Method of making a TFT array with photo-imageable insulating layer over address lines

• US 6,515,300 B2
• Filed: 02/13/2001
• Issued: 02/04/2003
• Est. Priority Date: 06/06/1995
• Status: Expired due to Term

• Current Assignee: LG Display Co., Ltd.
• Original Assignee: LG Philips LCD Company Limited (LG Display Co., Ltd.)
• Inventors: Zhong, John Z. Z., den Boer, Willem, Gu, Tieer
• Primary Examiner(s): Picardat, Kevin M.
• Application Number:
  US09/781,397
• Publication Number:
  US 20010029057A1
• Time in Patent Office: 721 Days
• Field of Search: 438/142, 438/148, 438/149, 438/30, 438/32, 438/37, 438/73, 438/75, 438/80, 438/152, 438/160, 257/59, 257/72, 257/52, 257/57, 257/89, 257/440, 349/138, 349/56, 349/106
• US Class Current: 257/59
• CPC Class Codes: G02F 1/133357 Planarisation layers
• CPC Class Codes: G02F 1/13606 having means for reducing parasitic capacitance
• CPC Class Codes: G02F 1/136213 Storage capacitors associated with the pixel electrode
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: G02F 1/1368 in which the switching element is a three-electrode device G02F1/136277 takes precedence
• CPC Class Codes: G02F 2202/42 Materials having a particular dielectric constant
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1248 with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
• CPC Class Codes: H01L 27/14676 X-ray, gamma-ray or corpuscular radiation imagers measuring X-, gamma- or corpuscular radiation G01T1/00
• CPC Class Codes: H01L 29/66765 Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
• CPC Class Codes: H01L 29/78636 with supplementary region or layer for improving the flatness of the device

Abstract

This invention is related to a thin film transistor (TFT) array and method of making same, for use in an active matrix liquid crystal display (AMLCD) having a high pixel aperture ratio. The TFT array and corresponding display are made by forming the TFTs and corresponding address lines on a substrate, coating the address lines and TFTs with a photo-imageable insulating layer which acts as a negative resist, exposing portions of the insulating layer with UV light which are to remain on the substrate, removing non-exposed areas of the insulating layer so as to form contact vias, and depositing pixel electrodes on the substrate over the insulating layer so that the pixel electrodes contact respective TFT source electrodes through the contact vias. The resulting display has an increased pixel aperture ratio because the pixel electrodes are formed over the insulating layer so as to overlap portions of the array address lines.

Claims

1. A liquid crystal display device comprising:

a substrate;

an array of transistors on said substrate;

a plurality of gate and data lines connected to said transistors;

an array of pixel electrodes on said substrate;

a plurality of pixel electrodes overlapping at least one of the gate and data lines; and

a photo-imageable insulating layer on said substrate between said gate and data lines and said pixel electrodes at least in the areas of overlap and areas adjacent source electrodes of the transistors,

wherein said photo-imageable insulating layer has a dielectric constant less than about 5.0, and a first group of contact vias defined therein by photo-imaging, wherein said pixel electrodes are in electrical communication with corresponding transistor source electrodes through corresponding contact vias of said first group that are defined in said insulating layer.

2. The liquid crystal display device according to claim 1, wherein the photo-imageable insulating layer is planarized adjacent the pixel electrodes.

3. The liquid crystal display device according to claim 1, wherein a pixel aperture ratio is at least about 65%.

4. The liquid crystal display device according to claim 1, wherein the pixel electrode overlaps one of the drain and gate lines up to about 3 μ

m.

5. The liquid crystal display device according to claim 1, wherein the thickness of the gate electrodes and the gate lines is about 2,500Å

.

6. The liquid crystal display device according to claim 1, further comprising a semiconductor layer on top of the gate insulating layer.

7. The liquid crystal display device according to claim 6, wherein the semiconductor layer includes intrinsic a-Si.

8. The liquid crystal display device according to claim 7, wherein the thickness of the semiconductor layer is about 2,000Å

.

9. The liquid crystal display device according to claim 6, further comprising a contact layer over the semiconductor layer.

10. The liquid crystal display device according to claim 9, wherein the contact layer includes amorphous silicon.

11. The liquid crystal display device according to claim 10, wherein the thickness of the contact layer is about 500Å

.

12. The liquid crystal display device according to claim 1, wherein the thickness of the pixel electrodes is about 1,400Å

.

13. The liquid crystal display device according to claim 1, wherein a pixel pitch is about 150μ

m.