Method for testing semiconductor memory devices, and apparatus and system for testing semiconductor memory devices
First Claim
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1. A method for testing a semiconductor device, comprising:
- executing a first function test which detects an abnormal portion of a memory cell array of the semiconductor device;
executing a DC characteristic test which detects a DC characteristic of the semiconductor device, and executing a second function test different from the first function test;
checking a location of the abnormal portion of the memory cell array, based on abnormal portion with a spare portion, said arithmetic operation being performed in parallel to both the DC characteristic test and the second function test; and
executing a remedy process to program replacing data based on results of the arithmetic operation in a redundancy circuit of the semiconductor device.
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Abstract
A method for testing a semiconductor device comprises executing a function test on the semiconductor device, executing a DC characteristic test on the semiconductor device, executing a remedy determination process of the semiconductor device, and executing a remedy process on the semiconductor device. The remedy determination process is performed in parallel to the DC test.
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Citations
24 Claims
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1. A method for testing a semiconductor device, comprising:
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executing a first function test which detects an abnormal portion of a memory cell array of the semiconductor device;
executing a DC characteristic test which detects a DC characteristic of the semiconductor device, and executing a second function test different from the first function test;
checking a location of the abnormal portion of the memory cell array, based on abnormal portion with a spare portion, said arithmetic operation being performed in parallel to both the DC characteristic test and the second function test; and
executing a remedy process to program replacing data based on results of the arithmetic operation in a redundancy circuit of the semiconductor device. - View Dependent Claims (2, 3, 4, 5)
a determination process which determines whether or not the semiconductor device is a device that can be remedied, said remedy process being executed for the device that can be remedied.
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5. The method according to claim 4, wherein said determination process is performed by checking whether a number of defective addresses is larger than a predetermined limit number.
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6. A method for testing a semiconductor device, comprising:
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executing a first function test which detects an abnormal portion of a memory cell array of the semiconductor device;
executing a DC characteristic test which detects a DC characteristic of the semiconductor device, and executing a second function test different from the first function test;
checking a location of the abnormal portion of the memory cell array, based on results of the first function test, and performing an arithmetic operation to replace the abnormal portion with a spare portion, said arithmetic operation being performed in parallel to both the DC characteristic test and the second function test;
executing a remedy process to program replacing data based on results of the arithmetic operation in a redundancy circuit of the semiconductor device; and
executing a final function test on the semiconductor device being programmed with the replacing data. - View Dependent Claims (7, 8, 9, 10)
a determination process which determines whether or not the semiconductor device is a device that can be remedied, said remedy process being executed for the device that can be remedied.
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10. The method according to claim 9, wherein said determination process is performed by checking whether a number of defective addresses is larger than a predetermined limit number.
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11. A method for testing a semiconductor device, comprising:
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executing a function test required for remedy determination on the semiconductor of device;
executing a DC characteristic test and remaining function test on the semiconductor device;
executing a remedy determination process of the semiconductor device, said remedy determination process being performed in parallel to both the DC characteristic test and the remaining function test; and
executing a remedy process on the semiconductor device. - View Dependent Claims (12, 13, 14, 15, 16, 17, 24)
said remedy process being executed for the device that can be remedied. -
17. The method according to claim 16, wherein said remedy determination process is performed by checking whether a number of defective addresses is larger than a predetermined limit number.
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24. The method according to claim 13, wherein said remedy determination process is performed by checking whether a number of defective addresses is larger than a predetermined limit number.
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18. A method for testing a semiconductor device, comprising:
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executing a function test on the semiconductor device;
executing a DC characteristic test on the semiconductor device;
executing a remedy determination process of the semiconductor device, said remedy determination process being performed in parallel to the DC characteristic test; and
executing a remedy process on the semiconductor device. - View Dependent Claims (19, 20, 21, 22, 23)
said remedy process being executed for the device that can be remedied.
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Specification