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High performance system-on-chip using post passivation process

  • US 6,515,369 B1
  • Filed: 05/28/2002
  • Issued: 02/04/2003
  • Est. Priority Date: 10/03/2001
  • Status: Active Grant
First Claim
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1. A discrete electrical component above the surface of a semiconductor substrate, comprising:

  • a semiconductor substrate, in or on the surface of which semiconductor devices have been created, having points of electrical contact provided to said semiconductor devices in or on the active surface of said substrate;

    an overlaying interconnecting metalization structure comprising one or more layers of interconnects over the active surface of said substrate, said layers of interconnects comprising conductive interconnect lines or conductive contact points or conductive vias in one or more layers, with points of electrical contact having been provided in or on the surface of said overlaying interconnecting metalization structure, at least one of said points of electrical contact making contact with at least one of said conductive interconnect lines or said conductive contact points or said conductive vias provided in said one or more layers of said overlaying interconnecting metalization structure, at least one of said metal lines or said contact points or said conductive vias making contact with at least one of said points of electrical contact provided to said semiconductor devices in or on the surface of said substrate;

    a passivation layer deposited over said overlaying interconnecting metalization structure;

    openings created in said layer of passivation, at least two of said openings overlaying at least one pair of points of electrical contact having been provided in the surface of said overlaying interconnecting metalization structure, providing at least one pair of points of electrical contact in said layer of passivation;

    an polymer insulating, separating layer deposited over the surface of said patterned and etched layer of passivation, including said openings created in said layer of passivation;

    at least one pair of openings created in said polymer insulating, separating layer that aligns with at least one pair of points of electrical contact provided in said layer of passivation;

    a layer of conductive material selectively deposited over the surface of at least one pair of points of electrical contact provided in said layer of passivation, filling said openings created in said polymer insulating, separating layer, creating conductive plugs through said polymer insulating, separating layer, said conductive plugs overlaying at least one pair of points of electrical contact provided in said layer of passivation;

    a layer of solder selectively created over the surface of said conductive plugs;

    said discrete electrical component positioned above and in alignment with said selectively created layer of solder such that electrical contact points of said discrete electrical component align with said selectively created layer of solder; and

    said selectively created layer of solder flowed, creating solder balls connecting said discrete electrical component with said conductive plugs in said polymer insulating, separating layer, thereby connecting said discrete electrical component with a pair of points of electrical contact in said layer of passivation.

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