Integration of fibers on substrates fabricated with grooves

• US 6,516,114 B2
• Filed: 02/27/2001
• Issued: 02/04/2003
• Est. Priority Date: 06/27/2000
• Status: Expired due to Term

• Current Assignee: Intelligent Fiber Optic Systems Corporation
• Original Assignee: Oluma, Inc. (Intelligent Fiber Optic Systems, Inc.)
• Inventors: Pi, Bo, Zhao, Shulai
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): Doan, Jennifer
• Application Number:
  US09/796,373
• Publication Number:
  US 20010055443A1
• Time in Patent Office: 707 Days
• Field of Search: 385/15, 385/18, 385/30-32, 385/39, 385/47, 385/65, 385/83, 385/129-132, 385/50, 385/137
• US Class Current: 385/30
• CPC Class Codes: G02B 6/12007 forming wavelength selective elements, e.g. multiplexer, demultiplexer
• CPC Class Codes: G02B 6/12019 characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes coupling integrated waveguide to fibre G02B6/30, to optoelectronic element G02B6/42; monolithic integration of integrated waveguides with other optical elements G02B6/12004
• CPC Class Codes: G02B 6/266 the optical element being an attenuator
• CPC Class Codes: G02B 6/2804 forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
• CPC Class Codes: G02B 6/2826 using mechanical machining means for shaping of the couplers, e.g. grinding or polishing grinding, polishing in general B24
• CPC Class Codes: G02B 6/2852 using tapping light guides arranged sidewardly, e.g. in a non-parallel relationship with respect to the bus light guides (light extraction or launching through cladding, with or without surface discontinuities, bent structures)
• CPC Class Codes: G02B 6/29332 Wavelength selective couplers, i.e. based on evanescent coupling between light guides, e.g. fused fibre couplers with transverse coupling between fibres having different propagation constant wavelength dependency non wavelength-selective light guide couplers G02B6/28
• CPC Class Codes: G02B 6/29334 Grating-assisted evanescent light guide couplers, i.e. comprising grating at or functionally associated with the coupling region between the light guides, e.g. with a grating positioned where light fields overlap in the coupler
• CPC Class Codes: G02B 6/29355 Cascade arrangement of interferometers
• CPC Class Codes: G02B 6/30 for use between fibre and thin-film device
• CPC Class Codes: G02B 6/3502 involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
• CPC Class Codes: G02B 6/3536 involving evanescent coupling variation, e.g. by a moving element such as a membrane which changes the effective refractive index mode converters G02B6/14; adjustable lateral coupling between waveguides G02B6/283; electro- optical refractive index variations G02F1/0118
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/3582 Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3636 the mechanical coupling means being grooves G02B6/3652 takes precedence
• CPC Class Codes: G02B 6/3692 with surface micromachining involving etching, e.g. wet or dry etching steps surface micromachining involving subtractive techniques B81C1/00055

Abstract

Techniques and devices for integrating optical fibers on substrates with grooves for various optical applications. Two openings that penetrate through the substrate are formed at both ends of each groove to allow a fiber to pass from one side of substrate to another side. The fiber cladding of a fiber portion positioned in the groove can be removed to produce an optical coupling port.

Claims

1. A device, comprising:

a substrate having first and second opposing substrate surfaces to form a first elongated groove formed over said first substrate surface and first and second openings respectively formed at two ends of said first elongated groove, each opening formed through said substrate to extend between said first and second substrate surfaces; and

an optical fiber, which comprises a fiber core and a fiber cladding surrounding said fiber core, passing through said first and second openings and having at least first, second, and third contiguous fiber portions, wherein said second fiber portion is disposed in said first elongated groove on said first substrate surface, and said first and said third fiber portions located on or over said second substrate surface.

2. The device as in claim 1, wherein said second fiber portion includes an area where at least part of said fiber cladding is removed to form an optical coupling surface which evanescently couples optical energy into or out of said fiber core of said optical fiber.

3. The device as in claim 1, wherein said second fiber portion is bonded to said first elongated groove.

4. The device as in claim 1, wherein said first elongated groove has a V-shaped cross section.

5. The device as in claim 1, wherein said first elongated groove has a U-shaped cross section.

6. The device as in claim 1, wherein said first elongated groove has a rectangular cross section.

7. The device as in claim 1, wherein said first elongated groove has a cross section forms at least a part of a circle.

8. The device as in claim 1, wherein said first elongated groove has a depth that increases from a center between said first and said second openings towards said first and said second openings.

9. The device as in claim 1, wherein said first elongated groove has a width that increases from a center between said first and said second openings towards said first and said second openings.

10. The device as in claim 1, further comprising a second elongated groove formed on said second substrate surface and positioned to have one end overlapping one of said first and said second openings to receive said third fiber portion,

wherein said substrate further includes another opening at another end of said second elongated groove to pass a fourth fiber portion adjacent to said third fiber portion through said substrate to be on or over said first substrate surface.

11. The device as in claim 10, wherein said second elongated groove is oriented along an elongated direction of said first elongated groove.

12. The device as in claim 10, wherein said second elongated groove is oriented to form a non-zero angle with respect to an elongated direction of said first elongated groove.

13. The device as in claim 10, wherein said third fiber portion includes an area where at least part of fiber cladding is removed to form an optical coupling surface which evanescently couples optical energy into or out of a core of said optical fiber.

14. The device as in claim 10, wherein said second elongated groove is sufficiently deep to keep said third fiber portion from protruding above said second substrate surface so that an optical coupling portion is not formed in said second fiber portion.

15. The device as in claim 10, further comprising a third elongated groove formed on said first substrate surface and positioned to have one end overlap said another opening of said second elongated groove to receive said fourth fiber portion.

16. The device as in claim 15, wherein each of said second, said third, and said fourth fiber portions includes an area where at least part of fiber cladding is removed to form an optical coupling surface which evanescently couples optical energy into or out of a core of said optical fiber.

17. The device as in claim 16, wherein at least two of said first, said second and said third grooves have different groove depths.

18. The device as in claim 16, further comprising a fourth opening at the other end of said third elongated groove to pass a fifth fiber portion adjacent to said fourth fiber portion through said substrate to be on or over said second substrate surface.

19. The device as in claim 1, wherein said substrate further includes:

a second elongated groove formed on said second substrate surface and spaced from said first elongated groove along said substrate; and

first and second openings respectively formed at two ends of said second elongated groove, each opening formed through said substrate to extend between said first and second substrate surfaces,

wherein a portion of said fiber is disposed in said second groove.

20. The device as in claim 19, wherein said substrate if formed of silicon and said buffer layer is formed of silicon nitride or silicon dioxide.

21. The device as in claim 1, further comprising a buffer layer formed between said groove and said fiber operable to reduce a mechanical or thermal stress between said fiber and said substrate.

22. The device as in claim 1, wherein said substrate further includes:

a second elongated groove formed on said first substrate surface and spaced from said first elongated groove; and

first and second openings respectively formed at two ends of said second elongated groove, each opening formed through said substrate to extend between said first and second substrate surface.

23. The device as in claim 22, wherein one opening at one end of said second elongated groove receives a fourth fiber portion adjacent to said third fiber portion on said first substrate surface, wherein another opening at another end of said second elongated groove receives and passes a fifth fiber portion adjacent to said fourth fiber portion through said substrate to be on or over said second substrate surface, and wherein said fourth fiber portion is placed in said second elongated groove.

24. The device as in claim 22, wherein said second elongated groove is oriented along an elongated direction of said first elongated groove.

25. The device as in claim 22, wherein said second elongated groove is oriented to form an angle with an elongated direction of said first elongated groove.

26. The device as in claim 22, further comprising a spacer positioned on said second substrate surface between said first and said second elongated grooves to support said third fiber portion and to reduce a bending of said third fiber portion.

27. The device as in claim 1, wherein said substrate is formed of a semiconductor, an insulator, or a metallic material.

28. A method, comprising:

providing a substrate having first and second opposing substrate surfaces;

processing said substrate to form an elongated groove over said first substrate surface;

forming two openings respectively at two ends of said elongated groove and through said substrate to extend between said first and second substrate surfaces; and

threading an optical fiber through said two openings to place a portion of said fiber in said elongated groove on said first substrate surface and to place two adjacent portions of said fiber on two ends of said portion on said second substrate surface.

29. The method as in claim 28, wherein said substrate is formed of a semiconductor material, wherein said processing includes an anistropic etching process to form a V-shaped cross section in said elongated groove.

30. The method as in claim 28, wherein a single fabrication process is used to form said elongated groove and said two openings.

31. The method as in claim 28, further comprising forming another elongated groove over said second substrate surface, wherein one end of said another elongated groove overlaps with one of said two openings.

32. The method as in claim 28, further comprising reducing a mechanical or thermal stress between said optical fiber and said substrate by forming a buffer layer in said elongated groove between said substrate and said optical fiber.

33. A device, comprising:

first and second substrates, each substrate having first and second opposing substrate surfaces to include an elongated groove formed over said first substrate surface and two openings respectively formed at two ends of said elongated groove that go through said substrate to extend between said first and second substrate surfaces;

a first optical fiber passing through said two openings in said first substrate to have a fiber portion positioned in said elongated groove in which a portion of fiber cladding is removed to form a first optical coupling port; and

a second optical fiber passing through said two openings in said second substrate to have a fiber portion positioned in said elongated groove in which a portion of fiber cladding is removed to form a second optical coupling port,

wherein said first substrate surfaces of said first and said second substrates are positioned to face each other to allow evanescent coupling between said first and said second optical fibers through said first and second optical coupling ports.

34. The device as in claim 33, wherein at least one of said first and said second substrates includes a semiconductor material, an insulator material, or a metallic material.

35. The device as in claim 33, wherein said first and said second optical coupling ports are spatially shifted along a direction parallel to each substrate to control a strength of said evanescent coupling.

36. The device as in claim 33, wherein depths of said elongated grooves in said first and said second substrates are selected to control an evanescent coupling strength between said first and said second optical coupling ports.

37. The device as in claim 33, wherein each substrate includes at least another elongated groove on said first substrate surface and two openings respectively formed at two ends of said another elongated groove that go through said substrate to extend between said first and said second substrate surfaces,

wherein said another elongated groove in said first substrate receives another portion of said first fiber to form a third optical coupling port by removing part of fiber cladding, and

wherein said another elongated groove in said second substrate receives another portion of said second fiber to form a fourth optical coupling port by removing part of fiber cladding, and said third and said fourth optical coupling ports are positioned to provide evanescent coupling between said first and said second fibers.

38. The device as in claim 33, wherein said second substrate includes a second elongated groove formed over said second substrate surface and positioned to have one end overlap one of said two openings of said elongated groove on said first substrate surface to receive said fiber,

wherein said substrate further includes another opening at another end of said second elongated groove to pass said fiber from said second substrate surface to said first substrate surface, and the fiber cladding of a portion of said fiber in said second elongated groove is removed to form a third optical coupling port, and

said device further comprising:

a third substrate having first and second opposing substrate surfaces to include an elongated groove formed over said first substrate surface and two openings respectively formed at two ends of said elongated groove that go through said third substrate to extend between said first and second substrate surfaces;

a third optical fiber passing through said two openings in said third substrate to have a fiber portion positioned in said elongated groove in which a portion of fiber cladding is removed to form a fourth optical coupling port,

wherein said first substrate surface of said third substrate is positioned to face said second substrate surface of said second substrate to allow evanescent coupling between said second and said third optical fibers through said third and said fourth optical coupling ports.

39. A device, comprising:

a substrate having first and second opposing substrate surfaces and first, second, and third openings that are spaced from one another and go through said substrate to extend between said first and said second substrate surfaces;

a first groove formed over said first substrate surface between said first and second openings to have a first end connected to said first opening and a second end connected to said second opening;

a second groove formed over said second substrate surface between said second and third openings to have a first end connected to said second opening and a second end connected to said third opening; and

an optical fiber engaged to said substrate by passing through said first, second, and third openings in said substrate to have a first fiber portion positioned in said first groove and a second fiber portion positioned in said second groove.

40. The device as in claim 39, wherein one of said first and said second fiber portions includes an area where at least part of fiber cladding is removed to form an optical coupling surface.

41. The device as in claim 39, wherein both said first and said second fiber portions include an area where at least part of fiber cladding is removed to form an optical coupling surface to allow optical coupling with said optical fiber from both said first and said second substrate surfaces.

42. The device as in claim 39, further comprising a buffer layer formed between each substrate surface and said optical fiber operable to reduce a mechanical or thermal stress between said optical fiber and said substrate.

43. A device, comprising:

a substrate having first and second opposing substrate surfaces;

a first elongated groove formed over said first substrate surface; and

first and second openings respectively formed at two ends of said first elongated groove, each opening formed through said substrate to extend between said first and second substrate surfaces, wherein said first elongated groove has a depth that increases from a center between said first and said second openings towards said first and said second openings.

44. The device as in claim 43, wherein said first elongated groove has a width that increases from a center between said first and said second openings towards said first and said second openings.

45. The device as in claim 43, further comprising a second elongated groove formed on said second substrate surface and positioned to have one end overlap one of said two openings, wherein said substrate further includes another opening at another end of said second elongated groove.

46. The device as in claim 45, wherein said second elongated groove is oriented along an elongated direction of said first elongated groove.

47. The device as in claim 45, wherein said second elongated groove is oriented to form an angle with an elongated direction of said first elongated groove.

48. The device as in claim 45, wherein said first and said second elongated grooves have different groove depths.

49. The device as in claim 43, further comprising a fiber having a first portion positioned in said first elongated groove over said first substrate surface, a second portion immediately adjacent to said first portion to have a part in said first opening and another part over said second substrate surface, and a third portion, which is also immediately adjacent to said first portion, to have a part in said second opening and another part over said second substrate surface.