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Apparatus for and method of processing an object to be processed

  • US 6,514,377 B1
  • Filed: 09/07/2000
  • Issued: 02/04/2003
  • Est. Priority Date: 09/08/1999
  • Status: Active Grant
First Claim
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1. The processing apparatus comprising:

  • a processing container;

    an electrode unit which is arranged inside said processing container and includes a first electrode and a second electrode facing each other via an object to be processed;

    a processing gas supply section which supplies a processing gas into said processing container;

    a gas exhaust section which exhausts said processing container of a gas;

    an electric field formation section which supplies high-frequency electric power to said electrode unit and forms an electric field between the first electrode and the second electrode;

    a magnetic field formation section which forms a first magnetic field state, including a magnetic field in said electrode unit in a direction perpendicular to the direction of the electric field or in a direction parallel to the object, and a second magnetic field state, including a magnetic field whose magnetic field strength at a periphery of a surface of the object is so satisfactory that an electron Larmor radius is larger than a mean free path of electrons; and

    a magnetic field state switching section which switches a magnetic field state from/to the first magnetic field state to/from the second magnetic field state, said magnetic field state switching section including a switch control mechanism which switches the first magnetic field state to the second magnetic field state at a predetermined timing.

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