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Testing sensor

DC
  • US 6,512,364 B1
  • Filed: 11/20/2000
  • Issued: 01/28/2003
  • Est. Priority Date: 12/28/1989
  • Status: Expired due to Fees
First Claim
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1. A method of testing a sensor, said sensor comprising:

  • a substrate arranged along an XY-plane of an XYZ three-dimensional coordinate system;

    a working body receiving a force and located adjacent to said substrate with a predetermined distance;

    a flexible member supporting said working body at a periphery thereof so that said working body is suspended and spatial deviation of said working body is produced by applying said force thereto;

    a fixing member fixing said flexible member to said substrate; and

    a transducer for transforming said spatial deviation into an electric signal that indicates a direction and a magnitude of said force, said method comprising the steps of;

    providing a capacitance element including a deviation electrode and a fixed electrode, said deviation electrode being located at a position which deviates along with said working body and said fixed electrode being fixed to said substrate so as to face said deviation electrode, and said capacitance element being arranged so that an electrode distance of said capacitance element changes when said working body is deviated in an X-axis direction of said XYZ three-dimensional coordinate system;

    applying a voltage between said deviation electrode and said fixed electrode so that Coulomb force is produced which causes spatial deviation of said working body in said X-axis direction;

    detecting an electric signal transformed by said transducer while said spatial deviation is caused by applying said voltage; and

    testing an operation of said sensor with respect to said X-axis direction based on a relationship between said applied voltage and said detected electric signal.

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