Micromechanical modulator and methods for fabricating the same

• US 6,519,073 B1
• Filed: 01/10/2000
• Issued: 02/11/2003
• Est. Priority Date: 01/10/2000
• Status: Expired due to Term

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Agere Systems Guardian Corp. (Broadcom, Inc.), Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Goossen, Keith Wayne
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): THOMPSON, TIMOTHY J
• Application Number:
  US09/480,780
• Time in Patent Office: 1,128 Days
• Field of Search: 359/290, 359/248, 359/291, 359/292, 359/293, 359/294, 359/295, 359/247, 359/263, 359/276
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means

Abstract

A method and apparatus for modulating an optical signal using a micromechanical modulator are disclosed. The modulator comprises a membrane, which includes a first and a second layer, a substrate layer, and a substrate, spaced from the membrane to form an air gap. The layers of the membrane are characterized in that there is a relationship between the refractive indices of the layers and the refractive index of the substrate. The membrane is suspended in a first position over the substrate by a flexible support arrangement. Bias is applied to the membrane and the substrate to create an electrostatic force to move the membrane towards the substrate to a second position. The reflectivity of the device to an optical signal changes as the membrane moves from the first position to the second position, thereby modulating the signal. In a preferred embodiment, the thickness of the first and second layers of the membrane are approximately equal to one-third and one-tenth, respectively, of a wavelength of the optical signal, as measured within the first and second layers, respectively. The thickness of the substrate layer is approximately equal to one-seventh of the wavelength of the optical signal, as measured within the substrate layer.

Claims

1. A modulator for modulating an optical signal comprising:

a conductive substrate;

a conductive membrane comprising at least a first layer of material having a thickness approximately equal to one-third of a wavelength of the optical signal, as measured within the first layer, and a second layer of material having a thickness approximately equal to one-tenth of a wavelength of the optical signal, as measured within the second layer;

a flexible support for positioning the membrane in a first position wherein the membrane is oriented in spaced and superposed relation to the substrate, defining an air gap which is approximately equal to an integer multiple of one-quarter of a wavelength of the optical signal, as measured in air;

a substrate layer of material overlaying the conductive substrate and having a thickness approximately equal to one-seventh of the wavelength of the optical signal; and

a means for supplying bias;

where, under the action of bias, the membrane moves to a second position, changing the air gap by approximately one-quarter of a wavelength of the optical signal, as measured in air, where the change from the first to the second position causes a change in the amount of the optical signal that is reflected from the membrane.

2. The modulator of claim 1, wherein the first layer has a refractive index which is approximately equal to the square root of the refractive index of the substrate.

3. The modulator of claim 2, wherein the refractive index of the first layer of material is approximately two.

4. The modulator of claim 1, wherein the membrane comprises an optically transparent portion.

5. The modulator of claim 1 where, under the action of bias, the flexible support flexes and the membrane moves toward the substrate.

6. The modulator of claim 1, wherein the conductive substrate is a semiconductor.

7. The modulator of claim 1, wherein the conductive substrate is silicon.

8. The modulator of claim 1, wherein the first layer of material and substrate layer of material are selected from the group consisting of silicon nitride and silicon oxide.

9. The modulator of claim 1, wherein the second layer of material has a refractive index approximately equal to the refractive index of the substrate.

10. The modular of claim 9, wherein the refractive index of the second layer of material is approximately 3.48.

11. The modulator of claim 1, wherein a portion of the membrane defines an optical window for receiving an optical fiber.

12. The modulator of claim 11, wherein the optical window is circular-shaped.

13. The modulator of claim 1, wherein the second layer of material is the same material as the substrate.

14. The modulator of claim 1, wherein the second layer of material is polysilicon.

15. The modulator of claim 1, wherein the integer multiple is one so that the air gap in the first position is approximately equal to one-quarter of a wavelength of the optical signal, as measured in air.

16. The modulator of claim 1, wherein at least a portion of the membrane is coated with a conductive material which is selected from the group consisting of aluminum, gold, platinum, tungsten and conducting silicon.

17. The modulator of claim 1, wherein the second layer of material is conductive.

18. The modulator of claim 1, wherein the flexible support comprises a plurality of flexible support arms.

19. The modulator of claim 18, wherein at least a portion of the flexible support arms are conductive.

20. The modulator of claim 1, further comprising a support for an optical fiber.

21. The modulator of claim 1, wherein the thickness of the first layer of material is approximately in the range of 2350 to 2470 Å

.

22. The modulator of claim 1, wherein the thickness of the second layer of material is approximately in the range of 350 to 450 Å

.

23. The modulator of claim 1, wherein the thickness of the substrate layer is approximately in the range of 975 to 1075 Å

.

24. A modulator for modulating an optical signal comprising:

a conductive substrate;

a substrate layer overlaying the conductive substrate having a thickness approximately equal to one-seventh of the wavelength of the optical signal, as measured within the substrate layer;

an optical fiber having a first end in optical communication with an optically transparent portion of a conductive membrane;

the conductive membrane having a first and a second surface, where the second surface is closest to the conductive substrate, and comprising an optically active layer having a refractive index which is approximately equal to the square root of the product of the refractive indices of the conductive substrate and the optical fiber, and a thickness approximately equal to one-third of a wavelength of the optical signal, as measured within the optically active layer, the conductive membrane further comprising another layer positioned adjacent the second surface and having a refractive index which is approximately equal to the refractive index of the conductive substrate, and a thickness approximately equal to one-tenth of the wavelength of the optical signal, as measured within the layer; and

a means for supplying bias, wherein the first end of the optical fiber is in superposed relation to the first surface of the conductive membrane and is spaced from the first surface by approximately an integer multiple of one-quarter of a wavelength of the optical signal, as measured in air, and where the conductive substrate is oriented in superposed relation to the second surface of the conductive membrane and is spaced from the second surface by approximately an integer multiple of one-quarter of a wavelength of the optical signal, as measured in air, where the space between the second surface of the conductive membrane and the conductive substrate defines a first position of the conductive membrane, and where under the action of bias, the conductive membrane moves to a second position, changing the space between the second surface and the conductive substrate by approximately one-quarter of a wavelength of the optical signal, as measured in air, the change from the first to the second position causing a change in the amount of the optical signal that is reflected from the membrane.

25. A device which, under the action of an applied bias, has a variable reflectivity to an incident optical signal received by the device, comprising:

a substrate;

a membrane comprising a first and a second layer of material, the first layer having a refractive index which is approximately equal to the square root of the refractive index of the substrate, and the second layer having a refractive index approximately equal to the refractive index of the substrate, the membrane further having an optically transparent portion;

a substrate layer having a refractive index which is approximately equal to the square root of the refractive index of the substrate; and

a flexible support for positioning the membrane in a first position wherein the membrane is oriented in spaced and superposed relation to the substrate to form an air gap.

26. The device of claim 25, wherein the substrate is formed of a conductive material.

27. The device of claim 25, wherein the substrate is a semiconductor.

28. The device of claim 25, wherein the substrate is silicon.

29. The device of claim 25, wherein the first layer of material has a thickness approximately equal to one-third of a wavelength of the optical signal, as measured within the first layer.

30. The device of claim 25, wherein the first layer of material is silicon nitride.

31. The device of claim 25, wherein the second layer of material has a thickness approximately equal to one-tenth of a wavelength of the optical signal, as measured within the second layer.

32. The device of claim 25, wherein the substrate layer has a thickness approximately equal to one-seventh of a wavelength of the optical signal, as measured within the second layer.

33. The device of claim 25, wherein the second layer of material is the same material as the substrate.

34. The device of claim 25, wherein the second layer of material is polysilicon.

35. The device of claim 25, wherein in the first position, the air gap is approximately equal to an integer multiple of one-quarter of a wavelength of the optical signal, as measured in air.

36. The device of claim 35, wherein the integer multiple equals one so that the air gap is approximately equal to one-quarter of a wavelength of the optical signal, as measured in air.

37. The device of claim 25, wherein at least a portion of the membrane is conductive.

38. The device of claim 37, wherein the conductive portion of the membrane comprises a layer of conductive material.

39. The device of claim 38, wherein the conductive material is selected from the group consisting of aluminum, gold, platinum, tungsten and conducting silicon.

40. The device of claim 25, wherein the second layer of material is conductive.

41. The device of claim 25, further comprising a means for supplying bias.

42. The device of claim 25, wherein, under the action of bias, the membrane moves to a second position, changing the air gap by approximately one-quarter of a wavelength of the optical signal, as measured in air.

43. The device of claim 42, wherein, in the second position, the air gap is approximately one-quarter of a wavelength of the optical signal, as measured in air, less than the air gap in the first position.

44. The device of claim 25, wherein the flexible support is flexible support arms.

45. The device of claim 25, wherein at least a portion of the flexible support is conductive.

46. The device of claim 44, wherein there are four flexible support arms.

47. The device of claim 25, further comprising a support for an optical fiber.

48. The device of claim 25, wherein the refractive index of the first layer of material is approximately two.

49. The device of claim 25, wherein the refractive index of the second layer of material is approximately 3.48.

50. A device which, under the action of an applied bias, has a variable reflectivity to an incident optical signal received by the device, comprising:

a substrate coated with a conductive material to a thickness of one-seventh of a wavelength of the optical signal, as measured within the conductive material; and

an optical fiber having a first end in optical communication with an optically transparent portion of a membrane;

the membrane having a first and a second surface and comprising a first layer having a thickness of one-third of the wavelength of the optical signal, as measured within the first layer, and a second layer having a thickness of one-tenth of the wavelength of the optical signal, as measured within the second layer;

wherein the first end of the optical fiber is in superposed and spaced relation to the first surface of the membrane, and where the substrate is oriented in superposed and spaced relation to the second surface of the membrane so that the membrane is positioned between the first end of the optical fiber and the substrate.

51. The device of claim 50, wherein the first layer has a refractive index which is approximately equal to the square root of the product of the refractive indices of the substrate and the optical fiber.

52. The device of claim 50, wherein the space between the optical fiber and the membrane is approximately equal to one-quarter of a wavelength of the optical signal, as measured in air.

53. A method for modulating an optical signal comprising:

providing a conductive substrate;

providing a conductive membrane in spaced and superposed relation to the substrate where the membrane comprises a first layer of material having a thickness of one-third of a wavelength of the optical signal, as measured within the first layer, and a second layer of material having a thickness of one-tenth of the wavelength of the optical signal, as measured within the second layer, the membrane further having a first and second position;

providing a substrate layer on a surface of the conductive substrate closest to the conductive membrane, the substrate layer comprises a material having a thickness of one-seventh of the wavelength of the optical signal, as measured within the conductive material;

exposing the membrane to an optical signal; and

applying a bias to move the membrane from the first position to the second position causing the reflectivity of the membrane to change.

54. The method of claim 53, wherein the step of providing a conductive membrane further comprises providing a conductive, flexible support to support the membrane over the substrate.

55. The method of claim 53, wherein the step of providing a membrane further comprises orienting the membrane and substrate so that the space between them is approximately equal to an integer multiple of one-quarter of a wavelength of the optical signal, as measured in air.

56. The method of claim 53, wherein the step of applying a bias to move the membrane from the first position to the second position further comprises decreasing the size of the space between the membrane and the substrate by one-quarter of a wavelength of the optical signal, as measured in air.

57. A method for making a modulator for modulating an optical signal comprising:

providing a conductive substrate;

providing a substrate layer of material on the conductive substrate having a thickness of one-tenth of a wavelength of the optical signal, as measured within the substrate layer; and

forming a conductive membrane on the substrate so that an air gap is defined between the membrane and a portion of the substrate, where the membrane comprises a first layer of material having a thickness of one-third of the wavelength of the optical signal, as measured within the first layer, and a second layer of material having a thickness of one-tenth of the wavelength of the optical signal, as measured within the second layer.

58. The method of claim 57, wherein the step of providing a conductive substrate further comprises appropriately doping a semiconductor.

59. The method of claim 57, wherein the step of forming a membrane further comprises selecting the first layer of material from the group consisting of silicon nitride and silicon oxide.

60. The method of claim 57, wherein the step of forming a membrane further comprises spacing the membrane from the substrate so that the air gap is approximately equal to an integer multiple of one-quarter of a wavelength of the optical signal, as measured in air.

61. A method for making a modulator for modulating an optical signal comprising:

providing a conductive substrate;

providing a substrate layer of material on the conductive substrate having a thickness of one-tenth of a wavelength of the optical signal, as measured within the substrate layer;

forming a conductive membrane on the substrate so that an air gap is defined between the membrane and a portion of the substrate, where the membrane comprises a first layer of material having a thickness approximately equal to one-third of the wavelength of the optical signal, as measured within the first layer of material, and a refractive index which is approximately equal to the square root of the product of the refractive indices of the substrate and the optical fiber, and a second layer of material having a thickness approximately equal to one-tenth of the wavelength of the optical signal, as measured within the second layer of material;

forming a support to support an optical fiber so that the optical fiber is spaced from the first layer of the membrane by approximately an integer multiple of one-quarter of a wavelength of the optical signal, as measured in air; and

attaching the optical fiber to the support.

62. The method of claim 61, wherein the step of forming a membrane further comprises spacing the membrane from the substrate so that the air gap is approximately equal to an integer multiple of one-quarter of a wavelength of the optical signal, as measured in air.

63. The method of claim 61, wherein the step of attaching the optical fiber to the support further comprises orienting the optical fiber so that it is in optical communication with the membrane.