Using refractory metal silicidation phase transition temperature points to control and/or calibrate RTP low temperature operation

• US 6,517,235 B2
• Filed: 05/31/2001
• Issued: 02/11/2003
• Est. Priority Date: 05/31/2001
• Status: Expired due to Fees

• Current Assignee: Chartered Semiconductor Manufacturing Incorporated (GlobalFoundries, Inc.), Lucent Technologies, Inc. (Nokia Corporation)
• Original Assignee: Chartered Semiconductor Manufacturing Incorporated (GlobalFoundries, Inc.)
• Inventors: Jaiswal, Rajneesh, Yelamanchi, Ravi Sankar, Zhu, Zhong Yun, Karim, Haznita Abd, Zhang, Bei Chao, Leong, Chee Kong, Cham, Johnny
• Primary Examiner(s): Gutierrez, Diego
• Assistant Examiner(s): VERBITSKY, GAIL KAPLAN
• Application Number:
  US09/867,560
• Publication Number:
  US 20020191668A1
• Time in Patent Office: 621 Days
• Field of Search: 374/1, 438/664, 438/663, 438/682, 438/14, 438/17, 438/1
• US Class Current: 374/1
• CPC Class Codes: G01K 15/002 Calibrated temperature sources, temperature standards therefor arrangements with respect to the cold junction of thermo-electric elements G01K7/12

Abstract

A method for controlling and/or calibrating rapid thermal process systems is described. One or more wafers comprising a silicon semiconductor substrate having a refractory metal layer thereon are silicided in a RTP system at different temperatures. Sheet resistance uniformity of the wafer is measured thereby detecting silicidation phase transition temperature points at the highest uniformity points. The temperature points are used to calibrate or to reset the RTP system. A plurality of wafers comprising a silicon semiconductor substrate having a refractory metal layer thereon can be silicided in each of a plurality of rapid thermal process systems. Sheet resistance uniformity of each of the wafers is measured thereby detecting silicidation phase transition temperature points by highest sheet resistance uniformity for each of the RTP systems. The temperature points are used to match temperatures for each of the RTP systems. The temperature point depend upon the type of refractory metal used and can range from about 200 to 800 ° C.

Claims

1. A method of calibrating a rapid thermal process system comprising:

siliciding in said rapid thermal process system a wafer comprising a silicon semiconductor substrate having a refractory metal layer thereon;

measuring sheet resistance uniformity of said wafer and thereby detecting silicidation phase transition temperature points at the highest value of said sheet resistance uniformity; and

using said temperature points to calibrate said rapid thermal process system.

2. The method according to claim 1 wherein said refractory metal layer is selected from the group containing cobalt, titanium, nickel, tungsten, molybdenum, tantalum, and platinum.

3. The method according to claim 1 wherein said refractory metal layer is sputter deposited to a thickness of less than about 100 Angstroms to about 1000 Angstroms.

4. The method according to claim 1 further comprising depositing a capping layer overlying said refractory metal layer.

5. The method according to claim 4 wherein said capping layer is selected from the group containing titanium, and titanium nitride and wherein said capping layer is sputter deposited to a thickness of less than about 100 Angstroms to about 500 Angstroms.

6. The method according to claim 1 wherein said rapid thermal process system is selected from the group containing:

silicidation, and low temperature annealing.

7. The method according to claim 1 wherein said rapid thermal process system is a low temperature process at a temperature of between about 200 and 800°

C.

8. The method according to claim 1 further comprising using said temperature points to calibrate said rapid thermal system to match another said rapid thermal system.

9. The method according to claim 1 further comprising siliciding a plurality of wafers wherein said refractory metal layer has a plurality of thicknesses and wherein some of said plurality of wafers further comprise a capping layer overlying said refractory metal layer wherein a plurality of silicidation phase transition temperature points are detected and wherein said plurality of temperature points are used to calibrate said rapid thermal process system.

10. A method of resetting a rapid thermal process system to a set temperature point comprising:

siliciding in said rapid thermal process system a first wafer comprising a silicon semiconductor substrate having a refractory metal layer thereon;

siliciding in said rapid thermal process system a second wafer comprising a silicon semiconductor substrate having same said refractory metal layer thereon;

measuring sheet resistance uniformity of said first and second wafers and thereby detecting silicidation phase transition temperature point at the highest value of said sheet resistance uniformity;

comparing said highest uniformity temperature point to said set temperature point to detect a temperature shift; and

using said temperature shift to reset said rapid thermal process system.

11. The method according to claim 10 wherein said refractory metal layer is selected from the group containing cobalt, titanium, nickel, tungsten, molybdenum, tantalum, and platinum.

12. The method according to claim 10 wherein said refractory metal layer is sputter deposited to a thickness of less than about 100 Angstroms to about 1000 Angstroms.

13. The method according to claim 10 further comprising depositing a capping layer overlying said refractory metal layer.

14. The method according to claim 13 wherein said capping layer is selected from the group containing titanium, and titanium nitride and wherein said capping layer is sputter deposited to a thickness of less than about 100 Angstroms to about 500 Angstroms.

15. The method according to claim 10 wherein said rapid thermal process system is selected from the group containing:

silicidation, low temperature annealing, and heating.

16. The method according to claim 10 wherein said rapid thermal process system is a low temperature process at a temperature of between about 200 and 800°

C.

17. The method according to claim 10 further comprising siliciding a plurality of first and second wafers wherein said refractory metal layer has a plurality of thicknesses and wherein some of said plurality of wafers further comprise a capping layer overlying said refractory metal layer wherein a plurality of first and second silicidation phase transition temperature points are detected and wherein said plurality of first and second temperature points are compared to detect said temperature shift.

18. A method of temperature matching a plurality of rapid thermal process systems comprising:

siliciding in each of said plurality of rapid thermal process systems a wafer comprising a silicon semiconductor substrate having a refractory metal layer thereon;

measuring sheet resistance uniformity of each of said wafers and thereby detecting silicidation phase transition temperature points at the highest value of sheet resistance uniformity for each of said rapid thermal process systems; and

using said temperature points to match temperatures for each of said rapid thermal process systems.

19. The method according to claim 18 wherein said refractory metal layer is selected from the group containing cobalt, titanium, nickel, tungsten, molybdenum, tantalum, and platinum.

20. The method according to claim 18 wherein said refractory metal layer is sputter deposited to a thickness of less than about 100 Angstroms to about 1000 Angstroms.

21. The method according to claim 18 further comprising depositing a capping layer overlying said refractory metal layer.

22. The method according to claim 21 wherein said capping layer is selected from the group containing titanium, and titanium nitride and wherein said capping layer is sputter deposited to a thickness of less than about 100 Angstroms to about 500 Angstroms.

23. The method according to claim 18 wherein said rapid thermal process systems are selected from the group containing:

silicidation, low temperature annealing, and heating.

24. The method according to claim 18 wherein said rapid thermal process systems are low temperature processes at a temperature of between about 200 and 800°

C.

25. The method according to claim 18 further comprising siliciding a plurality of first and second wafers wherein said refractory metal layer has a plurality of thicknesses and wherein some of said plurality of wafers further comprise a capping layer overlying said refractory metal layer wherein a plurality of first and second silicidation phase transition temperature points are detected and wherein said plurality of first and second temperature points are compared to detect said temperature shift.