Gas purification system and method

• US 6,514,313 B1
• Filed: 06/22/2001
• Issued: 02/04/2003
• Est. Priority Date: 06/22/2001
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Aeronex, Inc. (Entegris Incorporated)
• Inventors: Spiegelman, Jeffrey J., Abber, Russell L.
• Primary Examiner(s): Simmons, David A.
• Assistant Examiner(s): LAWRENCE JR, FRANK M
• Application Number:
  US09/887,761
• Time in Patent Office: 592 Days
• Field of Search: 95/1, 95/23, 961/09, 961/10, 961/15, 961/16, 961/17, 964/22, 553/42, 554/84
• US Class Current: 95/23
• CPC Class Codes: B01D 2256/26 Halogens or halogen compounds
• CPC Class Codes: B01D 2259/40003 Methods relating to valve switching
• CPC Class Codes: B01D 53/0454 Controlling adsorption controlling temperature swing adsorption B01D53/0462, controlling pressure swing adsorption B01D53/047
• CPC Class Codes: C23C 16/4402 Reduction of impurities in the source gas
• CPC Class Codes: C30B 25/02 Epitaxial-layer growth
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: C30B 29/36 Carbides

Abstract

A gas purification system has at least one purifier in a purifier line with a gas supply inlet at one end and a process outlet at an opposite end for connection to a process tool using the purified gas. A vent line having a vent outlet is connected to the outlet end of the purifier. A control valve in the vent line controls connection of the purifier outlet to the vent outlet, and a control valve in the purifier line controls connection of the purifier outlet to the process outlet. A flow controller in the purifier line controls flow rate through the purifier. The system is controlled to provide an increased flow rate through the purifier and to connect the purifier outlet to the vent outlet on start up of the system, and then to connect the purifier outlet to the process outlet as soon as conditioning is complete.

Claims

1. A gas purification method, comprising the steps of:

connecting a gas purifier inlet to a supply of gas which is to be purified of contaminants;

passing said gas through said purifier while connecting an outlet of the gas purifier to a vent outlet for a predetermined time period sufficient to condition the purifier;

varying the gas flow rate through the gas purifier dependent on whether the purifier is connected to the vent outlet or process inlet by connecting a mass flow controller in line with the purifier and controlling the mass flow controller to supply gas at a higher flow rate while the purifier outlet is connected to the vent outlet and reducing the gas flow rate when the purifier outlet is connected to the process inlet; and

closing the vent outlet and connecting the gas purifier outlet to a process inlet using the purified gas after the purifier is conditioned;

whereby said gas is purified of said contaminants without significant deterioration in activity of said gas.

2. The method as claimed in claim 1, including the step of connecting the purifier outlet to the vent and controlling the mass flow controller to flow a small amount of gas through the purifier to the vent outlet when the process is shut down.

3. The method as claimed in claim 1, including the steps of monitoring the gas flow through the mass flow controller during conditioning, determining when the total amount of gas which has flown through the purifier is sufficient to condition the purifier, and closing the vent outlet and opening the process inlet when it is determined that conditioning is complete.

4. The method as claimed in claim 3, including the step of monitoring the total gas flow through the mass flow controller, determining when the total gas flow is equivalent to a predicted purifier lifetime, and providing a warning indication on an output display device when the predicted purifier lifetime is reached.

5. A gas purification system, comprising:

a purifier line having a gas inlet at one end for connection to a supply of a gas mixture comprising a carrier gas and an inorganic dopant gas which is to be purified of contaminants and a process outlet at an opposite end for connection to a process tool using the purified gas mixture;

a purifier for purifying the gas mixture connected in the purifier line between the inlet and the outlet, the purifier having an inlet end and an outlet end;

a vent line connected to the outlet end of the purifier and having a vent outlet;

a vent control valve in the vent line for controlling connection of the purifier outlet to the vent outlet; and

a process outlet valve in the purifier line for controlling connection of the purifier outlet to the process outlet;

whereby said gas mixture is purified of said contaminants without significant deterioration in the concentration of said dopant gas in said mixture.

6. The system as claimed in claim 5, including a mass flow controller in the purifier line for controlling the amount of gas flowing through the purifier.

7. The system as claimed in claim 6, wherein the mass flow controller is upstream of the purifier.

8. The system as claimed in claim 6, wherein the mass flow controller is downstream of the purifier.

9. The system as claimed in claim 5, including a by pass line connecting the gas inlet directly to the process outlet and bypassing the purifier, and a bypass valve in the bypass line for controlling bypass of the purifier.

10. The system as claimed in claim 5, including a system controller for controlling operation of the control valves to vent the purifier or connect the purifier outlet to the process outlet, the controller being programmed to connect the purifier to the vent for a predetermined time period sufficient to condition the purifier, and subsequently to connect the purifier outlet to the process outlet.

11. The system as claimed in claim 10, including a mass flow controller in the purifier line for controlling the gas flow rate through the purifier, the system controller being programmed to increase the gas flow rate when the purifier is connected to the vent outlet and decrease the gas flow rate when the purifier is connected to the process outlet.

12. A gas purification system, comprising:

a plurality of purifier lines, each having a gas inlet at one end for connection to a supply of one gas mixture of a plurality of different gas mixtures, each gas mixture comprising a carrier gas and a dopant gas, said one gas mixture to be purified of contaminants, and a process outlet at an opposite end for connection to a process tool using the purified gas mixture;

a predetermined purifier in each purifier line for removing contaminants from the gas mixture in said line, at least one of said plurality of purifier lines having a vent line connecting the purifier outlet in said line to a vent outlet in said vent line;

a vent control valve in the vent line for controlling connection of the purifier outlet to the vent outlet; and

a process outlet valve in the purifier line for controlling connection of the purifier to process outlet;

whereby each said gas mixture is purified of said contaminants without significant deterioration in concentration of said dopant gas in said mixture.

13. The system as claim in claim 12, wherein each purifier line for removing contaminants from a gas mixture containing less than a predetermined concentration of said dopant comprises a controllable output purifier line connected to a vent line.

14. The system as claimed in claim 13, wherein each controllable output purifier line is connected to a gas mixture supply wherein said dopant gas is present in said mixture in a concentration in the range of 50 ppm to 10% of said mixture.

15. The system as claimed in claim 14, wherein said dopant gas is selected from the group consisting of silane, germane, diborane, phosphine and arsine.

16. The system as claimed in claim 15, wherein said dopant gas is selected from the group consisting of silane, germane and diborane.

17. The system as claimed in claim 12, wherein at least some of the purifier lines have no vent lines.

18. The system as claimed in claim 12, wherein all of the purifier lines are enclosed in a single housing.

19. The system as claimed in claim 14, including a single system controller for controlling connection of each controllable output purifier line to the vent outlet or the process outlet.

20. A gas purification system for supplying several different purified gases to a tool, comprising:

a plurality of separate purifier lines each having an inlet for connection to a predetermined gas supply and an outlet for connection to a process tool;

a predetermined purifier connected in each purifier line for purifying the gas supplied along the purifier line;

at least some of the purifier lines having a vent line connected to the purifier outlet;

a vent outlet connected to each vent line for venting gas from the respective purifier;

a vent control valve in each vent line for controlling purifier outlet connection to the vent outlet;

a process outlet control valve in each purifier line for controlling purifier outlet connection to the process outlet; and

a system controller for controlling operation of the vent control valves and process outlet control valves, whereby each purifier connected to a vent line is connected to the vent outlet for a predetermined time period on start up of the system sufficient for the purifier to be conditioned, and the purifier is connected to the process outlet when conditioning is complete.

21. The system as claimed in claim 20, including an outer housing, all purifier and vent lines being mounted in the outer housing, the housing having a plurality of gas supply ports connected to the respective purifier line inlets, an exhaust port connected to each vent line, and a plurality of process outlet ports connected to the respective purifier process outlets.

22. The system as claimed in claim 20, wherein each purifier line has a bypass line connecting the gas inlet directly to the process outlet, bypassing the purifier, and a bypass valve in the bypass line for controlling bypass of the purifier, the system controller controlling operation of the bypass valve to supply gas directly to the process outlet during conditioning of the purifier.

23. The system as claimed in claim 20, including a mass flow controller in each purifier line having a vent line, the mass flow controller comprising means for controlling gas flow rate through the purifier, the system controller including means for controlling each mass flow controller to supply gas at a higher flow rate when the purifier is connected to the vent outlet than when it is connected to the process outlet.