Light modulation device and system

• US 6,512,625 B2
• Filed: 12/01/2000
• Issued: 01/28/2003
• Est. Priority Date: 11/22/2000
• Status: Active Grant

• Current Assignee: Disco Corporation
• Original Assignee: Ball Semiconductor, Inc.
• Inventors: Sim, Dong Youn, Mei, Wenhui, Chan, Kin Foong
• Primary Examiner(s): Mack; Ricky
• Assistant Examiner(s): HINDI, OMAR Z
• Application Number:
  US09/728,691
• Publication Number:
  US 20020101644A1
• Time in Patent Office: 788 Days
• Field of Search: 359/290,295,292,291,224 313/462
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3516 the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70375 Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation

Abstract

A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a flexible member, and a mirror. The flexible member is connected between the three electrodes so that the first and second electrodes are on one side and the third electrode is on the opposite side of the flexible member. The mirror is attached to the flexible member so that it can move therewith. The flexible member moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror is positioned in a predetermined position responsive to the state of the flexible member.

Claims

1. An optical communication device comprising:

a first, second, and third electrode for producing a first, second and third force, respectively;

a support structure;

a flexible member connected to the support structure, wherein the flexible member is responsive to a force;

a mirror attached to the flexible member; and

a first gap between the flexible member and the first and second electrodes so that the flexible member can move between a first and second state;

wherein the mirror is positioned to be responsive to the state of the flexible member by moving between a first plane and a second plane, wherein the first and second planes are parallel.

2. The device of claim 1 wherein the three electrodes are positioned inside the first gap, the first, second, and third forces are all electrostatic, and the flexible member is responsive to electrostatic forces from the three electrodes.

3. The device of claim 1 further comprising:

an actuator connected to the third electrode, the actuator for applying a mechanical force to the flexible mirror.

4. The device of claim 1 wherein the flexible member includes a central portion for securing to the mirror and at least one leg for securing to the support structure.

5. The device of claim 1 wherein the leg allows the flexible member to pop between the two states.

6. The device of claim 1 further comprising:

a stopper for limiting the movement of the flexible member.

7. A light element comprising:

a substrate;

first, second, and third electrodes positioned adjacent to the substrate and capable of producing an electrostatic force of varying intensity;

first and second support members connected to the substrate;

a flexible member spanning between the first and second support members and extending over and above the three electrodes and capable of moving between a first and second state; and

a mirror connected to and extending above the flexible member, the mirror operable to move perpendicularly relative to the substrate in response to the movement of the flexible member.

8. The element of claim 7 wherein the flexible member includes a central portion responsive to electromagnetic forces, and first and second legs for connecting the central portion to the first and second support members, respectively.

9. The element of claim 8 wherein the first and second legs are non-linear springs capable of operating in a hysteresis manner.

10. The element of claim 8 wherein at least a portion of each of the three electrodes is located under a central portion of the flexible member, and a surface area for each of the three electrode portions is relatively equal.

11. The element of claim 9 wherein the three electrodes are positioned relative to the central portion of the flexible member so that when two of the electrodes are producing an electrostatic force, the central portion will move from the first state to the second state response to an electrostatic force produced by the third electrode.

12. A light element comprising:

a substrate;

first, second, connected to the substrate;

a flexible member;

a structure connected to the substrate for supporting the flexible member to extend over and above the first and second electrodes, so that a gap is formed between the flexible member and the first and second electrodes thereby allowing the flexible member to move between a first and second state;

an actuator adjacent to the flexible member;

a third electrode adjacent to the actuator;

a mirror extending above the flexible member; and

a connector for connecting the mirror to the flexible member so that the mirror stays parallel with the substrate and a distance between the substrate and the mirror is controlled by the state of the flexible member;

wherein the first and second electrodes are situated to hold the flexible member in a prior state responsive to a hold voltage applied thereto, and

wherein the third electrode is situated to activate the actuator, which thereby selectively moves the flexible member between the first and second states.

13. The element of claim 12 wherein the flexible member is constructed of a material responsive to an electromagnetic force, and the first and second electrodes hold the flexible member utilizing electromagnetic force.

14. The element of claim 12 wherein the actuator is a piezoelectric micro-actuator.

15. The element of claim 12 wherein the actuator is a pyroelectric micro-actuator.