Near-field scanning optical microscope with a high Q-factor piezoelectric sensing element

• US 6,515,274 B1
• Filed: 07/20/2000
• Issued: 02/04/2003
• Est. Priority Date: 07/20/1999
• Status: Expired due to Fees

• Current Assignee: Dmitri N. Davydov, Konstantin B. Shelimov, Martin Moskovits, Thomas L. Haslett
• Original Assignee: Dmitri N. Davydov, Konstantin B. Shelimov, Martin Moskovits, Thomas L. Haslett
• Inventors: Moskovits, Martin, Haslett, Thomas L., Davydov, Dmitri N., Shelimov, Konstantin B.
• Primary Examiner(s): PYO, KEVIN K
• Application Number:
  US09/620,588
• Time in Patent Office: 929 Days
• Field of Search: 250/234, 250/216, 250/306, 250/307, 731/05, 735/79
• US Class Current: 250/216
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 20/04 Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/862 Near-field probe

Abstract

A perpendicular-mode near-field scanning optical microscope (NSOM) utilizing a piezoelectric micro tuning fork as its height-sensing element is described. The present invention provides a method and apparatus for modifying and attaching an optical fiber to the tuning fork that allows the assembly to retain Q-factors up to 9000, substantially higher than those described so far in the literature for tuning-fork-based instruments. The method involves reducing the diameter of the cladding of the optical fiber down to the 17-25 μm using several chemical etching steps, before the fiber is attached to the tuning fork. A sharp upturn in the Q-factor is observed when the fiber diameter d drops below ˜25 μm. An analysis, which shows that the stretching force constant of a bent fiber is proportional to d⁴, is used to account for the great sensitivity of the Q-factor to the fiber diameter. The high Q-factors resulted in improved force sensitivity and allowed us to construct a perpendicular mode instrument without the use of additional dithering piezoelements. An improved NSOM operating in the sear force mode is also provided by thinning the optical fiber length running down the length of one of the tines to a thickness in the range from about 50 to 60 μm.

Claims

1. A piezoelectric sensing element for use in a near-field scanning optical microscope, comprising:

a micro tuning fork mounted in a holder, the micro tuning fork including first and second tines and the holder having a piezoelectric element for dithering the micro tuning fork; and

an optical fiber being connectable to a photodetection means and having a thinned end portion having a diameter less than a threshold thickness, the thinned portion of the optical fiber being attached at a first position thereof to the holder and attached at a second position thereof spaced from an end of the optical fiber to said first tine at a position spaced from an end of the first tine, the optical fiber extending transversly across the first and second tines of the micro tuning fork, said first tine being adapted to be adjacent to a surface being scanned.

2. The sensing element according to claim 1 wherein said thinned portion of the optical fiber has a thickness in a range from about 17 μ

m to about 25 μ

m.

3. The sensing element according to claim 2 wherein the second position of the thinned portion of the optical fiber is attached approximately midway along the length of the first tine.

4. The sensing element according to claim 1 wherein the thinned portion of the optical fiber has an arc in the portion between the first and second positions so that the optical fiber is not under tension between the first and second positions.

5. The sensing element according to claim 1 wherein said thinned portion of the optical fiber is attached along a length of one of said tines.

6. The sensing element according to claim 5 wherein said thinned portion of the optical fiber has a thickness in a range from about 40 μ

m to about 70 μ

m.

7. The sensing element according to claim 5 wherein said thinned portion of the optical fiber has a thickness in a range from about 50 μ

m to about 60 μ

m.

8. The sensing element according to claim 2 wherein said thinned portion of the optical fiber terminates in a sharpened tip and including a metal coating on said thinned fiber portion.

9. A piezoelectric sensing element for use in a near-field scanning optical microscope, comprising:

a micro tuning fork mounted in a holder, the micro tuning fork including first and second tines and the holder having a piezoelectric element for dithering the micro tuning fork; and

an optical fiber being connectable to a photodetection means and a thinned end portion having a diameter less than a threshold thickness, the thinned portion of the optical fiber being attached at a first position thereof to the holder and being attached at a second position thereof spaced from an end of the optical fiber to a first tine at a position spaced from an end of the first tine, the optical fiber extending transversly across the tines of the micro tuning fork, said first tine being adapted to be adjacent to a surface being scanned in operation.

10. The sensing element according to claim 9 wherein said thinned portion of the optical fiber has a thickness in a range from about 17 μ

m to about 25 μ

m.

11. The sensing element according to claim 9 wherein the second position of the thinned portion of the optical fiber is attached approximately midway along the length of the first tine.

12. The sensing element according to claim 11 wherein the thinned portion of the optical fiber has an arc in the portion between the first and second attachment positions so that the optical fiber is not under tension between the first and second positions.

13. The sensing element according to claim 9 wherein said thinned portion of the optical fiber terminates in a sharpened tip and including a metal coating on said thinned fiber portion.

14. The sensing element according to claim 13 wherein said diameter is in a range of about 50 to about 60 μ

m.