Gas purification system and method
First Claim
1. A gas purification method, comprising the steps of:
- connecting a gas purifier inlet to a supply of gas which is to be purified of contaminants;
passing said gas through said purifier while connecting an outlet of the gas purifier to a vent outlet for a predetermined time period sufficient to condition the purifier;
varying the gas flow rate through the gas purifier dependent on whether the purifier is connected to the vent outlet or process inlet by connecting a mass flow controller in line with the purifier and controlling the mass flow controller to supply gas at a higher flow rate while the purifier outlet is connected to the vent outlet and reducing the gas flow rate when the purifier outlet is connected to the process inlet; and
closing the vent outlet and connecting the gas purifier outlet to a process inlet using the purified gas after the purifier is conditioned;
whereby said gas is purified of said contaminants without significant deterioration in activity of said gas.
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Accused Products
Abstract
A gas purification system has at least one purifier in a purifier line with a gas supply inlet at one end and a process outlet at an opposite end for connection to a process tool using the purified gas. A vent line having a vent outlet is connected to the outlet end of the purifier. A control valve in the vent line controls connection of the purifier outlet to the vent outlet, and a control valve in the purifier line controls connection of the purifier outlet to the process outlet. A flow controller in the purifier line controls flow rate through the purifier. The system is controlled to provide an increased flow rate through the purifier and to connect the purifier outlet to the vent outlet on start up of the system, and then to connect the purifier outlet to the process outlet as soon as conditioning is complete.
350 Citations
23 Claims
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1. A gas purification method, comprising the steps of:
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connecting a gas purifier inlet to a supply of gas which is to be purified of contaminants;
passing said gas through said purifier while connecting an outlet of the gas purifier to a vent outlet for a predetermined time period sufficient to condition the purifier;
varying the gas flow rate through the gas purifier dependent on whether the purifier is connected to the vent outlet or process inlet by connecting a mass flow controller in line with the purifier and controlling the mass flow controller to supply gas at a higher flow rate while the purifier outlet is connected to the vent outlet and reducing the gas flow rate when the purifier outlet is connected to the process inlet; and
closing the vent outlet and connecting the gas purifier outlet to a process inlet using the purified gas after the purifier is conditioned;
whereby said gas is purified of said contaminants without significant deterioration in activity of said gas. - View Dependent Claims (2, 3, 4)
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5. A gas purification system, comprising:
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a purifier line having a gas inlet at one end for connection to a supply of a gas mixture comprising a carrier gas and an inorganic dopant gas which is to be purified of contaminants and a process outlet at an opposite end for connection to a process tool using the purified gas mixture;
a purifier for purifying the gas mixture connected in the purifier line between the inlet and the outlet, the purifier having an inlet end and an outlet end;
a vent line connected to the outlet end of the purifier and having a vent outlet;
a vent control valve in the vent line for controlling connection of the purifier outlet to the vent outlet; and
a process outlet valve in the purifier line for controlling connection of the purifier outlet to the process outlet;
whereby said gas mixture is purified of said contaminants without significant deterioration in the concentration of said dopant gas in said mixture. - View Dependent Claims (6, 7, 8, 9, 10, 11)
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12. A gas purification system, comprising:
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a plurality of purifier lines, each having a gas inlet at one end for connection to a supply of one gas mixture of a plurality of different gas mixtures, each gas mixture comprising a carrier gas and a dopant gas, said one gas mixture to be purified of contaminants, and a process outlet at an opposite end for connection to a process tool using the purified gas mixture;
a predetermined purifier in each purifier line for removing contaminants from the gas mixture in said line, at least one of said plurality of purifier lines having a vent line connecting the purifier outlet in said line to a vent outlet in said vent line;
a vent control valve in the vent line for controlling connection of the purifier outlet to the vent outlet; and
a process outlet valve in the purifier line for controlling connection of the purifier to process outlet;
whereby each said gas mixture is purified of said contaminants without significant deterioration in concentration of said dopant gas in said mixture. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. A gas purification system for supplying several different purified gases to a tool, comprising:
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a plurality of separate purifier lines each having an inlet for connection to a predetermined gas supply and an outlet for connection to a process tool;
a predetermined purifier connected in each purifier line for purifying the gas supplied along the purifier line;
at least some of the purifier lines having a vent line connected to the purifier outlet;
a vent outlet connected to each vent line for venting gas from the respective purifier;
a vent control valve in each vent line for controlling purifier outlet connection to the vent outlet;
a process outlet control valve in each purifier line for controlling purifier outlet connection to the process outlet; and
a system controller for controlling operation of the vent control valves and process outlet control valves, whereby each purifier connected to a vent line is connected to the vent outlet for a predetermined time period on start up of the system sufficient for the purifier to be conditioned, and the purifier is connected to the process outlet when conditioning is complete. - View Dependent Claims (21, 22, 23)
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Specification