MEMS sensor with single central anchor and motion-limiting connection geometry
First Claim
1. An improved micro-electro-mechanical systems (MEMS) sensor having a substrate and a sense element that exhibits a motion relative to the substrate in response to an influence to be sensed, the improvement comprising:
- a central aperture in the sense element;
a single centrally-located anchor extending from the substrate and positioned within the sense element'"'"'s central aperture to support the sense element above the substrate; and
a means for connecting the sense element to the single anchor and substantially constraining the motion of the sense element to a single degree of freedom.
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Abstract
Disclosed is a MEMS sensor including a sense element and a single anchor that supports the sense element arranged in a central hub-like fashion that reduces the effects of thermal stress. Usually, two or more anchors are required to suitably constrain the sense element'"'"'s motion. The anchor disclosed herein, however, supports the sense element with connection elements having a connection geometry that substantially limits the motion of the sense element to a single-degree-of-freedom. The connection elements may include, for example, converging flexures, an extender bar, or both.
162 Citations
18 Claims
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1. An improved micro-electro-mechanical systems (MEMS) sensor having a substrate and a sense element that exhibits a motion relative to the substrate in response to an influence to be sensed, the improvement comprising:
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a central aperture in the sense element;
a single centrally-located anchor extending from the substrate and positioned within the sense element'"'"'s central aperture to support the sense element above the substrate; and
a means for connecting the sense element to the single anchor and substantially constraining the motion of the sense element to a single degree of freedom. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
first and second bar elements that extend substantially parallel to the substrate and to opposite sides of the single anchor; and
first and second pairs of flexure elements that connect the first and second bar elements to the sense element.
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11. The improved MEMS sensor of claim 10 wherein the first and second bar elements comprise a substantially rectangular member supported by the single anchor.
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12. The improved MEMS sensor of claim 1 wherein the sense element comprises a plate with a central aperture and wherein the single anchor is located within the central aperture.
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13. The improved MEMS sensor of claim 12 wherein the central aperture has opposed inner sides, wherein the single anchor has opposed outer sides, and wherein the connecting means comprises first and second pairs of converging flexures that extend in opposite directions from the single anchor'"'"'s first and second outer sides to the central aperture'"'"'s first and second inner sides.
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14. The improved MEMS sensor of claim 1 wherein the influence to be sensed is angular rate.
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15. The improved MEMS sensor of claim 1 wherein the influence to be sensed is acceleration.
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16. The improved MEMS sensor of claim 15 wherein the influence to be sensed is linear acceleration.
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17. A micro-electro-mechanical systems (MEMS) sensor comprising:
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a substrate;
a sense element having a central aperture, said sense element exhibiting a sense motion relative to a sense axis passing through the central aperture in response to an influence to be sensed;
a single anchor extending from the substrate within the sense element'"'"'s central aperture to support the sense element; and
a means for connecting the sense element to the single anchor, the connecting means having a geometry that substantially limits the motion of the sense element to a single degree of freedom corresponding to the sense motion.
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18. A micro-electro-mechanical systems (MEMS) sensor comprising:
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a substrate;
a sense element having a central aperture, said sense element being in a plane substantially parallel to the substrate and exhibiting a motion in response to an influence to be sensed;
a single anchor extending substantially perpendicularly from the substrate within the sense element'"'"'s central aperture to support the sense element; and
connecting elements that connect the single anchor to the sense element within the central aperture, the connecting elements having a geometry that substantially facilitates motion of the sense element relative to a first sense axis passing through the central aperture and substantially inhibits other motion relative to the first sense axis and motions relative to second and third axes that are perpendicular to the first sense axis and to one another.
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Specification