another so that said beams follow paths which are converging as they approach said surface, said paths meeting at a convergence point after reflection from said surface.

23. The apparatus of claim 22, further including a photo detector disposed at said convergence point.

24. An apparatus for measuring the visual characteristics of a surface of a workpiece, said apparatus comprising:

a first light source operative to direct a plurality of focused beams of light onto different portions of a surface of a workpiece, at a first, common angle of incidence, for reflection therefrom so as to produce a set of reflected, focused beams, each corresponding to one of said focused beams;

a second light source operative to direct a collimated, unfocused beam of light onto said surface at a second angle of incidence, which differs from said first angle of incidence, for reflection therefrom so as to produce an unfocused, reflected beam;

scanning means for scanning said focused beams and said unfocused beam across the surface of the workpiece;

a photo detector operative to produce a signal in response to illumination thereof;

means for directing said reflected focused beams and said reflected unfocused beam onto the same portion of said photo detector; and

multiplexing means for causing said photo detector to sequentially detect each of said reflected beams.

25. A method of measuring one or more surface characteristics with respect to a workpiece, comprising the steps of:

directing a beam of light onto a surface of the workpiece so that the light is reflected thereby;

detecting the light reflected by the surface using an array of detector elements to obtain a curve representative of the spatial intensity of the reflected light;

finding the peak of the curve;

determining points on the curve relative to the peak of the curve which are representative of predetermined field stops; and

integrated one or more regions under the curve between a pair of the field stops, to produce a signal that corresponds to the surface characteristic being measured.

26. The method of claim 25, wherein the beam of light is directed onto the surface of the workpiece at a predetermined angle of incidence.

27. The method of claim 26, wherein the predetermined angle of incidence is 20°

.

28. The method of claim 25, wherein the curve representative of the spatial intensity of the reflected light is a generally bell-shaped curve.

29. The method of claim 25, wherein:

the field stops are located at the same predetermined distance from the peak on either side of the curve; and

the measured characteristic is surface gloss.

30. The method of claim 29, wherein:

the light is incident upon the surface at a predetermined angle of 20°

; and

the field stops are representative of points which are ±

0.3°

from the peak of the curve.

31. The method of claim 30, further including the steps of:

finding additional points representative of slits just outside the points which are ±

0.3°

from the peak of the curve; and

integrating the areas under the curve within each slit to determine distinctiveness of image.

32. The method of claim 25, wherein:

the field stops are representative of a slit on one side of the curve at a predetermined distance from the peak; and

the measured characteristic is distinctiveness of image (DOI).

33. The method of claim 25, wherein the peak of the curve is found through a weighted averaging.

34. The method of claim 25, wherein the beam of light is unfocused.

35. The method of claim 25, wherein the beam of light is collimated.

36. The method of claim 25, further including the steps of:

illuminating a plurality of spaced-apart points on the surface to obtain a direct profile of the surface of the workpiece;

performing a fast Fourier transform on the direct profile to obtain a power spectra curve which plots transformed values as a function of distance;

integrating the area under the curve for a given distance; and

comparing the result to a value stored in a look-up table to determine orange peel associated with the surface of the workpiece.

37. A method of measuring surface gloss and distinctiveness of image (DOI) with respect to the surface of a workpiece, comprising the steps of:

directing a beam of unfocused, collimated light onto the surface of the workpiece at a predetermined angle of incidence;

detecting the light reflected by the surface using an array of detector elements to obtain a generally bell-shaped curve representative of the reflected light;

finding the peak of the curve;

determining a first set of points which are representative of predetermined field stops located at the same distance from the peak on either side of the curve;

integrated the area under the curve within the field stops to produce a signal indicative of gloss;

finding additional points representative of slits just outside the field stops; and

integrating the areas under the curve within each slit to produce a signal indicative of DOI.

38. The method of claim 37, wherein:

the light is incident upon the surface of the workpiece at a predetermined angle of 20°

; and

the field stops are representative of points which are 0.3°

from the peak of the curve.

39. The method of claim 37, wherein the peak of the curve is found through a weighted averaging.

40. The method of claim 37, further including the steps of:

illuminating a plurality of spaced-apart points on the surface to obtain a direct profile of the surface;

performing a fast Fourier transform on the direct profile to obtain a power spectra curve which plots transformed values as a function of distance; and

integrating the area under the curve for a given distance to produce a signal indicative of orange peel.

41. A method of measuring multiple characteristics with respect to the surface of a workpiece, comprising the steps of:

illuminating a plurality of spaced-apart points on the surface using at least one non-focused beam of light at a first predetermined angle of incidence, and at least one focused beam of light at a second predetermined angle of incidence;

detecting the light reflected by the surface using the same array of detector elements to obtain a generally bell-shaped curve representative of the light reflected at each point;

a) when the non-focused beam of light is used to illuminate the surface, performing the following steps;

finding the peak of the curve,

determining a first set of points which are representative of predetermined field stops located at the same distance from the peak on either side of the curve,

integrated the area under the curve within the field stops as a measure of gloss,

finding additional points representative of slits just outside the field stops, and

integrating the areas under the curve within each slit to produce a signal indicative of DOI; and

b) when the focused beam of light is used to illuminate the surface, performing the following steps;

storing measurements using the light reflected with respect to a plurality of points to obtain a direct profile of the surface,

performing a fast Fourier transform (FFT) on the direct profile to obtain a power spectra curve which plots transformed values as a function of distance, and

integrating the area under the curve for a given distance to produce a signal indicative of orange peel.

42. The method of claim 41, wherein:

the first predetermined angle of incidence is 20°

off surface normal; and

the field stops are representative of points which are 0.3°

from the peak of the curve.

43. The method of claim 41, wherein the second predetermined angle of incidence is related to the wavelength of the focused beam.

44. The method of claim 43, wherein the wavelength of the focused beam is 670 manometers, and the second predetermined angle of incidence is approximately 56.4°

.

45. The method of claim 43, wherein the peak of the curve is found through a weighted averaging.