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Method of making a TFT array with photo-imageable insulating layer over address lines

  • US 6,515,300 B2
  • Filed: 02/13/2001
  • Issued: 02/04/2003
  • Est. Priority Date: 06/06/1995
  • Status: Expired due to Term
First Claim
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1. A liquid crystal display device comprising:

  • a substrate;

    an array of transistors on said substrate;

    a plurality of gate and data lines connected to said transistors;

    an array of pixel electrodes on said substrate;

    a plurality of pixel electrodes overlapping at least one of the gate and data lines; and

    a photo-imageable insulating layer on said substrate between said gate and data lines and said pixel electrodes at least in the areas of overlap and areas adjacent source electrodes of the transistors, wherein said photo-imageable insulating layer has a dielectric constant less than about 5.0, and a first group of contact vias defined therein by photo-imaging, wherein said pixel electrodes are in electrical communication with corresponding transistor source electrodes through corresponding contact vias of said first group that are defined in said insulating layer.

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